Stations: 10 Stations, Port Size: ø6 One-touch Fitting, SI Unit: Device Net, -COM, Number of Input Blocks: Input Block 8 pcs., Input Block: M12, 4 Inputs, Input Block COM: PNP(+) or w/o SI/Input Block, Option 1: Back Pressure Check Valves, Name Plate, Option 2: None, US Option: Preferred US Option

Stations: 8 Stations, Port Size: 1/4" One-touch Fitting, Kit Name: Terminal Box, Common: -COM, Option 1: Back Pressure Check Valve for All Stations, Option 2: None, Option 3: Name Plate, Option 4: None, Option 5: None, CE Compliant: CE Compliant

Clean Series: Clean Room, Stations: 05, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, w/Name Plate

Clean Series: Clean Room, Stations: 05, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/5 m Cable, Side Entry, Option: w/Back Pressure Check Valve, w/Name Plate

Clean Series: Clean Room, Stations: 06, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, w/Name Plate

Clean Series: Clean Room, Stations: 06, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/5 m Cable, Side Entry, Option: w/Back Pressure Check Valve, w/Name Plate

Clean Series: Clean Room, Stations: 07, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, w/Name Plate

Clean Series: Clean Room, Stations: 07, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/5 m Cable, Side Entry, Option: w/Back Pressure Check Valve, w/Name Plate

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/o Cable, Side Entry, Option: w/Back Pressure Check Valve, w/Name Plate

Clean Series: Clean Room, Stations: 08, Cylinder Port: w/One-touch Fitting for ø6, Kit: w/5 m Cable, Side Entry, Option: w/Back Pressure Check Valve, w/Name Plate

Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: S (Flow Adjustment Valve), Thread: N (NPT), Port Size: 04 (1/2), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: None, Lead Wire: N (w/o Lead Wire w/M8 Connector), Unit Specification: F (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °F), Bracket: R (Bracket)

Rated Flow Range: 11 (1 to 100 L/min), Flow Adjustment Valve: S (With Flow Adjustment Valve, Straight), Port Size: N2 (NPT1/4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: N (w/o Lead Wire w/Connector), Unit Specification: M (SI Unit Only), Bracket/Panel Mount Adapter: S (Bracket, w/Flow Adjustment Valve)

Rated Flow Range: 04 (0.5 to 4 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: B (Out 1: PNP, Out 2: Flow Rate: PNP, Temp.: None, Temperature Sensor: None), Lead Wire: N (w/o Lead Wire and M8 Connector), Unit Specification: M (Instantaneous Flow: L/min, Accumulated Flow: L,Temperature: °C), Bracket: None,

Flow Rate Range: 202 (20 to 2000 L/min), Thread Type: Rc, Port Size: 06 (3/4), Output Specifications: B (PNP; PNP), Option 1: N (No Lead Wire), Unit Specifications: Unit Selection Function, Option 2: R (With Bracket)

Flow Rate Range: 202 (20 to 2000 L/min), Thread Type: N (NPT), Port Size: 06 (3/4), Output Specifications: B (PNP; PNP), Option 1: N (No Lead Wire), Unit Specifications: Unit Selection Function, Option 2: R (With Bracket)

Table of Contents

ASR430F-02-08S(-F20) ASR430F-02-10S(-F20) ASR530F-02-06S(-F20) ASR530F-02-08S(-F20) ASR530F-02-10S(-F20) ASR530F-02-12S(-F20) ASR530F-03-06S(-F20) ASR530F-03-08S(-F20) ASR530F-03-10S(-F20) ASR530F-03-12S(-F20) ASR630F-03-10S(-F20) ASR630F-03-12S(-F20) ASR630F-04-10S(-F20) ASR630F-04-12S(-F20) ASQ430F-02-06S(-F20) ASQ430F-02-08S(-F20) ASQ430F-02-10S(-F20) ASQ530F-02-06S(-F20) ASQ530F-02-08S

Table of Contents

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

AC

Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

Micro Mechanical Valve Series VM1000

VM230U-02-08A VM-08A 110 g Red VM220-02-30RA VM230-02-30RA VM220U-02-30RA VM230U-02-30RA VM-30AR 58 g Black VM220-02-30BA VM230-02-30BA VM220U-02-30BA VM230U-02-30BA VM-30AB Green VM220-02-30GA VM230-02-30GA VM220U-02-30GA VM230U-02-30GA VM-30AG Yellow VM220-02-30YA VM230-02-30YA VM220U-02-30YA VM230U-02-30YA VM-30AY Push button (Mushroom) Red VM220-02-32RA VM230-02-32RA VM220U-02-32RA VM230U

2

03-A 02-A IS10E-3003-A 04-A Cross spacer Note 6) Y14-M5-A Y24-01-A 02-A Y34-01-A 02-A Y44-02-A 03-A Y54-03-A 04-A Note 1) in part numbers for a round pressure gauge indicates a pipe thread type.