MHY2/MHW2

(F: Thrust of one finger) Pressure 0.6MPa 0.5 40 8 0.5 Holding force (N) Holding force (N) 0.4 30 6 0.4 0.3 0.3 20 4 0.2 0.2 10 2 0.1 0.1 0 20 30 50 60 Holding point L (mm) 40 0 30 40 60 70 Holding point L (mm) 50 80 F F F F MHY2-16D MHY2-25D 35 100 Pressure 0.6MPa Pressure 0.6MPa 30 0.5 0.5 80 25 External hold Holding force (N) Holding force (N) 0.4 0.4 60 20 0.3 0.3 15 40 0.2 0.2 10 20

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

3 Port Solenoid Valve Series VQ100 1

How to Order Valves VQ1 1 0 5 F Manual override Nil B Non-locking push type (Tool required) Locking type (Tool required) Series VQ Compact 3 port valve Option Type of actuation Electrical entry 1 2 Note) Normally closed Normally open Plug-in With light/surge voltage suppressor (Only for plug-in manifold) F Note) Normally open type is available only with standard type. (1 W) Function Coil

VXD21/22/23

E D A M 90 (100) 101 (111) 106 (116) N 25.5 28 28 M 82 (92) 93 (103) 98 (108) N M 82 (92) 93 (103) 98 (108) M 82 (92) 93 (103) 98 (108) Normally open Normally closed VXD2270 VXD2380 VXD2390 VXD2272 32A 40A 50A VXD2382 VXD2392 48 50 50 95 97 97 62 64 64 160 170 180 135 140 155 67.5 70 77.5 168 (185) 182 (197) 194 (209) 51.5 54.5 59 100 105 120 36 42 53 23 25.5 25.5 35 40 40 12 14 14 41.5 44.5

Power Valve: Economy Valve Series VEX5

h Grommet terminal i Conduit terminal j DIN terminal a Model b d e f VEX5510 VEX5511 19 130 110 9 12 2.3 204 204.5 222 221.5 32 VEX5710 VEX5711 136 120 9 20 2.3 221 221.5 239.5 239 VEX5910/5911 Bracket (Option) Pressure gauge (Option) Grommet terminal (E) DIN terminal (D) Applicable O.D. 6 to 8 Conduit terminal (T) 1/4 (P2) 1/4 (P1) Refer to page 2449.

D. P. Lube ALD600/900 Series

Lube/ALD600-06 to 10, ALD900-12 to 20 Float switch mounting position (Connection port center) AL800 AL900 ALF ALT ALD ALD ALB (Connection port center) LMU F (Bracket mounting dimensions) ALIP AEP HEP Bracket (Option) Bracket dimensions A B C D E Model Port size F 344 416.5 G 32.5 0 H 95 120 J 14 14 K 55.5 48 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 175 250 87.5 125 487 639 135 210

Series VQ1000 10- Base Mounted 21- Plug-in Unit

kit F kit P kit J kit P kit J kit G kit 2 to 24 2 to 24 2 to 16 stations stations stations Note 1) Besides the above, F/P kit with different number of pins are available.

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 DE 3.5 3.5 3.5 5.5 6 CH 11 13 13 17 19 DB 23 27 31 37 48 CF 4 7 10 12 14 CE 3.5 3.5 3.5 5.5 6 DA 53 67 85 103 122 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

MU

Single Clevis (Double clevis pivot bracket) Double Clevis (Single clevis pivot bracket) DDH10 8 10 10 14 14 DJ 7 10 10 14 16 DI 17 22 27 32 38 CDH10 8 10 10 14 14 DH 11 13 13 17 19 CJ 7 10 10 14 16 DF 4 7 10 12 14 CI 17 22 27 32 38 CH 11 13 13 17 19 DE 3.5 3.5 3.5 5.5 6 DB 23 27 31 37 48 CF 4 7 10 12 14 DA 53 67 85 103 122 CE 3.5 3.5 3.5 5.5 6 CB 23 27 31 37 48 CA 53 67 85 103 122 Part no

EXxx-OMZ0016

(16 points) 16 0 EX600-DY *B (8 points) 0 8 Digital output unit EX600-DY *E (16 points) 0 16 (EX600 Series) DY EX600-DY *F (16 points) 0 16 EX600-DM *E (8/8 points) 8 8 Digital I/O unit (EX600 Series) DM EX600-DM *F (8/8 points) 8 8 Analog input unit AX EX600-AXA*1 (2 points) 32 0 Analog output unit AY EX600-AYA*1 (2 points) 0 32 Analog I/O unit AM EX600-AMB*1 (2/2 points) 32 32 *1: User

VQ

How to Order Valve VQ1 1 0 5 F Manual override Series VQ Compact 3 port valve Non-locking push flush style Locking slotted style B : Option Actuation 1 2 Normally closed Normally open Electrical entry Plug-in style With indicator light and surge voltage suppressor (Only for plug-in manifold) F Functions Standard (1W) High pressure (1.5W) Low wattage (0.5W) Large flow capacity H Y U Coil

SFOD-OMT0009CN

. / . 96 13.1 . 96 13.2 . 97 13.3 . 97 13.4 . 98 13.5 . 99 13.6 . 100 14. . 100 14.1 / . 100 14.2 . 101 14.3 . 102 3 No.SFOD-OMT0009CN-B 14.4 . 102 14.5 . 102 14.6 . 103 14.7 . 103 15. . 104 15.1 . 104 15.2 . 106 1. . 108 1.1 LEY/LEYG . 108 1.2 LEFS . 108 1.3 LES(H) . 109 1.4 LEP . 109 1.5 LEFB . 110 1.6 LER . 110 1.7 LEH . 110 4 No.SFOD-OMT0009CN-B JXC73/83 Series/

AFF

AFF37B AFF75B Port size N.C. auto-drain N.O. auto-drain Drain guide B 01 B 06 B 1 8 3 4 1B Accessory 02 03 10 14 B 1 4 B 3 8 04 B 1 2 1 4 1 B 1 2 20 2B Option IN-OUT reversal direction -T Element service indicator AFF75A to AFF220A AFF 75A 20 D Accessory (Option) Basic size (Applicable compressor rating) D Auto-drain G Pressure gauge F Companion flange L Anchor bolt 75A 75 kW 125A 110 to

AMF

P . 14-20-57 14-20-42 2 Odor Removal Filter Series AMF How to Order AMF150 to AMF850 AMF 250 03 R B Option R IN-OUT reversal direction Body size Bracket Accessory (Option) 150 Standard 1 8 250 Standard 1 4 350 Standard 3 8 450 Standard 1 2 550 Standard 3 4 650 850 B 1 4 B 3 8 04 B 1 2 06 B Nil Nil B Piping port (B dimension) 1 Standard 11 2 Standard 01 B 1 8 02 03 Thread type Nil Rc F G N

Electromagnetic Digital Flow Switch

Reference: 1 [L/min] = 0.2642 [gal/min] 1 [gal/min] = 3.785 [L/min] Thread type Symbol Type Nil Rc N NPT F G The close proximity setting and zero-reset setting functions are only available for the integrated display type. For the remote type sensor unit, the close proximity setting and zeroreset setting functions cannot be used. Option/Part No.

Series 10-, 21- AF-A Air Filter

Clean series 10 AF 03 A 30 F J B 21 AF 03 A 30 F J B Copper, fluorine and silicone-free + Low particle generation q w e r t Air filter Option/Semi-standard: Select one each for a to e. Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order.

Vacuum Filter AFJ Series

AFJ AFJ r t y u w AMV q Body size 20 30 40 ZH -X185 Symbol Description Related Products w Pipe thread type Nil Rc N NPT F G + 01 1/8 02 1/4 03 3/8 04 1/2 + e Port size a Mounting Nil Without mounting option Option r B Note 1) With bracket + b Element 5 5 m 40 40 m 80 80 m + Nominal filtration rating t c Water drop removal type/ Large flow type S Water drop removal type Type y T Large

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Example) 10-ARP30K-03BE-1RY Clean room compliant, copperfree, fluorine-free, silicon-free Clean room compliant Copper-free, fluorine-free Symbol 20 30 40 Body size Description 20 30 40 Body size 20 30 40 Body size Nil K Without backflow function With backflow function With backflow function + Nil N F Thread type Rc NPT G + 01 02 03 04 1/8 1/4 3/8 1/2 Port size + Nil B Note 2) H a Without

LEF-OM006xx

ON/OFF / / 2 3 3 2 1 2 / -20- 3.3. [] LEC LEC / P.32 5.3 <> NPNPNP LEFS16A-100 NPN <> INPIN []INP ON ON INP ON OFF -21- <> No.1 01 a b c d e f g h i j k a ABSINC No. 1 2 mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 ABS 250 50.00 3000 3000 0 0 0 100 48.00 50.00 0.50 1 ABS 250 0.00 3000 3000 0 0 0 100 0.00 2.00 0.50 ABS()/ / INC()// b c d e f 00 g h i 100%DC24V 250% j 12

JXCx-OMT0034CN

RWwn+18 (LEC)7.1 RWwn [bit0-7]1 (LEC) (RWrn+8[bit 8])1 INP(Rx8B)1 INP (LEC*6)6.3 IO RWwn [bit0-7]0(RWrn+8[bit 8])0 () INP 31 - 11.4 (LEC) IO No (LEC*6) IO IO (LEC) RWwn [bit8-F]0 RWwn+18 (LEC)7.1 RWwn [bit0-7](063) RWwn [bit8-7](LEC) (RWrn+8[bit 8])1 RWwn [bit8-F]0(RWrn+8[bit 8])0 32 - 12. 12.1 [IN] () IO ID No Rx00Rx2F Modbus Rx30Rx7F Rx80 OUT0 Rx81 OUT1 Rx82 OUT2 Rx83 OUT3