125

0.37 0.3 0.4 Body ported VEX322-01 1/8 3.3 0.34 3.5 0.39 3.3 0.37 3.5 0.36 0.2 0.3 VEX322-02 1/4 4.1 0.28 4.1 0.39 3.8 0.38 4.4 0.23 0.2 0.3 VEX342-02 1/4 8.1 0.34 7.9 0.39 8.2 0.33 8.1 0.37 0.6 0.7 VEX342-03 3/8 12 0.26 12 0.29 12 0.28 13 0.28 0.6 0.7 VEX342-04 1/2 13 0.20 13 0.24 12 0.29 14 0.20 0.6 0.7 Base This is not a manual override.

VXA21/22

13 36 46 46 56 11.5 Dimensions (Orifice Size: 8 mm, 10 mm) VXA225/VXA226 Thread fixed: (VXA2262 0-04 only) 2-M5 x 0.8 depth 8 Dimension of view from A Pilot port Port size P Rc , With bracket E Port size View from A Model A B C D VXA22 52 60 02 03 VXA226 -04 2 0 1 4 3 8 22 28 11 14.5 67 73 77 83 27 30 1 2 Fixing with thread is also possible. 17-3-96 5 The VX series will be revised shortly

For post-stoppage positioning and locking

M8 x 1.25 thread depth 13 (External cover mounting screw) 4 x 11 10.5 (Clamp block mounting hole) 4 x 13 through 18 4 x 26 counterbore depth 9 2 x 8H7 +0.015 0 118 14 (Mounting hole) 500.03 32 25 15 44 140 20 35 10 18 18 82 10.5 (Fully open) 46 204 211 19 118 480 2 W-R1/W-R3 Series Specific Product Precautions Be sure to read this before handling the products.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Please consult with SMC when replacing seals and bearings (wear rings). 8-17-13

MHx-OMZ0005

No.MH*-OMZ0005 / / JMHZ2-16D-X7400B-(HC10/HC10DT)-(N/P) . 2 1. . 4 2. . 5 3. . 6 3-1. . 6 JMHZ2-16D-X7400B-HC10 . 6 JMHZ2-16D-X7400B-HC10DT . 6 3-2. . 7 3-3. . 8 3-4. . 9 3-5. . 10 JMHZ2-16D-X7400B-HC10-(*) . 10 JMHZ2-16D-X7400B-HC10DT-(*) . 11 3-6. . 12 3-7. . 13 JMHZ2-16D-X7400B-HC10-(*) . 13 JMHZ2-16D-X7400B-HC10DT-(*) . 13 4 . 14 4-1. . 14 4-2. 3 . 15 4-3. . 16 5. . 17 5-1

CYP

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Model Cushion stroke Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 13 14 Series CYP Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage. These instructions indicate the level of potential hazard by a label of "Caution", "Warning" or "Danger".

CYPSeries

E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port position "Nil".

CYPSeries

E 4H9 6H9 B 9.5 14 A 8 12 C 5.4 8.6 Model +0.030 0 +0.030 0 CYP15 CYP32 L 67 90 Z 118 155 Y 2.5 3.5 WB 17 27 WA 32 46 W 69 115 TB 18 22 TA 13 17 T 23 29 R 45 79.5 QW 48 87 N 4.5 7.5 Q 105 138 M 6 8 PB 60 100 MM M4 x 0.7 M6 x 1 PA 25 50 LW 69 115 P M5 x 0.8 Rc 1/8 LD 5.6 8.6 Model CYP15 CYP32 Note 1) These dimension drawings indicate the case of piping port position "Nil".

VCL

VA VCL40: 19/16 VA LVA VCL40: 13 VA Holding LVH Note 1) When the ambient temperature or fluid temperature is 60C or more, use high temperature specifications (class H coil).

air-filter-e

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

Air Preparation Equipment

Symbol Number of arranged elements 4 7 13 19 Number of arranged elements 30 36 55 83 04 07 13 19 30 36 55 83 Symbol Nominal filtration accuracy (m) Note) Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 Symbol Nominal filtration accuracy (m) 50 70 74 75 100 105 120 X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Element length Element length L250 L500 (L250 x 2) L750 (L250

AMD

O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151 166 173 200 253 63 76 76 90 90 106 106 122 160 20 20 20 20 20 20 20 20 20 63 76 76 90 90 106 106 122

Wireless System

End Plate (D side) p. 11 Dimensions p. 12 LED Display p. 15 Technical Data p. 22 Important p. 22 Safety Instructions Back Cover 6 Wireless System EX600-W Series RoHS How to Order EN W EX600 1 SI Unit Wireless compatible Output type Symbol Specifications 1 PNP 2 NPN SI unit Symbol Specifications Note EN Wireless master unit For EtherNet/IP SV Wireless slave unit Wireless master

STAINLESS STEEL CYLINDER

Store the product with the piston rod retracted and avoid humidity, in order to prevent generation of rust. 11 Caution 1.Internal lubricant or the base oil of grease may seep out of the cylinder depending on the operating conditions.

Step Motor Controller With Step data Teaching Function (Servo / 24VDC)

It will cause failure of the controller or its peripheral devices. (13) Do not use the product in an environment subject to a temperature cycle. It will cause failure of the controller or its peripheral devices. (14) Do not use in a place where surges are generated.

LG1H

Description Head cover Encoder cover Bumper End cover A End cover B Photo micro sensor Sensor plate Connector A Connector B Material Note 100W Ball screw/Slide screw 1 2 3 4 5 6 7 8 9 10 Material Note 11 12 13 14 15 16 17 18 19 Aluminum alloy Aluminum alloy IIR PC PC Aluminum alloy/Stainless steel Aluminum alloy Aluminum alloy Aluminum alloy Aluminum alloy 179 34 Series LG1H Construction

IR1000/2000/3000

P36201021 7 NBR Damper P36202026 P36202026 2.5 x 1 8 NBR O-ring 2 x 1.25 2 x 1.25 9 NBR O-ring 4.5 x 1 4.5 x 1 4.5 x 1 4.5 x 1 10 x 1.3 10 NBR O-ring 27.8 x 1.5 JISB2401 P11 JISB2401 P11 27.8 x 1.5 11 NBR O-ring JISB2401 P5 Note 2) JISB2401 P5 Note 2) 12 NBR O-ring JISB2401 P16 Note 2) JISB2401 P16 Note 2) 13 NBR Seal (A) P36203015 P36203015 14 NBR Seal (B) P36203016 P36203016

MHT2

11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32 40 50 63 2.7-6

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Output specification Port size: (inch) Symbol Nil 1 2 Specification Series PF2D300 Series PF2D200/300 Series PF2D300 Applicable display unit (monitor) model 11 13 19 3/8 1/2 3/4 PF2D504 PF2D520 PF2D540 Output for display unit Output for display unit + analog output (1 to 5 V) Output for display unit + analog output (4 to 20 mA) Specifications for Sensor Unit Model PF2D504 PF2D520 PF2D540

Air Cylinder CP Series Cylinder Positioner Assembly

2l 2.60 (66) s T o 6.61 (168) 1.38 {3s) 3.98 ( 1 0 1 ) 3.35 (85) 2.52 (s) 0 7 9 (20) (40) 0.39 ( 1 0 ) 0.67 ( 1 7 ) 0 2 8 t7l M l a x 1 5 1.22 ( 3 i ) 3.86 (98) 3.39 (86) 0.45 11 5) 0.59 (15) 1105) 2.32 (59) 5 . 1 2 1130) 2.24 (56) 6.73 (171) 2.O5 (52) 11.2) 2.60 (66) 7.05 (179) 5.12 l130) 2.99 (76) 6.30 tr60) 2.80 l71l 4.07 (205) 2.56 (65) 0.49 12 s) 3.15 (80) 8.43 (214) 1.57 (40) 4.69