Air Cylinder CLA Series Fine Lock Model

4 E1,2,3,4... 110+100111 Same surface 7s+50(n-2) n=2,3,4,,.. 90+s0(n-2) 110+50 (n'2) with 1 1 0 90 100 1 1 0 D-A4 Wi$l2 Differenl sudace 35 75 80 90 Same surface 100 100 r00 100 Different 7s+30(n-2) 80+30(n,2) 90+30(n-2) Same 100+100(n 2), n=2,4,5,8... l 0 75 80 90 Different 80 90 D-B5.86 D-G5.K5 Same 35 80 90 With n Ditlerenl 35+30(n-2) n=1,2,3,4.. n=2,4,6,a.. 80+30(n-2J E2,4,6,8... 90+30

Sine Rodless Cylinder Series REBR Direct Mount Type

REBR32 13 76 7 7 8.5 Rc 1/8 54 26 33 28 50 27 M8 x 1.25 x 10 116 M6 x 1 X Y Z Model REBR15 18 54.5 98 REBR25 28 72 125 REBR32 35 79 148 66 Sine Rodless Cylinder High Precision Guide Type Series REBR Proper Auto Switch Mounting Position for Stroke End Detection Auto Switch Operation Range (mm) D-Y5 D-Y7 Auto switch model Bore size (mm) D-A9 D-F9 D-Z7 D-Z8 D-Y7W 8 5 15 9 7 25 A B 9 6

Mechanical Valves Series NVM, NVFM, NVZNI

A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6

Compact Cylinder with Lock Series CLQ

D-J79C D-F7W/J79W D-F7WV D-F7BAL D-F7F D-F7NTL Manufacture of Intermediate Strokes D-A7/A80 D-A73C/A80C D-A7H/A80H D-A79W Method Part number Spacers installed in standard stroke body Refer to standard part number and ordering on page 1.

SYJ300/500/700

Type SS3YJ7-40 1/8 1/8 1/8 1/8 C6 C8 Type SS3YJ7-41 Base mounted for internal pilot Type SS3YJ7-42-01 SYJ74 1/4 1/4 Type SS3YJ7-42-C6 Type SS3YJ7-42-C8 1/4 Body ported for external pilot SYJ72R 1/4 1/8 2.2 0.34 0.55 2.4 0.32 0.62 Type SS3YJ7-21R Type SS3YJ7-41R 2.2 2.0 1.6 2.1 0.35 0.27 0.32 0.24 0.59 0.47 0.39 0.51 2.4 2.2 2.2 2.3 0.36 0.32 0.27 0.31 0.66 0.56 0.54 0.59 1/8 1/8 C6 1/4 1

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Applicable auto switch model No. of auto switches mounted D-A9, D-A9V D-M9, D-M9V D-F9W, D-F9WV 1 pc. 5 2 pcs. 5 5 5 10 10 8-8-9 9 Series MXP Table Deflection Table Displacement due to Pitch Moment Load Amount of displacement on A when load is applied on F . Table Displacement due to Yaw Moment Load Amount of displacement on A when load is applied on F .

MHF2

1 1 4.5 4.5 4.5 4.5 1 1 4.5 4.5 4.5 4.5 1 1 6.5 6.5 6.5 6.5 0.5 0.5 3 3 1 1 Hysteresis MHF2-8D D-F9(V) D-F9W(V) MHF2-8D1 Red ON Green ON MHF2-8D 0.5 0.5 1 MHF2-8D2 MHF2-12D 0.5 0.5 1 MHF2-16D 0.5 0.5 1 MHF2-12D MHF2-20D 0.5 0.5 1 MHF2-12D1 Auto Switch Mounting MHF2-12D2 Insert the auto switch into the switch mounting groove in the air chuck in the direction shown below, and after setting

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

MU

CU Minimum Stroke for Auto Switch Mounting (mm) D-A7lH, A80H D-F7lW, J79W D-A79W D-F7l, J79 D-F7BA, F7NT D-F7lF CQS D-A7l D-A80 D-A73C D-A80C Number of auto switches D-F7lV D-J79C D-F7lWV CQ2 MU 2 pcs. 5 10 15 15 1 pc. 5 5 10 15 Construction Component Parts No.

Compact Cylinder with Air Cushion and Lock Series RLQ

type Bore size 32 40 50 63 D-A7 D-A80 D-A73C D-A80C D-A9V D-A7H D-A80H D-F7 D-J79 D-F9W Number of auto switch D-F7WV D-F9WV D-F7BAVL D-F7V D-J79C D-F9V D-A7, A7H D-A73C D-A80, A80H D-A80C 12 11 10 12 13 14 14 16 D-A79W D-A9, A9V 1 pc. 2 pcs. 20 20 20 20 20 20 20 20 9.5 9.5 9.5 11.5 D-F7, F7V D-J79, J79C D-F7W, F7WV D-J79W D-F7BAL, F7BAVL D-F7NTL, F79F D-F7W D-J79W D-F7BAL D-F79F D-F9BAL

CXT

10 2 10 15 20 CXT 32 40 5 15 10 5 1 10 10 20 (mm) D-F7W D-J79W D-F7BAL D-F7NT D-F79F Auto switch model D-A7 D-A8 D-A73C D-A80C D-A7H D-A80H D-F7 D-J79 D-F7V D-J79C D-F7WV D-F7BAVL D-A79W Application No. of auto switches mounted 2 5 10 15 15 20 20 CXT 32 40 1 5 5 10 15 15 20 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Series Size Rotating angle Vane type Applicable auto switch Angle adjustment screws 1 D-9, D-T99 D-9A, D-S99, S9P 90 High precision type MSUA 3 Single vane 7 Table unit D-R73, D-T79 D-R80, D-S79, S7P 180 Auto switch capable 20 1 D-9, D-T99 D-9A, D-S99, S9P Single vane Since switches can be moved anywhere on the circumference, they can be mounted at positions which accommodate the specifications

Compact Cylinder

Minimum Auto Switch Mounting Stroke (mm) Auto switch model Bore size (mm) D-A9 A9V D-M9 D-M9V D-F9W D-F9WV D-F9BAL Number of auto switches 2 pcs. 10 5 15 10 20 10 15 20 1 pc. 5 5 15 5 20 10 15 2 pcs. 10 5 10 10 20 10 10 25,32,40,50 1 pc. 5 5 10 5 20 10 10 2 pcs. 10 5 10 10 15 10 10 63 1 pc. 5 5 10 5 15 5 5 Besides the models listed in How to Order, the following auto switches are applicable

CXS

44.5 A 19.5 29.5 35.5 43 44 53 D 7.5 5 2 5 7 7.5 MY 6 10 15 20 25 32 CY MG CX Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

CXS

44.5 A 19.5 29.5 35.5 43 44 53 D 7.5 5 2 5 7 7.5 MY 6 10 15 20 25 32 CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX Note 1) 6: D-A90, D-A96, D-A93, D-F9BAL 10: D-A90, D-A96, D-A93 Only outward electrical entry (D dimension) is available.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

1 to 12 stations 24 D side D-sub connector (25P) kit, with 3.0 m cable D side D-sub connector kit D-sub connector (25P) kit, with 5.0 m cable Flat ribbon cable (26P) kit, without cable P kit Flat ribbon cable (26P) kit, with 1.5 m cable 24 stations 1 to 12 stations 24 (1) Flat ribbon cable (26P) kit, with 3.0 m cable D side Flat ribbon cable (26P) kit, with 5.0 m cable 26P 20P ( ) Flat ribbon

ZX

(For replacement) Individual spacer R1 ZF Phillips screw Adapter D (M2.5 x 28) Phillips screw M2.5 x 12 M2.5 x 12 Phillips screw How to order (1) Valve unit (Supply valve: Air operated) (For replacement) ZP Note 1) M5: Suffix -4, M6: Suffix -1 Note 2) M5: Suffix -1, M6: Suffix -2 Adapter D Note 1) ZCU Individual spacer R1 AMJ Adapter D individual spacer R1 assembly Assembly no.

Compact

1 LEF LEJ A A LEL B D-D #3 LEM LEM LEY !6 @3 @3 @5 @4 @7 @2 @4 @5 @1 LES #1 #0 u #2 i y LEPY LEPS !3 C-C A-A LER !8 @6 @8 @9 B w !2 C !7 D LEH LEY -X5 D #4 #4 11LEFS C o !0 !5 11LEJS Motor option: With lock 25A!1 LEC !2 LEC S !3 LEC SS-T @0 LEC Y !9 Motorless LAT Component Parts Component Parts LZ No. Description Material Note 1 Body Aluminum alloy Anodized No.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

Nil M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 TF G 1/8 G 1/8 G 1/8 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 b C H B d M10 x 1.0 M20 x 1.5 M26 x 1.5 M32 x 2.0 H 4 8 8 10 B 14 26 32 41 C 16.2 30 37 47.3 Part No.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Temperature specifications Symbol Nil M9N (L) M9P (L) M9B (L) A90 (L) A93 (L) M9// Symbol Nil H0 Temperature range 5 to 60C 5 to 150C Without auto switch (without built-in magnet) Remarks Auto switch D-M9N (L) D-M9P (L) D-M9B (L) D-A90 (L) D-A93 (L) Solid state switch 6. No. of auto switches/Detecting position Quantity Without auto switch 2 pcs. 1 pc. 1 pc.