Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Elbow/Universal Type Flow rate and effective area AS221FM-02 AS221FM-01 Model AS121FM-M5 AS231FM-02 AS231FM-01 AS131FM-M5 3.2, 4, 6 6, 8 Metric sizes 3.2, 4 8, 10 4 6 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" Inch sizes 1/8", 5/32" 5/32" 3/16" l/min (ANR) {Nl/min} 38 7 Flow rate 12 Controlled flow Effective area mm 0.6 0.2 0.1 l/min (ANR) {Nl/min} 230 Flow rate

Precision Regulator

IR10-OM02-E PRODUCT NAME Precision Regulator MODEL/ Series IR1000 IR1010 IR1020 Contents Safety Instructions 2~3 1. Specifications 4~5 2. Construction and operation principle 6 3. How to order 7 4. Marking on product 7 5. Precautions for handling 8~11 6. Warranty 12 7. Troubleshooting 13 8.

PS-OMH0005CN

(n1L~n1H n2L~n2H) ON (20 ) Hysteresis "" 20 ON () (P1LP1H P2LP2H) ON (20 ) () 5%R.D.(5%) (0~1MPa 0.001MPa 1/1000) "()" () "" () ripple -12No.PS-OMH0005CN-D M38 L(2) (ZS-26-B) +(ZS-26-01) 48(ZS-26-D) 48 (ZS-26-D) () (ZS-26-01) (ZS-26-B) 90 IP65(48IP40) 1/41/2 0.58 mm -13No.PS-OMH0005CN-D 2 -14No.PS-OMH0005CN-D FG () AWG No.

SMC VQZ2000-GS-5 screw/gasket set (10/bag = 1), VQZ2000 VALVE, SOL 4/5-PORT*** $6.12 + Add to Quote Add To Cart Add to Cart SMC VQZ2000-S-01 subplate

Series IRV10/20 Vacuum Regulator

Vacuum Regulator Series IRV10/20 RoHS How to Order Standard connections IRV 20 C08 Accessory w Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) None Note 1) Nil With pressure gauge Note 2) Note 3) (IRV10: With GZ33-K-01, IRV20: With GZ43-K-01) G Note 3) ZN ZP ZA ZB With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML With ZSE30A-01-B-ML NPN open collector 1 output

Precision Clean Regulator

purge N2 gas 2 1 Packaging Clean gas filter Class 10,000 Class 10,000 870 Precision Clean Regulator SRP Series ARJ How to Order AR425 to 935 ARX SRP 1 1 0 1 01 AMR Made to Order (Refer to page 874 for details.)

1 Blow Gun Series VMG K
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MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

1 !2 !3 !4 !5 !6 !7 !8 !

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Pressure Relief 3 Port Valve With Locking Holes

Thread type X1 Red body 2 Nil Rc 3 F G Option 4 N NPT Symbol Description 5 Nil K Handle color: Black Port size Body size R Flow direction: RightLeft Symbol Port size 2 3 4 5 ZNote1 psi as unit displayed on label 01 1/8 X Note 1) Only for NPT thread.

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

AMR3000 to 6000

Model Description AMR3000 AMR4000 AMR5000 AMR6000 : E4-02 : E4-03 : E4-04 1 4 3 8 1 2 1 4 1 2 : E6-06 : E6-10 3 4 1 : E3-02 : E3-03 : E5-04 : E5-06 Adapter assembly (6) 3 8 3 4 AD33-X203 AD33-X202 AD33-X210 AD33-X201 Float style auto drain (Bowl assembly) IS1000-01 (Set at 0.4MPa) Compact pressure switch PT elbow (7) 135510 135613 Note 5) in the gauge part number (e.g.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Recommended speed controller Model 5. Do not scratch or gouge the external surface of the cylinder. It can damage the wear ring, increase particle generation and cause malfunction. Model Elbow type Straight type In-line type 12-REA25 10-AS2001F-06-X214 10-AS2201F-01-06-X214 10-AS2301F-01-06-X214 12-REA32 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 6.

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

ARP30-02BG-3 1.4 L/min (ANR) or less (at P2 = 0.6 MPa) Pressure port size Note 3) 1/8 1/4 1/8 5 to 60C (No freezing) Ambient and fluid temperature With digital pressure switch 5 to 50C (No freezing) Ex.)

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

ARP30-02BG-3 1.4 L/min (ANR) or less (at P2 = 0.6 MPa) Pressure port size Note 3) 1/8 1/4 1/8 5 to 60C (No freezing) Ambient and fluid temperature With digital pressure switch 5 to 50C (No freezing) Ex.)

Pressure Switch/Reed Switch Type

Description Material Body 1 ZDC 0.1 0.3 i w Switch assembly 2 0.2 0.4 Shield plate 3 Steel sheet o Cover 4 Steel sheet MPa 52 !0 Adjusting screw 5 Brass Hexagon nut 6 Brass !1 Indicator 7 PBT Spring 8 Stainless steel !2 q Magnet 9 Piston 10 POM Seal piston 11 NBR 1/8 15 23 Scale plate 12 PC Wiring Warning Mounting Warning Pressure Source Warning 1. 1. 1.

VEX-OMY0001

NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1),23(P2) (2) a 12(P1) 1(P)2(A)3 3(R) 3(R) b 23(P2) 2(A) 2(A)3(R)1 1(P) 1(P) 12(P1) 1 2 3 23(P2) 4 5 6 7 8 POM 9 -12No.VEX-OMY0001 () () 3(R) 2(A) 1(P) 1(P) 2(A) 3(R) () a b P1P2 2(A) 1(P)

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

, 290 80 AM350 3 4 2B/FF/10K 11/2 B/FF/10K 1 2 3 4 , 305 312 80 AM450 AMl 1 1 1 2 1 3 4 1 2 , , , 339 80 AM550 Related poroducts 391 80 AM650 1 2 1 540.5 80 AM850 Precautions/With Differential Pressure Gauge(GD40-20-01) Be sure to read before handling.

NVZseies

Individual, Common Not required (Use turbine oil #1(lSO VG32) if lubrication is Free 30Gy'5G (8.5 -2000H2) Dust proot Solenoid S ifications Grommet (G) (H), Plug connector (L) (M), DIN connector (D) 1 1 OV 5 a/6aqz, 220V. a I oqz 24V 5a,1a Hz 12V,24V 15+10% of rated voltage utass E ot equrvatenl (z5u r l 81'F or less 1.8W,,,2.1W (W/LED) 4.zVA/6OHz 4.5vA/soHz 3VA/60H2 3.5VA/50H2 DC : Diode

3 Way,3 Port Solenoid Valve NVZ Series

Individual, Common Not required (Use turbine oil #1(lSO VG32) if lubrication is Free 30Gy'5G (8.5 -2000H2) Dust proot Solenoid S ifications Grommet (G) (H), Plug connector (L) (M), DIN connector (D) 1 1 OV 5 a/6aqz, 220V. a I oqz 24V 5a,1a Hz 12V,24V 15+10% of rated voltage utass E ot equrvatenl (z5u r l 81'F or less 1.8W,,,2.1W (W/LED) 4.zVA/6OHz 4.5vA/soHz 3VA/60H2 3.5VA/50H2 DC : Diode