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Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40 ZMA07M 0.7 16 20 ZMA10M 1.0 0.35MPa 26 32 ZMA13M 1.3 70 36 ZMA13S 1.3 75 38 1 stage diffuser 0.45MPa ZMA15S 1.5 90 45 Series ZMA How to Order ZMA 07 1 H K 5 T14 C Nozzle diameter Switch lead wires (connector type) 0.5mm 0.7mm 1.0mm 1.3mm 1.5mm 05

Base Mounted Wiring: Base Mounted Plug-in w/Multi-connector on D Side, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Bottom, Port Size: 1/2, Thread: -, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPT, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Non Plug-in Individual Lead Wire Entry, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: -, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: -, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: D Side, D Side Mounting

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: NPTF, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPTF, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPT, Exhaust Cleaner Mounting Direction: -

Base Mounted Wiring: Plug-in w/Terminal Block, Stations: 05 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 3/4, Thread: NPT, Exhaust Cleaner Mounting Direction: -

PA02] 0 0 Select a regenerative option. 00: Regenerative option is not used. 00: 100 W 0.2 kW 7 kW 11 kW 22 kW 01: FR-BU2FR-RC FR-CV 02: MR-RB032 03: MR-RB12 04: MR-RB32 05: MR-RB30 06: MR-RB50 () 08: MR-RB31 09: MR-RB51 () 0B: MR-RB3N 0C: MR-RB5N ( ) FA: 11 kW 22 kW UP For drivers of LECSN-T5, do not use a regenerative resistor.

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.

PVPD 00 1 2 PVPD 03 0.3 0.35MPa 0.4MPa PVPD 04 0.4 0.35MPa 0.45MPa 3 05 0.5 0.35MPa 2) PV 06 0.6 0.5MPa 1) PD 3 0 1 PVPD PVPD PVPD PVPD K1 N.C. N.C. 2 J1 N.C. M5 Q1 +COM N.C.

Software for compatible robot control devices If the software for the robot control device is V9.40P / 05 version or earlier, update to the latest version V9.40P / 06 version or later before installing the plug-in software. CRX plug-in software installation 1. Please download the CRX plug-in software "SMC_GrpSwMH.IPL" from the SMC website. 2.

4) DC No.1 (+)No.2 (-) () (904 ) 3.57 JISC3306 0.5mm22 3 DIN L,M AC AC DC DC AC DC 3 DIN AC DXT170-176-1 NO.1 NO.2 AC100V 100V DXT170-176-2-01 DC AC200V 200V DXT170-176-2-02 NO.1 AC110V 110V DXT170-176-2-03 (+) NO.1 AC220V 220V DXT170-176-2-04 (+) () AC240V 240V DXT170-176-2-07 NO.2 (-) DC6V 6VD DXT170-176-3-51 AC DC12V 12VD DXT170-176-3-06 NO.1 DC24V 24VD DXT170-176-3-05

VEX-OMV0001 VEX1 Series / () 5 () 30 ( ) 6 VEX-OMV0001 VEX1 Series (904 ) 3.57 () (AF )(AMAFM ) ( ) 22 3 JIS C 3306 0.5mm () () IR2000 A VEX1 B33 VK300-82-1 ITV VY AC100V 100V VK300-82-2-01 AC110V 110V VK300-82-2-03 AC200V 200V VK300-82-2-02 AC220V 220V VK300-82-2-04 ) AC240V 240V VK300-82-2-07 DC6V 6V VK300-82-4-51 () VEX1300-03 DC12V 12V VK300-82-4-06 G36-4-01 DC24V 24VD VK300-82-3-05

.+20 mA () 3=010 V 4=05 V 5=15 V 6=020 mA 7=420 mA 8Ah // USINT 101h0Ah 09 264h83h 031 -76No.EX-OMN0029CN-D (1) EX600-ZMV1 (M46)2 (M38)4 EX600-ZMV2(SY ) (M46)2 (M38)2 (2) EX600-ZMA2 (M420)1 P (414)2 EX600-ZMA3(SY ) (M420)1 P (414)2 (3) EX600-ZMB1 (M45)2 EX600-ZMB2DIN (M46)2 -77No.EX-OMN0029CN-D (4)(10 ) EX9-AWESM8 EX9-AWTSM12 (5)(1 88 ) EX600-ZT1 (6)Y PCA-1557785 2M12(5 )M12