EXxx-OML0010CN

Parameter Setting() 33 5.

PFM7.eng

Over current error Without flow adjustment valve (using ZS-33-M) With flow adjustment valve (using ZS-33-MS) If using the product in an interlocking circuit: Provide a double interlocking system, for example a mechanical system Check the product regularly for proper operation Otherwise malfunction can result, causing an accident. The switch output load current (OUT2) has exceeded 80 mA.

PFM5.eng

Flow adjustment valve Without flow adjustment valve (using ZS-33-M) With flow adjustment valve (using ZS-33-MS) Flow indicator LED Lock ring Power indicator LED Mounting screws Mounting screws PFM5 Connector Piping port (OUT side) Thank you for purchasing an SMC PFM5 Series Flow Sensor.

IP80-OM00019

A (1)(IEC79)ExdBT5 A ExdBT5 A) 164 ) B) () (1.5) 4 P368010-32 7.010.0 P368010-33 10.112.0 16 14 7.

MLGP

C0.2 (2) B 0.2 A 0.2 Hexagon socket head cap screw D Bore size (mm) A (mm) B (mm) C (mm) MLGPM MLGPL 54 12 14 72 20 M5 x 0.8 24 64 15 18 82 25 M6 x 1.0 30 78 18 22 98 32 M8 x 1.25 34 86 18 22 106 40 M8 x 1.25 40 110 22 27 130 50 M10 x 1.5 46 124 22 27 142 63 M10 x 1.5 58 156 28 33 180 80 M12 x 1.75 54 188 33 39 210 100 M14 x 2.0 62 9-11-5 5 Series MLGP Specific Product Precautions 3 Be sure

CE

Steel wire Stainless steel 9 20 to 63 27 Sensor setting piece assembly Case gasket NBR 10 12 to 32 28 Case screw gasket Stainless steel Pin NBR 11 32 to 63 29 Piston seal Lead-bronze casting NBR Sensor guide 12 32 to 63 30 Rod seal Carbon steel NBR Case setting nut 40 to 63 31 Gasket 13 Rolled steel NBR Cushion ring A 40 to 63 32 Cushion seal Rolled steel 14 NBR Cushion ring B 40 to 63 33

2–4

7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 NPT1/8 G1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 56.5 39.5 8 11 52 50 41.4 Rc1/8 NPT1/8 NPT1/8 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA

CXT

Bore (mm) QW RW S T W X Y Z CY1 32 60 33 140 19 157 33 10.5 7.5 40 84 35 180 21 187 39.5 11 8 MY1 Long stroke Slide bearing Standard stroke Long stroke Ball bushing bearing Standard stroke Long stroke (mm) SCXT Tube bore size A, #1(#1+#3) SCXT Tube bore size B, #1(#1+#3) X Y Z Bore (mm) Stroke range (mm) 32 125, 150, 175, 200, 250, 300 45.5 12.5 12.5 SCXT Tube bore size A, #2(#2+#3) SCXT

Dedicated Controller

Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT. No FOR 36 NEXT command was executed without executing FOR command.

MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 18 185 155 125 MIS12-30 MIS12-20 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

3 Port Solenoid Valve Series VQ100 1

Blanking plate with 2 screws and gasket L dimension 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. 40 510.5 L dimension 4-12-16

id_idw_and_ida_series_air_dyers

Series ID/IDW/IDA Heatless Air Dryers High Capacity Heatless Air Dryer Series IDA 73 86 114 170 205 295 409 591 818 1136 1909 2273 2955 4091 lbs Kg Weight 160 190 250 375 450 650 900 1300 1800 2500 4200 5000 6500 9000 A B C inch mm inch mm inch mm 610 610 711 787 813 838 1067 1168 1245 1524 1575 1575 1219 1575 24 24 28 31 32 33 42 46 49 60 62 62 48 62 711 864 813 940 914 1041 1143 1448 1524

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Ht A 33 B G 1/2 (applicable cable O.D. 6.8 to 9.6) Approx. Hs Reed switch D-A3 Solid state switches D-G39, D-K39 56 34 B 36 Auto switch A 49 Reed switch D-A44 G 1/2 (applicable cable O.D. 6.8 to 9.6) Approx. Hs 56 B 36 Auto switch 49 A Reed switches D-B5, D-B6 Approx.

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

29.5 26.5 20.5 30.5 32 25 27.5 21.5 28 27 23.5 24.5 26 19 22 50 39 35.5 32.5 23.5 36.5 38 31 33.5 24.5 34 30 26.5 27.5 29 22 25 63 41 37.5 34.5 25.5 38.5 40 33 35.5 26.5 36 32 28.5 29.5 31 24 27 80 46 42.5 39.5 29.5 43.5 45 38 40.5 30.5 41 36 32.5 33.5 35 28 31 100 50 46.5 43.5 31.5 47.5 49 42 44.5 32.5 45 38 34.5 35.5 37 30 33 41 Compact Hydraulic Cylinder Double Acting/Double Rod: 3.5MPa

Escapements Series MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 185 155 125 MIS12-30 MIS12-20 18 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

33 33 (mm) I 4 5 5 Model MHS2-16D MHS2-20D MHS2-25D G 25 27 28 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 CB 11 13 15 EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16

PC Wiring System Series PCW

cover (DIN rail mount compatible) Circuit board type With cover (DIN rail mount compatible) 2 Series PCW-EC Circuit Diagram PCW-EC16XBR00 PCW-EC16XBR01 [Applicable PLC example: OMRON Corporation C200H-ID218] 115 114 113 112 111 110 109 108 107 106 105 104 103 102 101 100 4 2 6 10 8 14 12 16 34 20 18 24 22 26 30 28 32 36 40 38 Input/output connector (CS0) 3 1 5 9 7 13 11 15 19 17 23 21 33

Pneumatic Transfer System Series MF

ME) n = Load weight (m) Max. load weight (m max) + Static moment (M) Allowable dynamic moment (ME max) 1 Allowable static moment (M max) + Determination 3 3-Dimensional Transfer Single Unit Type Series MF Construction MF15 Material Note Parts list Material Note Parts list Description Qty. 4 8 2 2 2 2 10 4 4 2 4 4 4 2 2 4 2 4 2 2 2 9 5 Qty. 1 Description Cylinder tube No. 1 No. 30 31 32 33

Guide Cylinder Series MGG

steel NBR Aluminum alloy Aluminum alloy Aluminum alloy Rolled steel Cast iron Special friction material Grease nipple Nickel plated 30 31 Not required for 80 and 100 Hexagon socket head cap screw For cylinder mounting Chromium molybdenum steel 32 Nickel plated Nickel plated 100 is carbon steel Hexagon socket head cap screw Chromium molybdenum steel For front plate mounting Nickel plated 33

High Vacuum Angle Valve, XL Series

Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K