CXS

/s 1 Graph V = up to 300mm/s 2 0.5 0.4 CXSL6 0.05 CXSM6 Weight m (kg) Weight m (kg) 0.1 CXSL6 0.05 CXSM6 5 0.03 5 0.01 10 20 30 40 50 100 10 20 30 40 50 100 Overhang L (mm) Overhang L (mm) 10 to 32 Graph V = up to 200mm/s 3 Graph V = up to 400mm/s 4 4 20 3 10 32 5 25 1 Weight m (kg) Weight m (kg) 32 20 25 0.5 1 20 15 0.5 15 10 CXSM CXSL CXSM CXSL 10 5 0.1 5 0.1 10 20 30 40 50 100 10 20 30

CY1

15 159 48 30 42 60 41 10 50 113 176 82 CY1RG63 118 8.6 10 M8 x 1.25 16 171 60 32 48 70 47 10 60 121 188 94 With auto switch CY1RG Bore size .

High Vacuum Angle Valve

-10 (FKM) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Nil A B C Seal material 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Seal material FKM EPDM Barrel Perfluoro Compound No. 1349-80 2101-80 Symbol Nil N1 1.3 x 10-10 (FKM) Note 1) Values at normal temperature, excluding gas permeation.

Electric Actuator with Integrated Guide

Guide Series LTF Lead screw lead mm Mounting orientation Motor type Series Page Model Guide type Ground ball screw Rolled ball screw 6 10 20 10 20 10 20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal Courtesy of Steven Engineering, Inc.-230 Ryan Way

MQQ

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 10 8 9.2 6 15.5 5 10 9.2 M5 x 0.8 4 20.5 8 16 8 9.2 8 16.5 6 16 11.5 M6 x 1.0 5 22.5 10 20 8 9.2 10 18.5 6 20 15 M8 x 1.25 5 24.5 13 25 10 11.5 12 22.5 11 25 19.6 M10 x 1.25 6 33.5 17 28 14 16 16 28.5 12 28 25.4 M14 x 1.5 8 40.5 22 Applicable bore (mm) Part no.

MQQ

5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8 36 11.5 M6 x 1.0 47 7 10 25.5 5.4 9 48.5 10 5 7 20 10 to 60 89 M5 x 0.8 79 10 10 40 12 M6 x 1.0 52 8 10 28 5.4 9 55 10 6 7 25 10 to 50, 75, 100 96.5 M6 x 1.0 84.5 12 12 45 13.5 M6 x 1.0 60 4.5 10 12 34 5.5 9 58 10 49.5 7 7 28 10 to 50, 75, 100 116 M8 x 1.25 104 13 16 52 17.5 M6 x 1.0 69 5 14 12 40 5.5 9 71 10 57 10 7 With rod end male thread: MQQDM

Integrated Controller

200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 Mep L3 [mm] L3 [mm] L3 [mm] L3 [mm] m 600 600 600 600 L3 Z 400 400 400 400 200 200 200 200 0 0 0 0 0 5 10 15 20 25 30 35 40 0 10 20 30 40 50 60 70 0 5 10 15 20 0 10 20 30 40 50 60 Work load [kg

REA/REB

Speed 600 mm/s REAS25 8 4 7 10 11 6.5 26.4 16 8.5 70 54 40 20 14 REAS32 8 5 7 12.5 14 8 33.6 20 9.5 86 66 46 24 16 REAS40 10 5 10 12.5 14 8 41.6 25 10.5 104 76 57 25 20 J x K HP HS HT L LD M MM N NN Model REAS15 M8 x 1.0 39 15 21 M6 x 1.0 x 9.5 60 5.6 8 M5 x 0.8 7.5 REAS20 M10 x 1.0 45 25.5 10 M6 x 1.0 x 9.5 70 5.6 10 M6 x 1.0 9.5 REAS25 M14 x 1.5 53 23 10 M8 x 1.25 x 10 70 7 10 M6 x 1.0

Electro-Pneumatic Proportional Valve Series VEF/VEP

characteristics Set pressure range (MPa) Without sub-plate Without sub-plate 1 2 3 Nil 02 03 13 9 5 Symbol 2 1/4 Nil 02 03 0.05 to 0.65MPa 1 3/8 2 1/4 2 0.1 to 0.9MPa 2 02 03 04 03 04 06 1/4 3/8 1/2 3/8 1/2 3/4 1 2 3 4 3/8 03 04 06 3 1 30 3/8 0.005 to 0.15MPa 1 4 1/2 4 45 1 3/4 12 8 4.5 2.5 Without sub-plate Nil 02 03 1(P) Symbol Flow type (VEF2) Flow type (VEF3) Pressure type (VEP3) 2 2

HRX-OM-W002

20 30 40 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] Circulating fluid temperature[] Circula Circulating fluid temperature[] 50Hz 60Hz 60Hz 50Hz 50Hz

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Purchase orders are available in units of 10 pieces. d d KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 32 35 39 43 32 35 39 43 16 18 16 18 6 8 10 12 6 8.5 10 20.5 22 20.5 22 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 11.5 DIN rail mounting bracket [-D,-D0,-D] VVQ2000-57A This

Cylinder with Lock

2 (Different surfaces) 10 n 10 + 30 (n 2) D-A9l 2 (Same surface) 50 1, 2 (Different surfaces) 10 n 10 + 40 (n 2) D-A9lV 2 (Same surface) 40 1, 2 (Different surfaces) 10 n 10 + 30 (n 2) * n = 3, 4, 5 * The D-M9lV/M9lWV/M9lAV/A9lV are mountable on 32 to 63.

MHZ2/MHZJ2

M4 x 0.7 M5 x 0.8 M5 x 0.8 3.6 3.6 6 6 8 8 10 10 5 5 8 8 10 10 12 12 3 2 4 2.5 5 3.3 6.5 3.5 MHZ2-10-X51 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.2 0 +2.5 0 +2.5 0 MHZ2-16-X51 MHZ2-20-X51 MHZ2-25-X51 Refer to pages 4 through 7 for the standard type dimensions, which are the same except for those shown above. 32 Series MHZ2/MHZJ2 Model Selection Method Model Selection Selection procedure Confirm gripping

SMC Pneumatic Clean Series

6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18 18 22 26 90 90 108 108 20 20 25

HRX-OM-X084

/20. 9-1 9.1.2 HRR010-W-10/20. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-6 9.2.1 HRR010-A-10/20. 9-6 9.2.2 HRR010-W-10/20. 9-7 9.3 Flow Chart . 9-8 9.3.1 HRR010-A-10/20. 9-8 9.3.2 HRR010-W-10/20. 9-8 HRR Series HRX-OM-X084 Contents 9.4 Cooling capacity . 9-9 9.4.1 HRR010-A -10. 9-9 9.4.2 HRR010-W-10. 9-9 9.4.3 HRR010-

Rotary Table/

B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position

SMC Pneumatic Clean Series

Series 10-/11-/21-/22-CDG1 Series 10-/11-REC Series 10-/11-CDM2X Series Perpendicular entry is unavailable.

0.4

Purchasing order is available in units of 10 pieces. VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.

Compact Guide Cylinder

V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 10 10 Load mass m [kg] Load mass m [kg] 1 1 0.3 0.3 10 30 31 101 200 100 10 30 31 100 101 200 Stroke [mm] Stroke [mm] MGPKL32 L = 50 mm, V = 200 mm/s or less L = 100 mm, V = 200 mm/s or less 50 50 Load mass m [kg] Load mass m [kg] 10 10 3 3 10 50 51 100 101 200 100 101 200 10 50 51 Stroke [mm] Stroke [mm] 21 Model Selection MGPK Series