Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

Flow Rate and Effective Area AS1001F AS2001F AS3001F AS2051F AS4001F Model 3.2, 4, 6 4 6 6 8 6 8 10, 12 10 12 Metric size Tubing O.D. 1/8" 5/32" 3/16", 1/4" 3/16" 1/4" 1/4" 5/16" 3/16" Inch size 1/4" 5/16" 3/8" 3/8" 1/2" 5/32" Flow rate (l/min(ANR) 290 460 230 100 130 420 660 920 1050 1390 Controlled flow (Free flow) 4.5 7 3.5 1.5 2 6.5 10 14 16 21 Effective area (mm2) Note) Flow rate values

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

1 CG1 @2@3@4@5 14B MB Locking at rod end C95 CA1 CS1 Manual release non-locking style: L Material Note Component Parts Material Note Component Parts No. q w e r t y No. !7 !8 !

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

Air Suction Filter In-line Type with One-touch Fittings Series ZFC 1

During disassembly and assembly, confirm that there are no scratches or damage, etc, on the O-ring. 13-10-10

VVXA21/22

10 stations Symbol VVXA31 VVXA32 VXA31 5-00 Applicable valve TI/ TIL Port size (Individual port) 1 2 Rc Rc VXA32 5-00 1 8 1 4 PA All common ports are Rc 1/4.

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Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when

Type 20 and 23 body ported manifold gasket part number: SY□000-GS-1 (10 pcs./set: mounting screws and gasket)
Valve part numbers: SY3120, SY5120, SY7120, SY9120, etc.
Type 41, 42, and 43 base mounted manifold gasket part number.: SY□000-GS-2(-Q) (10 pcs./set: mounting screws and gasket)
Valve part numbers: SY3140, SY5140, SY7140, SY9140, etc.

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 4 (220 VAC, 50/60 Hz), Lead Wire: E (Grommet Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor)

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 3 (110 to 120 VAC, 50/60 Hz), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor)

Function: 3 Position Closed Center, Model: Non Plug-in, Body Option: Standard, Voltage: 100 VAC, 50/60 Hz, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: -, Thread: -, CE-Compliant: -

Function: 3 Position Closed Center, Model: Non Plug-in, Body Option: Standard, Voltage: 220 VAC, 50/60 Hz, Lead Wire: Grommet Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: -, Thread: -, CE-Compliant: -

Function: 3 Position Closed Center, Model: Non Plug-in, Body Option: Standard, Voltage: 220 VAC, 50/60 Hz, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: -, Thread: -, CE-Compliant: -

Function: 3 Position Closed Center, Model: Non Plug-in, Body Option: Standard, Voltage: 24 VDC, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: -, Thread: -, CE-Compliant: -

Function: 3 Position Closed Center, Model: Non Plug-in, Body Option: Standard, Voltage: 110 to 120 VAC, 50/60 Hz, Lead Wire: DIN Terminal, Surge Suppressor: with Light/Surge Voltage Suppressor, Port Size: -, Thread: -, CE-Compliant: -

Function: 3 Position Closed Center, Model: Non Plug-in, Body Option: Standard, Voltage: 110 to 120 VAC, 50/60 Hz, Lead Wire: DIN Terminal, Surge Suppressor: -, Port Size: -, Thread: -, CE-Compliant: -

Function: 3 Position Closed Center, Model: Non Plug-in, Body Option: Standard, Voltage: 110 to 120 VAC, 50/60 Hz, Lead Wire: Grommet Terminal, Surge Suppressor: -, Port Size: -, Thread: -, CE-Compliant: -

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 3 (110 to 120 VAC, 50/60 Hz), Lead Wire: D (DIN Terminal)

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 4 (220 VAC, 50/60 Hz), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor)

Function: 3 (3 Position Closed Center), Model: 1 (Non Plug-in), Body Option: 0 (Standard), Voltage: 1 (100 VAC, 50/60 Hz), Lead Wire: D (DIN Terminal), Surge Suppressor: Z (with Light/Surge Voltage Suppressor)