AS-FG

Note) Metric size Inch size 23 04 06 08 10 12 Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Port size AS-FE KE 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 3.2 4 6 8 10 12 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 N AS-FG AS-FG AS-FP AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 542. Use 1/8" tube.

AS-FG

Metric size Inch size Meter-out Meter-in 0 1 3.2 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 23 04 06 08 10 12 4 6 8 10 12 With One-touch fitting Stainless steel specifications (SUS303) Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT Use 1/8" tube.

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7

Electro-Pneumatic Valve NVEP/NVEF Series

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

NVEPA|VEFseies

Etfective Orifice (mm2) NPTF (Base mount type) 1 1 3 02=1h 03 = 3/s I .t 1 30 Q2=1/t 03=9e O4=1/z 1 45 03 =3/8 04=1/z 06=aa (Base mount type) 1 2 02=lL 03 = 3/s 8 4.5 4 ?.

Speed Controller: Standard Type Series AS Elbow Type (Metal Body) 1

AS1200-M3 AS1400-M3 AS120-M5 AS220-01AS220-02 AS320-03 AS420-04 10-32UNF Port size M3 x 0.5 2.5, 4, 6 1.05 MPa 0.7 MPa 0.1 MPa M5 x 0.8 1/8 1/4 20, 25, 32, 40 3/8 1/2 6, 10, 15, 20, 25 80, 100 32, 40, 50, 63 Applicable cylinder bore size (mm) 1.5 MPa 1 MPa 0.1 MPa Proof pressure Max. operating pressure Body swivels 360 Swivel type allows free setting of piping.

CEx-OMQ0010

(4) (5)TDK ZGB2203-01U (6)CEU1CEU2CEU5 (7)CEU1(P)-D EMC (2004/108/EC) 6-1 18 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 1m 6-2 6-3 (1)( ) (2) No.2()(CEU2 ) (3) (4) CEU2 19 7-1 () ()

Metering Valve with Silencer Series ASN2 1

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 2 Series ASN Construction Component

For Water Digital Flow Switch Series PFW

0.025 0.06 0.04 Pressure loss (MPa) Pressure loss (MPa) Pressure loss (MPa) 0.020 0.05 0.03 0.04 0.015 0.03 0.02 0.010 0.02 0.01 0.005 0.01 0 0 0 10 12 14 16 2 0 4 6 8 40 35 30 25 20 15 10 5 0 4.0 3.5 3.0 2.5 2.0 1.5 1.0 0.5 Flow rate (l/min) Flow rate (l/min) Flow rate (l/min) Sensor Unit Construction Parts list Description Attachment Seal Body Sensor No. 1 2 3 4 Material Stainless steel

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

(UL standard V-0) Applicable model: ASV310F, ASV410F, ASV510F Inch size Note) Elbow: M3, M5 only Port size AS 04 06 08 10 12 03 07 09 11 13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" M3 M5 U10/32 01 02 03 04 M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 With One-touch fitting Thread type ASP Brass parts are all electroless nickel plated.

VER2000/4000

AXT510-32A AXT503-23A Flow control interface Pressure gauge G36-10-01 G36-10-01 Model Selection Applicable cylinder bore size: 25 to 125 For model selection, refer to Selecting Electro-pneumatic Proportional Valve on page 14-9-20. 14-9-18 3 5 Port Electro-pneumatic Proportional Valve Series VER2000/4000 How to Order Nil Port size Without sub-plate 02 03 1 4 3 8 F.R.L.

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3/8 21 40 204 22 80 130 10 100 M26 x 1.5 23 1/2 21 40 204 100 130 26 10 6-5-60 61 Air Cylinder: With End Lock Series CBG1 Rubber Bumper Type: CBG1BN Rod end lock: CBG1BN Stroke R Bore size GB Bore size (mm) DL1 S GB TB ZZ 20 19.5 10(12) 80(88) 11 117(125) CJ1 25 19.5 10(12) 80(88) 11 122(130) 32 20 10(12) 81(89) 10(11) 123(131) CJP 40 19 10(13) 87(96) 10(12) 139(148) 50 23.5 12(14) 102(114

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

C95

200 10 125 15 15 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 20 20 20 + 55(n-2)/2 n = 2, 4, 6, 8 25 25 + 55(n-2)/2 n = 2, 4, 6, 8 10 100 35 100 + 100(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 55 35 55 + 55(n-2) n = 2, 3, 4, 5 35 + 30(n-2) n = 2, 3, 4, 5 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 40(n-2)/2 n = 2, 4, 6, 8 10 10 + 30(n-2)/2 n = 2, 4, 6, 8 15 10 + 45(n

CNG

NT-02 NT-03 NT-G04 (15) (19.6) (21.9) M8 x 1.25 M10 x 1.25 M14 x 1.5 12.5 16.5 18 13 17 19 20 25, 32 40 5 6 8 20 C type 8 for shaft C type 8 for shaft IY-G02 0.040 0.076 8 16.2 21 7.6 0.9 1.5 20 CD-G02 0.040 0.076 8 38.6 1.5 43.4 7.6 0.9 C type 10 for shaft C type 10 for shaft IY-G03 20.2 25.6 9.6 1.15 0.040 0.076 10 1.55 25, 32 0.040 0.076 10 CD-G25 42.6 1.55 48 9.6 1.15 25 C type 10 for

Digital Flow Switch

L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 5 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 2 to 200 L/min 1 to 1 L/min 10 to 1000 L/min 3 to 3 L/min 20 to 2000 L/min Power supply voltage 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% Temperature characteristics 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) (25C standard)

Cylinder with Lock

Bore size B DA DB DL DU DC DX DE DO DR DT DS DH Z DD H10 32 219 40 237 50 268 63 280 80 351 100 371 MB-B03 32 46 42 32 22 10 44 14 62 9 6.6 15 7 33 213 10+0.058 0 40 52 42 32 22 10 44 14 62 9 6.6 15 7 33 231 10+0.058 0 MB-B05 50 65 53 43 30 11.5 60 20 81 10.5 9 18 8 45 260 14+0.070 0 63 75 53 43 30 11.5 60 20 81 10.5 9 18 8 45 272 14+0.070 0 MB-B08 80 95 73 64 45 14 86 30 111 12.5 11 22 10

CG1

(102) 90 (102) 108 (122) 108 (122) 8 10 12 16 20 20 25 30 13 17 17 19 27 27 32 41 24 29 18 22 22 30 35 35 40 40 15.5 35 40 40 50 58 58 71 71 M4 X 0.7 Depth 7 5 5.5 5.5 6 7 7 10 10 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 11 11 11 12 13 13 201 to 350 10 (12) 19.5 16.5 20 26 32 38 50 60 M5 X 0.8 Depth 7.5 301 to 400 10 (12) 19.5 27 32 32 37 37 M5 X 0.8 Depth 8 35.5 44 55 69 80 301 to 450 10 (13)

Digital Flow Switches Series PF2A

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption