CC

CCVS02-*G-* SCCS, #4 CCVS11/12/13-*G-* SCCS, #5 CCVS21/22/23-*G-* SCCS, #5 CCVS31/32/33-*G-* SCCS, #5 CCVS10-* SCCS, #6 CCVS20-* SCCS, #6 CCVS30-* SCCS, #6 CCVL02-*G-* SCC, #3 CCVL11/12/13-*G-* SCC, #4 CCVL21/22/23-*G-* SCC, #4 CCVL10-* SCC, #5 CCVL20-* SCC, #5 4.12-11 Series CC Cylinder Max.

Multistage Ejector Series ZL112/212 1

Insulation resistance Between external terminal batch and case: 2 M (at 500 VDC) 2 hrs. each in X, Y, Z directions at smaller of 10 to 500 Hz with amplitude 1.5 mm, or acceleration 10 G Vibration resistance Impact resistance 100 G in X, Y, Z directions, 3 times each Note) Not available on analog output type.

10

S F S + m g S F S m g S Absorbed energy E E1 + E2 E1 + E2 E1 + E2 E1 + E2 Note 2) E 2 2 E 2 2 E 2 2 E 2 2 Equivalent mass Me Note 1) This is the momentary speed at which an object is impacting against a shock absorber.

Adsorption Plate

pcs. 9.5 depth of counter bore 7 (mounting hole) A B C D E F G N Part no.

53

Contents Applicable model HRS-EP022 NPT thread conversion fitting set HRSH090-W-l HRS-EP023 G thread conversion fitting set Part no.

ZQ-OM01401

ZQ 05 1U A-K15L B-EA M G -3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10)(11)(12) (1) (7) 05 0.5 5) 07 0.7 M SI (kPa) 10 1.0 5) (:psi) P 5) (99 10 ) (2) (8) 1U 3M G (2m) (9) (10) (V ) 6) (3) 0 (M5x0.8) 7) K1 N.C. N.C. K 1 3.2 () K2 N.O. N.C. 6) 2 4 () J1 N.C. 3 6 () J2 N.O. 4 3.2 () 1) ()(N.C.)

7

F IA IB N S W Hs Bore size 40 50 63 45.5 5 53 52 47 52 44 40 51 5.5 56 49 58 60 55 57 58.5 5.5 56 49 72 74 69 CKP140, 50, 63 Rod mounting type Cushion valve Top width across flats 3 (Tube cover side only) 3 x 1/4 (Rc, NPT, G) (Piping port) S + Stroke N 52 3 x 1/4 (Rc, NPT, G) (Piping port) 20 17 30 10 W 2 x Speed controller valve Top width across flats 3 11.5 3 14 45 45 M16 x 1.5 45 Hs 30

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

Power Clamp Cylinder: Compact Type/CKZT25, 32 -X2797 (Base Type) -X2798 (With Manually Operated Handle) Equivalent bore size [mm] Body material Port Arm opening angle Switch 25, 32 Aluminum G 90, 105 SENSTRONIC Compact and lightweight Weight: 580 g (25) Width: 34 mm, Height: 192.4 mm (25) Power Clamp Cylinder/CKZT Equivalent bore size [mm] Body material Port Arm opening angle Switch 40, 50

Series 12-REA Sine rodless cylinder

thread depth J 2-Port size D I NB NB T N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156

Multistage Ejector (N)ZL Series

output Analog output PNP output Lead wire length 0.5 (2.9)m Exhaust port thread specification (port exhaust only) Lead wire length 0.5 (2.9)m For EE (ZSE4E) Lead wire length 0.5 (2.9)m NPN output Analog output PNP output Rc1/2 G1/2 1/2-14NPT 1/2-14NPTF Nil F N T Lead wire length 0.5 (2.9)m Lead wire length 0.5 (2.9)m Not required for nil, vacuum adapter (GN) and vacuum pressure gauge (G)

IDX-OM-W011

6 IDF11E-10 ILS SYMBOL WIRE COLOR PTC (WH) (BK) 1 2 (BK) AC100/100,110V (50/60Hz) 3 (BU) M (BK) Black 4 C01 S (WH) White CM 4 2 (GR) (GR) Gray PC OLR (SY) C (SY) Sky Blue (SY) C 1 3 (RD) Red FM PRS (RD) (BU) Blue (BK) (G/Y) / Green/Yellow P (BK) IDF11E-20 ILS PTC (50/60Hz) AC200/200,220V 2 1 (BK) 3 M (WH) L S CM (GR) 4 2 (SY) N (G/Y) OLR C (SY) PE 3 1 C TB PRS (RD) (BK) (WH) C11

VXH

(mm) Port size Weight (g) Max.system pressure (MPa) Note) VXD Water Air Oil 3 1 4 3 8 1 2 2.0 2.3 2.3 2.0 550 550 630 0.35 0.30 0.30 10 0.05 2.0 2.0 1.5 1.6 2.0 2.0 8.5 9.5 9.5 1.9 2.4 2.4 VXZ VXS Note) Weight of grommet type. Add 10 g for conduit type, 30 g for DIN terminal, 60 g for conduit terminal type respectively.

Magnet Gripper

Symbol 1 Magnet Gripper MHM-X6400 Dimensions 4 x 29 Auto switch insert area 4 x M5 x 0.8 Thread depth 7.5 Auto switch mounting groove on workpiece release side 4 x M5 x 0.8 Thread depth 7.5 4 x M5 x 0.8 Thread depth 7.5 Rc1/8 4 x 29 Auto switch insert area 15 15 15 17 (Workpiece adsorption port) 6.4 6.4 58 6.4 74.2 A (Refer to the figure below.) 6.8 66 58 58 Auto switch mounting groove on

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CTRL, W/FITTING,, AIRLINE EQUIPMENT, AS FLOW CONTROL, AB, AS M5 STANDARD (PT), .08818 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)Weight

Modular type lubricator , Improved operability , Increased capacity by reducing the thickness of resin case , Body sizes available: 10 ~ 60 , Thread type: M5, Rc(PT), NPT, G(PF) , Port sizes: M5, 1/8, 1/4, 3/8, 1/2, 3/4, 1 , Variety of options available, LUBRICATOR, AIRLINE EQUIPMENT, AL MASS PRO, AA, AL MASS PRO M5 MODULAR (PT), .15400 lb

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CTL, CLEAN-ROOM, AIRLINE EQUIPMENT, AS FLOW CONTROL, A5, AS M5 CLEAN-ROOM, .06305 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)Weight (g) Flow

Thread sizes range from M3 to 2 and are available in both inch (NPT) and metric R/Rc(PT)Speed controller standard in-line style, Body sizes: M3, M5, 1/8, 1/4, 3/8, 1/2, Port sizes: M3, M5, 01, 02, 03, 04, SPEED CONTROL IN-LINE, AIRLINE EQUIPMENT, AS FLOW CONTROL, AB, AS M5 STANDARD (PT), .06545 lb, ModelPort sizeFree flowControlled flowApplicable cylinder bore size (mm)Weight

Modular type lubricator , Improved operability , Increased capacity by reducing the thickness of resin case , Body sizes available: 10 ~ 60 , Thread type: M5, Rc(PT), NPT, G(PF) , Port sizes: M5, 1/8, 1/4, 3/8, 1/2, 3/4, 1 , Variety of options available, LUBRICATOR, AIRLINE EQUIPMENT, AL MASS PRO, AA, AL MASS PRO M5 MODULAR (PT), .15400 lb

Modular type lubricator , Improved operability , Increased capacity by reducing the thickness of resin case , Body sizes available: 10 ~ 60 , Thread type: M5, Rc(PT), NPT, G(PF) , Port sizes: M5, 1/8, 1/4, 3/8, 1/2, 3/4, 1 , Variety of options available, LUBRICATOR, AIRLINE EQUIPMENT, AL MASS PRO, AA, AL MASS PRO M5 MODULAR (PT), .14960 lb

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.