HEC_W-E

Product Development Div. 6, Engineering Headquarters Japan Technical Center, SMC Corporation, Address: 4-2-2 Kinunodai, Tsukubamirai-city, Ibaraki-ken, 300-2493 TEL: +81 297-52-6 FAX: +81 297-20-5007 E-mail: kaihatsu_6_g3@.smcjpn.co.jp Note: The contents of this manual are subject to change without notice. i Warranty Scope of warranty and liability to the Thermo-con Please thoroughly understand

A_HEC-OM-J017

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.

HEC-OM-S008

SMC Corporation R&D Center Product Development Division-6 Address: 4-2-2, KINUNODAI,TSUKUBAMIRAI-CITY , IBARAKI-KEN 300-2493, JAPAN Phone:+81-297-52-6 Fax:+81-297-20-5007 E-mail:kaihatsu_6_g3@smcjpn.co.jp Notice: The content of this manual can be revised without a previous notice.

High Vacuum L Type Valve

Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52

XL-OMY0001

216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52

XL-OMV0002

10 15 20 25 30 Ass'y ( Ass'y 30 8 XL-OMV0002 4 4-1.162540 Assy SUS304 SUS316L ( SUS304) ( A6063) C D C E E (KF ) Fn J H B A G A mm A B C D E Fn G H J XLC-16 40 110 38 1 30 17 40 26 XLC-25 50 120 48 1 12 40 26 39 27.5 XLC-40 65 171 66 2 11 55 41 63 36 9 XL-OMV0002 4-2.162580,100,160 C E D C E E (KF ) (K ) Fn Fd J K H B A G A mm A B C D E Fn Fd G H J K XLC-50 70 183 80 31 10.5 75 52

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5

MX-OMP0051

42.7 41.7 41.7 41.7 54.7 54.7 40.7 79.7 77.7 A 10 20 30 40 50 75 100 125 150 10 20 30 40 50 75 100 125 150 MXQ6B 16 5.4 5.4 5.4 5.4 5.4 15 25.6 25.6 31.6 48.6 25.6 MXQ8B 27 11.9 11.9 11.9 11.9 11.9 11.9 16 23.1 23.1 31.1 31.1 50.1 50.1 MXQ12B 14.5 14.5 14.5 14.5 14.5 14.5 14.5 14.5 38.1 32.1 32.1 39.1 39.1 45.1 64.1 64.1 MXQ16B 18.6 18.6 18.6 18.6 18.6 18.6 18.6 18.6 18.6 47 37 37 37 43 52

CEx-OMQ0011

1 STEP 4 0.0 " " " " " 1 PRG 1 STEP 1 " 0050.0 " " " PRG 1 STEP 1 UP No.8 " 0050.0 " " PRG "8" " PRG 8 STEP 0 2 WRITE " End " " 51 End0 PRG 8 STEP 1 0.0 " " " " 1 LEFT PRG 8 STEP 1 0068.0 DOWN 8 1 LEFT UP 6 1 WRITE " " " " PRG 8 STEP 2 2 5 UP 5 0.0 " " " " 2 LEFT UP 3 PRG 8 STEP 2 0030.5 " " " " 2 WRITE 8 1 END PRG 8 STEP 3 0.0 " " " " " PRG 8 STEP 1 8 " 0068.0 " " 52

CRBB-OM00004

Fig. 3-1 -9 d 1015 170 20 2030 100 15 40 86 10 -/()()/ -/// d 1015 110 10 2030 90 40 52 8 6 No. Auto Switch Mounting D-M9 External view and descriptions of auto switch unit For sizes 10, 15 For sizes 20 to 40 1. Auto switch mounting 1. Auto switch mounting Insert the auto switch into the groove of the switch holder. Insert the auto switch into the groove of the switch holder. 2.

Rotary Table

Minimum rotation angle that will not allow decrease of energy absorption ability (Internal shock absorber type) Size 10 20 30 50 70 100 200 Minimum rotation angle that will not allow decrease of energy absorption ability 52 43 40 60 71 62 82 Table 3.

LEF-OM002xx

note3) Equivalent lead [mm] 48 48 48 50 / 20 Impact/Vibration resistanc [m/s2] note4) Actuation type Belt Guide type Linear Guide 5 to 40 Operating temperature range [] 90 or less(No condensation) Operating humidity range [%RH] Motor size 28 56.4 42 Electric specifications Motor type Step motor(Servo 24V DC) Encoder Incremental A/Bphase (800 pulse/rotation) 24VDC10% Rated voltage [V] 24 32 52

LEY-OM007

OUT -52- No.

JXCx-OMT0001CN

EtherNet/IP . 43 8. . 44 8.1 . 44 (1) PLC (PLC) . 44 (2) PLC (PLC ) . 44 8.2 . 44 (1) PLC . 44 (2) PLC . 46 9. . 48 9.1 . 48 9.2 . 49 9.3 . 51 9.4 . 52 (1) ABS . 54 (2) INC . 54 (3) LIN-A / LIN-I . 54 (4) CIR-R / CIR-L . 55 (5) SYN-I . 55 10. . 56 10.1 . 56 -2No.JXC-OMT0001CN-C 10.2 . 57 10.3 . 60 10.4 . 64 10.5 . 67 10.6 . 71 10.7 PLC . 73 10.8 . 73 11. . 74 11.1 . 74 11.2

LECA6_C

(1-106) C RESET SVON 1 1-144 RESETS VON (1) D 50 - ON (M24V) 1-145 RESETS VON (1) D 1-146 RESETS VON (1) D (C24V) RESETS VON (1) 1-147 D (1-148) RESETS VON (1) D 51 - 1-149 RESETS VON (1) D 1-150 D RESETS VON (1) 1-192 E ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52

LECP6_C

106) C RESET SVON 1 1-144 RESET SVON (1) D 50 - ON (M24V) 1-145 RESET SVON (1) D 1-146 RESET SVON (1) D (C24V) RESET SVON (1) 1-147 D (1-148) RESET SVON (1) D 51 - 1-149 RESET SVON (1) D 1-150 D RESET SVON (1) 1-192 E ON(SVON ON) 1-193 E ONSVON ON 1-194 E 1-195 E 1-196 E EEPROM 1-197 E EEPROM 10 CPU CPU CPU 1-198 CPU E 1 SV1.00 RESETSVONSETUP 52

Air filter, regulator and lubricator unit , Clean looking, modular design , Energy saving with high flow rate , Compact spacer with bracket reduces total assembly space , Optional embedded pressure gauge , Improved installation , Rc(PT), G(PF) or NPT threads Auth/Grp: 2/52. EC. AIRLINE EQUIPMENT. AC MASS PRO. 180.

Cart SMC SX5000-51-2A supply/exhaust block assy, SS5Y5 MANIFOLD SY5000*** $10.05 + Add to Quote Add To Cart Add to Cart SMC SX5000-52

Cart SMC SX5000-51-2A supply/exhaust block assy, SS5Y5 MANIFOLD SY5000*** $10.05 + Add to Quote Add To Cart Add to Cart SMC SX5000-52