Flow Sensor Series PFMV

P1 P2 P1 P2 Vacuum source (Vacuum pump) Nozzle Nozzle Note) Since the calculated value may not meet the approximate value due to leakage and pressure loss in the piping system, please check the result by using actual equipment. 950 Flow Sensor Series PFMV5 How to Order PFMV5 05 1 Option (shipped together) Measurement flow range 05 10 30 05F 10F 30F Nil 0.0 to 0.5 l/min None With L-type bracket

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

Body class LQ3 Connecting tubing outside diameter Symbol Ammonium hydroxide compatible 2 1 3 4 5 PFA PPS PTFE N Metric sizes 03 04 06 08 10 12 19 3 4 6 8 10 12 19 Pilot port thread type Symbol Body class 1 2, 3, 4, 5 1, 2, 3, 4, 5 Thread type 4 One-touch fitting 6 One-touch fitting M5 x 0.8 Nil 2 Port B (OUT) different dia. size Inch sizes Symbol Nil Application Ports A & B same size 03 05

C95Series

ISWltCh Type D-A44 BMB1-032 BM81-040 BMB1-0S0 BMB1 063 BMB1-0eO 8M81-100 All others 8T-03 8T03 8T-05 BT-05 8T-06 BT-()B Auto Switch Specifications Reed Switch T,,~~ il i Series C95 AUlD SwHches Reed Switch Type Auto switch model D-A53 1).A66 1).A67 I).A59W 1 _ ~ Indicator Appllcdon Sequence control Ie circuil Sequence control Relay, Ie circuit Sequence OO nlrol Load voltage 24VDC 4-8 VDC

ISO Standard Hydraulic Cylinder

Size BTAuto switch mounting screws 1 1 M4 x 0.7 x 8L D-A5, A6 D-F5, J5 DBT-03, BT-04, BT-05 BT-06, BT-08, BT-12 BA4-040, BA4-063, BA4-080 BMB4-032, BMB4-050 D-Z7, Z8 D-Y5, Y6, Y7 2 2 M4 x 0.7 x 6L Set screw BMB5-032 BA7-040, BA7-063, BA7-080 D-A9 D-M9 BBA1 D-A5, A6 D-F5, J5 BT-16, BT-18A, BT-20 D-Z7, Z8 D-Y5, Y6, Y7 BS4-125, BS4-160 BS4-180, BS4-200 3 2 M4 x 0.7 x 8L Set screw D-A9 D-M9 BS5

Cylinder with Lock

Auto switch model Bore size [mm] 32 40 50 63 80 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V BMB5-032 BMB5-032 BA7-040 BA7-040 BA7-063 BA7-063 D-A3/A44 D-G39/K39 BMB2-032 BMB2-040 BMB1-050 BMB1-063 BMB1-080 BMB1-100 D-F5/J59 D-F5W/J59W D-F59F/F5BA D-F5NT D-A5/A6/A59W BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 D-P3DWA BA10-032S BA10-040S BA10-050S BA10-050S BA10-063S BA10-063S D-P4DW BMB3T-040 BMB3T

Manifold Specifications

Series VS3115/3110 Manifold Specifications Specifications Manifold type Max. number of stations B mount 10 stations Port location/Port size P A E P A E Port direction Applicable valve model Exhaust type Side Side Side Side Bottom Side VS3114-00 Base Base Base Common 1 4 3 8 3 8 Accessory AXT338-17A Blanking plate (With gaskets and screw) How to order manifold VVS31 1 0 05 Thread type EXH

ZU

Matching the Ejector to the Vacuum Circuit Caution For precautions associated with matching the ejector to the vacuum circuit, refer to the technical data on page 13-1-10 to 13-1-19. 13-6-2 Vacuum Ejector In-line Type Series ZU How to Order ZX ZU 05 S ZR ZU07 ZM Maximum vacuum pressure S 85 kPa ZH L 48 kPa ZU05 ZU Nozzle diameter 05 0.5 mm ZL 07 0.7 mm Circuit diagram ZY EXE ZQ Specifications

Compact and

For vacuum equipment precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www. smcworld.com Nozzle diameter Port size 05 0.5 mm 07 0.7 mm Nil 6 One-touch fitting 01 Rc1/8 female thread Symbol EXH Vacuum pressure reached S 90 kPa L 48 kPa Mounting P V Caution Specifications 1 .

Clean Regulator/Fluororesin Type

Metric size Inch size Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Applicable tubing size Applicable tubing size Symbol Symbol 04 06 08 10 12 19 03 05 07 11 13 19 4 x 3 6 x 4 8 x 6 10 x 8 12 x 10 19 x 16 1/8" x 0.086" 3/16" x 1/8" 1/4" x 5/32" 3/8" x 1/4" 1/2" x 3/8" 3/4" x 5/8" : Basic size : With reducer : Basic size : With reducer Note) Tubing size is interchangeable

Body Size: 05 (400 L/min. 14.1 scfm), Thread Type: Body Size 05: M Thread; Body Size 10-40 R Thread, Port Size: M5 (M5 x 0.8)

Series VFM is a 5 port, compact, mechanical valve available in a rubber (VFM300) or metal (VFM200) seal style. This series has a large flow capacity (Cv 1.0) and a high cycle rate. The VFM offers an internal or external pilot body option and a variety of actuator choices.Fluid: air, inert gas, Operating pressure range: 0.15 to 0.9MPa, Effective area (Cv): 18mm 2 (1.0), Maximum frequency

Manifold Type: 42 (Base Mounted), Valve Stations: 5 Stations, A, B Port: 02 (1/4), CE Marked: Q (CE Marked)

Manifold Type: Base Mounted, Valve Stations: 5 Stations, A, B Port: 1/4, CE Marked: Q (CE Marked)

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 01 (Roller Lever)

Body Option: 0 (Internal Pilot), Port Size: F02 (G1/4), Style: 30 [Push Button (Mushroom)], Suffix: B (Push Button Selector Color Black)

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 00 (Basic Style)

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 01 (Roller Lever), Suffix: S (Roller Material Hard Steel)

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 30 [Push Button (Mushroom)], Suffix: B (Push Button Selector Color Black)

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 30 [Push Button (Mushroom)], Suffix: Y (Push Button Selector Color Yellow)

Body Option: 0 (Internal Pilot), Port Size: N02 (NPT1/4), Style: 32 [Push Button (Extended)], Suffix: R (Push Button Selector Color Red)