IDUS/IDFS

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

IDX-OM-V020

g 390 +/10 530 +/10 630 +/10 780 +/10 Auto drain Float type (Normally open: Min. operating pressure 0.1 MPa) Drain tube O.D. mm 12 Piping port size R1 R1 1/2 R2 Weight kg 49 68 95 110 Coating color Panel: Urban white 1 Base: Urban gray 2 IDFA60/70/80/90 Series 7.1 Specifications 7-1 IDX-OM-V020 Chapter 7 Documents Note 1: The operating range does not guarantee use with normal air flow capacity

Series 10-, 21- AF-A Air Filter

flats 17 Clearance for maintenance G 1/4 Drain A Metal bowl 10-/21-AF20-A 10-/21-AF30-A to 60-A With bowl guard Metal bowl with level gauge Metal bowl Applicable model Semi-standard specifications Dimensions B B B B Metal bowl with level gauge Bracket mounting size Semi-standard specifications Standard specifications Model B Metal bowl With bowl guard B B V U T R Q N M J G D E C B A P S

Stainless Steel Heat

(C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19 1.12 1.06 1.00 1.15 0.96 0.91 0.86 0.82 0.77 0.81 0.67 0.64 0.60 0.57 0.54 35 1.40 1.17 1.11 1.05 0.99 0.94 1.08 0.90 0.86

4/5 Port Air Operated Valve Series SYJA3000 1

11) (0.5) 10 5 5 2-1 (Bleed port) 10 10 7 7 2-1 (Bleed port) M3 x 0.5 (Piping port) 28 M5 x 0.8 (Piping port) 3 position closed center/exhaust center/pressure center SYJA3 20-M3(-F) 3 position closed center/exhaust center/pressure center SYJA3 40-M5 3 4 5 3 4 5 7.1 9 10 2-M3 x 0.5 (Pilot port) 1.8 10 4 A B 1.5 7 8.2 19 2-M3 x 0.5 (Pilot port) (For mounting) 2-3.2 22 3 49 2.5 (For mounting

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

Data A Correction factor for temperature (Series IDUS) Inlet air temp. ( C) Outlet air press. dew point ( C) Ambient temp. ( C) 50 55 60 65 70 80 15 15 15 15 15 15 10 10 10 10 10 10 5 5 5 5 5 5 1.64 1.37 1.30 1.23 1.16 1.09 1.26 1.05 1.00 0.95 0.89 0.84 0.88 0.74 0.70 0.66 0.62 0.59 30 1.56 1.30 1.24 1.17 1.11 1.04 1.20 1.00 0.95 0.90 0.85 0.80 0.84 0.70 0.67 0.63 0.60 0.56 32 1.50 1.25 1.19

LX Series Compact Electric Actuators

l Cross section C-C Cross section C-C #i .. :: fl ffi -i+-sLJ rr Model D f G, I K L !,!

Ejector Valve Unit, Series ZYY/ZYX

10 -20 -20 -20 -20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure MPa Suction flow rate l/min (ANR) Supply pressure MPa Suction flow rate l/min (ANR) ZY -10S Max. vacuum pressure: 84KPa {630mmHg} Y3 X3 ZY -10L Max. vacuum pressure: 53KPa{400mmHg} Y3 X3 Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow

4/5 Port Air Operated Valve SYJA3000 Series

B M3 x 0.5 (Piping port) 1.5 1.5 33 36 Manual override B P R R (35) 7 7 36 (2) 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2 x M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2 x 3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2 x 1.8 2 x M3 x

CU

Internal circuits Weights (g) D-F9N(V) D-F9N(V) D-F9P(V) D-F9B(V) Auto switch part no.

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Recommended flow rate Note) (l/min (ANR)) Internal capacity (cm3) 1.7 Mass (g) ZA Model IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 1.7 4.3 ZR Metric size Easy installation

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

IDX-OM-W093

L . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 R .11-1 11.1 . 11-1 11.2 . 11-1 11.3 . 11-2 12 T . 12-1 12.1 . 12-1 12.2 . 12-1 12.3 . 12-2 12.4 . 12-3 12.5 . 12-4 13 V . 12-5 13.1 . 13-1 13.2 . 13-1 13.3 . 13-2 14 . 14-1 14.1 . 14-1 IDF60/70/80/90 Series IDX-OM-W093 1 1.1 () 6.2 1.1.1 3 IDF60/70/80/90 Series 1-1 IDX-OM-W093 1.2 6 1.2.1 1.2.2 50 1.2.3

Ejector Valve Unit Series ZYY/ZYX 1

10 20 20 20 20 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 0 10 20 0 0 0 5 10 15 20 25 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) ZY -10S

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

to +50C) Note2) Lubrication Not required Manual override Non-locking recessed type/Locking tool typeNote3) Mounting orientation Free Protection structure Dust proof Weight .03 lbs. (12.6 g) (L/M type connector, without subplate) Coil rated voltage 24VDC, 12VDC Allowable voltage 10% of rated voltage Type of coil insulation Class B Power consumption 1WDC (+/com) 0.5WDC (+/com) Grommet Plug-in

Air-hydro Unit

QL S QB NL P 50 100 200 300 400 600 700 800 500 CC63-S1-G CC100-S1-G CC100-L1-G CC160-L1-G CC63-S1-G CC100-1-G CC160-L1-G 11 9.5 30 0 3 86 62.5 28 228.5 278.5 378.5 503.5 603.5 728.5 13 7 2 5 120 32 82.5 33 286 386 511 611 736 836 7 2 13 120 32 33 5 92 399 524 624 1049 949 749 849 Hexagon socket head cap screw is used for mounting hole. 7 0 185 46 2.5 20 120 29 D-X Technical Data 1169

IDX-OM-W094

3 oC 204 312 552 810 (ANR) 2 7 oC 300 408 654 900 m 3/h 10 oC 360 480 720 960 3 oC 216 331 585 859 7 oC 318 432 693 954 3) 10 oC 382 509 763 1,018 MPa 0.7 oC 35 oC 25 () AC230V(50Hz) 10% 4 7-2 5) W 820 1,300 1,950 2,220 5) A 4.9 7.2 12.0 13.0 (30mA) 6) A 10 15 20 30 R410A (HFC) GWP2,088 7) g 39010 53010 63010 78010 :0.1MPa) mm 12 R1 R1 1/2 R2 kg 49 68 95 110 :1 :2 1

08-cjp2-e

Grease pack part number: GR-L-005 (5 g) XB6/Heat-resistant cylinder (10 to 150C) CJP2B6D-XB6-PS 6 10 16 CJP2B6D-XB6-PS CJP2B10D-XB6-PS CJP2B16D-XB6-PS Set of left nos. !0, !1, !2. CJP2B10D-XB6-PS CJP2B16D-XB6-PS Seal kit includes a grease pack (5 g). Order with the following part number when only the grease pack is needed.

10-my1h-e

Grease pack part no.: GR-S-010 (10 g) 101

S Couplers

-10F) 25 5 KKA4 Series (KKA4P-02F+KKA4S-02F) 20 4 15 3 10 2 KKA3 Series (KKA3P-01F+KKA3S-01F) 5 1 KKA7 Series (KKA7P-06F+KKA7S-06F) 0 0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.1 0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Pressure MPa Pressure MPa Plug: Without check valve Socket: With check valve Plug: Without check valve Socket: Without check valve 10 10 9 9 KKA6 Series (KKA6P-04M-1+KKA6S