Flow Control Equipment

Style 4 6 8 10 12 04 06 08 10 12 Port size R(PT)1/8 R(PT)1/4 R(PT)3/8 R(PT)1/2 Elbow Universal 2 3 01 02 03 04 Controlled method Meter-out Meter-in 0 1 With residual pressure release valve With One-touch fittings 4.1-31 Speed Controller with One-touch Fittings Series ASlFG Stainless Series Model Uses SUS303 stainless steel for metal elements.

TCU

Tube size (mm) Dimension of coil (mm) No. of tubes Max. operating length (m) L D Part No. 210 18 1 52 2 35 3 22 1 54 2 27 3 17 1 41 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 1.5 4 2.5 280 28 265 1 2 5 tubes/ case 1.5 1 2 325 24 6 4 37 305 330 31 8 5 Dimensions are changeable due to material.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Basic weight 0.74 P Additional weight 0.11/50 stroke P Cylinder stroke 100 stroke P Locking weight 0.08 (Locking at head end, manual release non-locking style) 0.74+0.11X100/50+0.08=1.04kg All mounting bracket 0.11 0.16 0.26 0.27 0.42 0.56 Additional weight per 50 stroke Single knuckle 0.15 0.23 0.26 0.26 0.60 0.83 Accessories Double knuckle (with pin) 0.22 0.37 0.43 0.43 0.87 1.27 1.7-31

Wedge Cam Operation Provides

Chloroprene rubber (CR) (Standard), Fluoro rubber (FKM), Silicon rubber (Si) Model Series MHK/Standard models Max. operating frequency (c.p.m) Effective holding force per finger (N) Note) Action Closed distance (mm) (L1) Open distance (mm) (L2) Opening/Closing stroke (mm) (L2_L1) Bore size (mm) Weight (g) Model MHZ2 MHK2-12D 12 External hold: 15 Internal hold: 16 4 9 13 75 MHZJ2 External hold: 31

CYP

NBR O-ring 15: Electroless nickel plated, 32: Chromated 3 Piston Brass/Aluminum alloy 26 NBR O-ring 4 27 Piston seal Carbon steel Steel ball NBR 5 28 Wear ring A Polyurethane Bumper Special resin 6 29 Nickel plated Wear ring Chrome molybdenum steel Hexagon socket head set screw Special resin 7 30 Nickel plated Shaft Chrome molybdenum steel Hexagon socket head cap screw Stainless steel 8 31

CYPSeries

NBR O-ring 15: Electroless nickel plated, 32: Chromated 3 Piston Brass/Aluminum alloy 26 NBR O-ring 4 27 Carbon steel Piston seal Steel ball NBR 5 28 Polyurethane Wear ring A Bumper Special resin 6 29 Nickel plated Chrome molybdenum steel Wear ring Hexagon socket head set screw Special resin 7 30 Nickel plated Chrome molybdenum steel Shaft Hexagon socket head cap screw Stainless steel 8 31

CYPSeries

NBR O-ring 15: Electroless nickel plated, 32: Chromated 3 Piston Brass/Aluminum alloy 26 NBR O-ring 4 27 Carbon steel Piston seal Steel ball NBR 5 28 Polyurethane Wear ring A Bumper Special resin 6 29 Nickel plated Chrome molybdenum steel Wear ring Hexagon socket head set screw Special resin 7 30 Nickel plated Chrome molybdenum steel Shaft Hexagon socket head cap screw Stainless steel 8 31

V100

Blank Plate Assembly Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Gasket Assembly Part no.: V100-31-1A Part no.: V100-77-1A (M2 x 14, flat nickel plated) Round head combination screw Place notch mark on the blank plate to 2 port side when assembling.

3 Port Solenoid Valve Series VQ100 1

Blanking plate with 2 screws and gasket L dimension 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. 40 510.5 L dimension 4-12-16

VZ100/300/500

Made to Order Specifications (For details, refer to page 4-6-46.) 4-6-30 31 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 External Pilot VZ500R JIS Symbol VZ51R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port.

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VVZ2000-31A-31 pc. Base mounted 2 position double 2 position single Sub-plate Assembly Part No.: VZA2000-S-01 Thread type Mounting bolt and gasket are not included.

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12 14 PA PB 107 L1 = 43n + 64 150 193 236 279 322 365 408 451 494 L1 4-1/8 12, 14 port 3 R 65 119 L2 = 43n + 76 162 205 248 291 334 377 420 463 506 L2 54 R 39 21 R2 R1 17 17 6-3/8 1, 3, 5 port 26.5 26.5 3-11-7 8 Series EVS7Dimensions EVS7-8-FG-S-M0 174.5 103 174.5 49 (64) 49(64) 103 71.5 31

Modular Type Air Filter Series AF

Modular Type Air Filter Series AF Air filter Series AF Filtration (m) Accessory Model Port size M5 x 0.8 AF10 1/8, 1/4 AF20 1/4, 3/8 AF30 Bracket 5 1/4, 3/8, 1/2 AF40 Float type auto drain 3/4 AF40-06 3/4, 1 AF50 1 AF60 Pages 23 through 27 Mist separator Series AFM AFM20 1/8, 1/4 Bracket AFM30 1/4, 3/8 0.3 Float type auto drain AFM40 1/4, 3/8, 1/2 AFM40-06 3/4 Pages 29 through 31 Micro-mist

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

PF2D5--1 (With voltage output type) PF2D540-19 Display unit (PF2D30/31) 186 Sensor unit 78 86 Brown 6 2 Analog output Switch output or Pulse output Main circuit Main circuit 56 8 4 Load + 12 to 24 VDC 15 White 7 3 Black 5 1 Blue Load is an analog input equipment such as a voltmeter.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

.: SYJ700-10-2A (In common for body ported type and base mounted type) Round head combination screw M3 x 8, Matt nickel plated Round head combination screw M3 x 31, Matt nickel plated Round head combination screw M3 x 31, Matt nickel plated Blanking plate SYJ700-10-2 Gasket SYJ700-5-1 Gasket Gasket SYJ700-5-3 SYJ700-5-4 Applicable base Sub-plate SS3YJ7-40 SS3YJ7-41 SS3YJ7-42 SS3YJ7-41R SS3YJ7

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

M8 x 1.25 92 24 48 124 200 300 36 86 124 174 66 5 6 4 8 20 24 48 50 M10 x 1.5 28 52 128 200 300 38 50 88 124 174 110 80 5 6 4 8 20 24 63 M10 x 1.5 MLGPM (slide bearing)/A, DB, E dimensions MLGPL (ball bushing)/A, DB, E dimensions A E A E Bore size (mm) Bore size (mm) DB st50 5031

Precision Cylinder Series MTS

Width across flats 12 9.5 4.5 96 + Stroke 111 + Stroke 5 Precision Cylinder Series MTS Dimensions/16 MTS16 Basic type 9 36.5 6 2-cushion needle 33.5 Width across flats 6 5 3 Rod cross section 5.5 3.5 2-M5 x 0.8 (port size) 4.3H7 +0.012 0 14 0.2 4-M4 x 0.7, effective length 7 4-3.5 through 2 x 4-6.5, counter bore depth 3.5 (opposite side also) 15 12 13 0.2 4 8h7 0 0.015 24 0.2 24 0.2 32 31

Cylinder with Lock Series MNB

B1 4FD F K GF Cushion valve BN A GB 4-J Rc(PT)P MM Rear cylinder port H1 Q Fd D V FB FY Width across flats VA FT FE N T ZZ + Stroke FZ FX (mm) Width across flats Stroke range (mm) Effective thread length (mm) Bore size (mm) A B1 H1 B2 BN C D F Fd FD FE FT FX FY FZ GA BP GB FB B to 700 22 17 6 46 97 32.5 12 13 25 7 3 10 72 38 87 83 1/8 32 13 56 54 10 19.5 to 800 30 22 8 52 104 38 16 13 31

Air Cylinder MGQ Series Compact Guide Cylinder

. : . l ' s s i 1070 lN=OlO2kql r(N.m) Bore size Modd to 20 r 3 B ' .50 75 .t( P , 0.29 o.24 o.21 0.18 0.16 0.48 o.39 0.31 o.37 0.33 -^ I McoM 0.51 o.43 0.35 o.31 o.27 MGaL 0.73 o.58 o.48 o.71 0.64 2 0 . .

Air Cylinder CLA Series Fine Lock Model

i 1 6 30 46 1 0 21 50 168 0 70 I 12 90 50 1 0 58 238 52 1 . 2 66 31 % 44.5 1 3 23 60 182 0 86 105 59 130 58 52 1 1 . 2 66 37 % 55 1 5 70 208 0 '102 1 8 130 160 71 297 65 't2.5 80 1 4 40 12 1 5 25 80 226 0 1 1 6 13.5 t 8 150 92 1 8 0 72 3 1 6 65 14.0 8 1 ra Single Glevis Type/CLAC with Bod Boot M14x r.5 M 1 8 X 1 . 5 M18X1.5 M22X1.5 M26X1.5 Dill|o||$io[$ $enies CIA Double Glevis TyPe/CLAD