IR1000-A/2000-A/3000-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.005 to 0.2 MPa V V 0.01 to 0.2 MPa V 1 0.01 to 0.4 MPa V V V 2 0.01 to 0.8 MPa V V V + ARM ARP IR-A IR-A e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR IRV r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH

IR1200-A/2200-A/3200-A

AR425 to 935 ARX q Body size 1 2 3 Symbol Description AMR w Set pressure range 0 0.02 to 0.2 MPa V V V 1 0.02 to 0.4 MPa V V V 2 0.02 to 0.8 MPa V V V + ARM ARP e Exhaust direction 0 Bottom exhaust V V V 1 Front exhaust V 2 Rear exhaust V + IR-A IR-A IR r Pipe thread type Nil Rc V V V N NPT V V V F G V V V + IRV VEX 01 1/8 V 02 1/4 V V 03 3/8 V 04 1/2 V + SRH t Port size SRP a

VM100F

Refer to page 15 for details. 5 5-port (Twist selector 3-position only) Z With miniature indicator Applicable only to bottom ported Piping direction and the height of plunger 0 Side ported Long (Basic model only) 1 Short 2 Bottom ported Long (Basic model only) 3 Short With One-touch tting Actuator type1 00 Basic model 01 Roller lever 02 One way roller lever 05 Straight plunger 06 Roller

Vacuum Regulator Series IRV

Work piece Vacuum regulator Body size 1 2 3 IRV1000 type IRV2000 type IRV3000 type Leak tester Pressure transducer Solenoid valve Solenoid valve Work piece Vacuum pump IRV Filter Thread type Nil N F Rc NPT G Optional Inspection equipment Port size Solenoid valve Application IRV Work piece Tank Vacuum pump Filter Symbol Bore IRV1000 IRV2000 IRV3000 01 02 03 04 1/8 1/4 3/8 1/2 Flow meter Accessories

Compact manifold regulator ARM5 Series

IN Fitting Type 15 IR-A Inch size Metric size Straight IN side IN side Symbol Symbol IR Elbow Elbow Straight 1/4 5/16 5/16 1/4 6 8 8 6 IRV 51 52 63 64 01 02 13 14 VEX SRH 3. Tie-rod for Centralized Supply Block Note) SRP Symbol Description Without tie-rod Nil T O-ring SRF With tie-rod Note) The O-ring is attached to the manifold connection. Note) For details, refer to page 705.

ASP-X352

Body size Metric size Inch size 3 4 5 6 1/8 1/4 3/8 1/2 07 09 11 13 06 08 10 12 6mm 8mm 10mm 12mm 1/4 5/16 3/8 1/2 Thread size Universal type 01 02 03 04 1/8 1/4 3/8 1/2 With One-touch fitting Uni-fit thread form Dimensions Models TUBE O.D. d L3 Applicable tubing O.D.

CNA

L Foot N Non-lube F Front flange Lock direction F* Steel tube T Center trunnion D Both directions * Steel tube is not available with auto switch capability.

Hygienic Design Cylinder Series HY

D-X Individual -X Technical data 853 Hygienic Design Cylinder Round Type 20, 25, 32, 40, 50, 63, 80, 100 Series HYB How to Order 20 R 50 F HYB 20 R 50 F H7BAL HYDB With auto switch Number of auto switches With auto switch (Built-in magnet) Nil S n 2 pcs. 1 pc. n pcs.

Safety Speed Control Valve (SSC Valve) Series ASS 1

B ASS 00 3 AQ ASV Body size Accessory 1 8 Nil None With bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc

Safety Speed Control Valve (SSC Valve) Series ASS

N F Meter-in control Meter-out control Caution Be sure to read before handling.

Filter Regulator Stainless Steel 316 and Special Temperature Environment (–40°C) Specifications AW30/40-X2622

AW30: G43-10-01-X3 or AW40: G43-10-02-X3 is included.

KK

fitting Elbow with One-touch fitting Bulkhead with One-touch fitting Symbol M F N H L E Socket/Plug designation S P Socket Plug Piping port size variation Male/Female thread type One-touch fitting type Nut fitting type Thread size M5 x 0.8 R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 Symbol M5 01 02 03 04 06 Symbol 23 04 06 08 10 12 16 Symbol 50 60 65 80 85 110 Applicable tubing O.D

S Couplers Series KK130

/O.D. mm Symbol 01 02 03 04 N01 N02 N03 N04 Symbol 07 09 11 13 Applicable tube O.D. mm 6 8 10 12 1/4" 5/16" 3/8" 1/2" Symbol 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose. Inch size 1

S Couplers KKA Series Stainless steel type

Port size IDK Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 R, Rc 1 R, Rc 1 1/4 R, Rc 1 1/2 Symbol 01 02 03 04 06 10 12 14 Connection type Type Male thread (with sealant) Female thread Symbol M F Availability Plug Yes No No Yes Socket Yes Yes No No Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.

DOC1020530

PA02] 0 0 Select a regenerative option. 00: Regenerative option is not used. 00: 100 W 0.2 kW 7 kW 11 kW 22 kW 01: FR-BU2FR-RC FR-CV 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50 () 08: MR-RB31 09: MR-RB51 () 0B: MR-RB3N 0C: MR-RB5N ( ) FA: 11 kW 22 kW UP For drivers of LECSN-T5, do not use a regenerative resistor.

S Couplers

/O.D. mm Symbol Symbol Symbol 01 02 03 04 N01 N02 N03 N04 07 09 11 13 06 08 10 12 07 09 11 13 6 8 10 12 1/4" 5/16" 3/8" 1/2" R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose.

S Couplers

Port size IDK Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 R, Rc 1 R, Rc 1 1/4 R, Rc 1 1/2 Symbol 01 02 03 04 06 10 12 14 Connection type Type Male thread (with sealant) Female thread Symbol M F Plug Yes No No Yes Socket Yes Yes No No Availability Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.

Safety Speed Control Valve (SSC Valve) Series ASS 1

B ASS 00 3 AQ ASV Body size Accessory 1 8 Nil None With bracket 1 3 5 6 AK 8 3 B 3 4 1 Port size ASS Applicable series Port size 01 02 03 04 06 10 Type 1 8 ASS100/110 ASS300/310 ASS300/310 ASS500 ASS500/600 ASS600 ASR PAT.PEND 1 4 00 10 Meter-out control type Meter-in control type Meter-in type is available only for ASS110 and ASS310. 8 3 ASF 1 2 3 4 1 JIS Symbol Thread type Nil N F Rc

DOC1003077

F Main power switch L Power supply cable (Accessory, with Ferrite core) Each presses of the [MODE] key changes the operating mode as follows.

AME

BM51 BM52 BM53 BM54 BM55 BM56 BM57 How to Order AME 250 03 R B Option R INOUT reversal Body size HAl Accessories (Options) 150 250 350 450 550 650 850 1/8 1/4 3/8 1/2 3/4 None B AT With bracket IDl Port size 1/8B 01 02 03 04 06 10 14 20 2B 1 Thread 1/4B AMG 11/2 3/8B Rc(PT) F G(PF) N NPT 1/2B AFF 3/4B 1B AMl 11/2B Symbol Related poroducts AME Note) Refer to p.4.7-7 for "How to Order" case