7

8 r u !7 @8 @5 @6 @7 @9 CKG1C (Clevis width 12.5) i !2 #1 !3 !5 !0 !1 Component Parts No. Description Material Qty Note No.

S Couplers Series KKH

Plug (P) Socket (S) Male thread type Male thread type Body size Part no. Body size Port size Part no. Port size R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 1/8 R 1/4 R 3/8 R 1/2 KK3P-01MS -02MS KK4P-01MS -02MS -03MS -04MS KKH3S-01MS -02MS KKH4S-01MS -02MS -03MS -04MS 1/8 1/8 1/4 1/4 Female thread type Female thread type Body size Port size Part no.

HRX-OM-Y098

Configuration One thermo-chiller for one controller. 2 2 R D R D 3 3 S D S D 5 5 S G S G Controller Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

MU

M MDU B 25 10 S M A73 S With auto switch Built-in magnet Number of auto switches Mounting S n 2 1 n B L F G C D Basic Axial foot Front flange Rear flange Single clevis Double clevis Without auto switch(built-in magnet) Auto Switch Applicable Auto Switches/Refer to p.5.3-2 for further information on auto switch.

Clean Air Module

IDFB Pressure outlet port Digital flow switch With differential pressure indicator IDH ON/OFF valve Regulator Restrictor ID Filter IDG PB PA IDK AMG AFF AM Variations AMD Flow switch P Regulator R Regulator + Pressure outlet port R1 ON/OFF valve V (V1/V2) Restrictor S Filter F (F1) Weight (kg) AMH AME LLB3 LLB4 AMF 0.36 0.84 ZFC 0.52 1.18 0.47 1.10 SF 0.41 1.09 0.52 1.35 SFD 0.63 1.44 0.57

HRX-OM-W060

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-13 Connection of RS-232C HRL Series 3.3 Installation 3-27 HRX-OM-W060 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

6 r t !3 w q e !5 !0 !1 !

Air Slide Table Series MXQ

Unit mm/s kg kg kg kg Va W Wa We Wmax K 8

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

R.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

R.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13 107 44 20 16 47 64 148 M8 35 64 19 50 11 7 14 115 49 20 16 50 78 162 M10 38 77 19 63 16.5 16.5 13.5 6.5 16.5 Bore size (mm) J K L MM ML NN OA OB OL P PA PB PW Q R S T U VA 18 M8 x 1.25 7.5 M8 x 1.25 27 27 40 20 6.6 11 1/8 38 30 104 44 118 86 106 40 13 21.5 9 M10 x 1.5 9 32 32 46 22 8.6 14 1/4 47 40 130 60 146 110 130

Air Cylinder NCJP Series Pin Cylinder

Mounting Position Circuit Diagram T r u n n i o n . , . . . . . . . . 9 Accessories. . 10 How To Order N CTJP ffi-ffi 1 L_10 ft. tead wire I $.rihh Suffix With two switches S-With one switch + x1,4" Stroke: S type only sribh Type 90D-90( 1.5 ft. tead wire) Wr|h Auto $Yitch Ca (built in rnagnet) goaD-90A 97D-97 93AD!

PSxx-OMM0002CN

-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 -S/-R () NPN 2 Max.28 V80 mA 1 V -17No.PS-OMM0002CN-F -V/-T () PNP 2 Max.80 mA 1 V T15 V 1 k V420 mA 12 V 300 24 V 600 50 -V/-T () PNP 2 Max.80 mA 1 V -A NPN2 Max.28 V80 mA 1 V -B PNP2 Max.80 mA 1 V -18No.PS-OMM0002CN-F ONOFF () ON OFF ON5OFF 20 P 1 H_1 [Pa] ON OFF [s] -19No.PS-OMM0002CN-F <> (19)

VVX31/32/33

G <& C D, T G, C S L, Z S L, Z 8 8 8 8 8 8 8 8 8 8 8 8 T 9 '01 !" % % :"; % %%& !" % % :; S Note) 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) How to Order Manifold Arrangement of solenoid 9= Write both the base part number and the solenoid valve to be mounted or blanking plate part number. !"

EX500-GPR1A.eng

OUT IN BUS COM A COM B COM C COM D F R P B U S O I R DIA BF SOL RUN GATEWAY UNIT EX500 SERIES 18 19 Switch setting Open the station number switch protective cover and set the switches with a sharp-pointed watchmakers screwdriver etc. NOTE 1. Be sure to turn off the power before setting the switches. 2. Be sure to set these switches before use.

VXP21/22/23

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

R.

Compact Cylinder with Solenoid Valve/

50 to 300 mm/s Piston speed 1.