SX

Connector block assembly (For 9 to 17 stations (T1) terminal block) t-6 SX5000-64-8A SX3000-64-8A M3 x 30 (Matt nickel plated) SX3000-22-2 (M2 x 24) SX5000-57-6 Round head combination screw y Gasket DIN rail SX3000-57-4 VZ1000-11-1u i Refer to page 1-6-77. Note) The numbers t1 to 4 are for 24 VDC. For 12 VDC, suffix -12V to the parts no.

1

New Products Guide 1 Directional Control Valves Actuators Vacuum Equipment CAT.E00-6A INDEX New Products Guide 1 Directional Control Valves 5 Port Solenoid Valve Fieldbus System (For Input/Output) 2/3 Port Mechanical Valve Series SY3000/5000/7000 Series EX600 Series VM100/200 P .6 P .264 P .322 Actuators Foot Pedal Type 5 Port Mechanical Valve XT34-60/67 Air Cylinder Air Cylinder Series CJ2

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Calculation example) T1 to T4 can be calculated as follows. L Speed: V [mm/s] a1 a2 T1 = V/a1 = 300/3000 = 0.1 [s], T3 = V/a2 = 300/3000 = 0.1 [s] Time T = T1 + T2 + T3 + T4 [s] [s] L 0.5 V (T1 + T3) V T1: Acceleration time and T3: Deceleration time can be found by the following equation.

Environment

L Speed: V [mm/s] Cycle time T can be found from the following equation. a1 a2 T = T1 + T2 + T3 + T4 [s] T1: Acceleration time and T3: Deceleration time can be obtained by the following equation. Time [s] T1 = V/a1 [s] T3 = V/a2 [s] T1 T2 T3 T4 T2: Constant speed time can be found from the following equation.

JXCx-OMT0034CN

STATION No (X10) 161 (x10) STATION No (X1) (x1) B RATE IF CC-Link F D C 10Mbps B 5Mbps A 2.5Mbps 230.4kbps 9 625kbps 8 156kbps 7 5 4 10Mbps 3 5Mbps 2 2.5Mbps 115.2kbps 1 625kbps 0 156kbps B RATE 1(LEC-T1)IF 115.2kbps 2 15 - 4.2 (CN2SW) CC-Link (CN2SW)CC-Link (CN2SW) () PC/TB (CN2)(LEC-T1-)(LEC-W2)(LEC) (CN2SW)CC-Link (LEC) 16 - 4.3 (LEC) (LEC)(LEC-T1-) (LEC-W2)(LEC) (LEC)(LEC)(

JXCx-OMT0032CN

)IF115.2kbps 2 4.2(CN2SW) TM (CN2SW) Deviceet TM(CN2SW) Deviceet () PC/TB(CN2)(LEC-T1-)(LEC-W2)(LEC) TM(LEC) (CN2SW)Deviceet 15 - 4.3(LEC) (LEC)(LEC-T1-) (LEC-W2)(LEC) (LEC)(LEC)(LEC-T1-) 4.3.1 ID 2(LEC)ID (LEC)IDID112 ID (LEC-W2) Normal Parameter Controller ID () Download (IDID ) 4.3.2 IF(LEC)(LEC-T1) IF115.2kbps (LEC-W2) Normal HELP-Password 16 - Para protectComm speed -1 Para protect

JXCx-OMT0028CN

-3G)(LEC-W2)(CN2SW)OFF (LEC-T1-3G)(LEC-W2) TB/PC (CN2) LED CN2 SW CN2STAT BUS STAT OFF (1) GW CN2 3m LEC-T1-3G (2) LEC-W2 USB CD GW 120.3 120.3 mm mm 200 200 mm/s mm/s USB 100 500 100 500 1 1 200 1000 200 1000 2 2 A-miniB type 50 200 50 200 3 3 CN2 CN2TB/PC 27 - 6.CN4 6.1 No.

VQ5000

IP65 compatible T1 S kit (With individual terminal blocks) kit (Serial transmission) Use as a guide for selection. Please confirm the actual conditions with SMC Sizing Program.

SY

(Max. 20 stations) Applies to 45T/T1 only. 24VDC only for type S.

HRL

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

Thermo-chiller

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation T1: Outlet Thermo-chiller temperature amount Customer equipment T = T2 T1 7325 [W] = 7.3 [kW]

Lightweight and Compact

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation amount T1: Outlet temperature Thermo-chiller Users equipment T = T2 T1 7325 [W] = 7.3 [kW] Cooling

HRS100/150

[W] = 7.3 [kW] T = T2 T1 Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] T1: Outlet temperature 118 Cooling Capacity Calculation HRS100/150 Series Required Cooling Capacity Calculation Example 3: When there is no heat generation, and when cooling the object below a certain temperature and period of time.

33

1400 [W] T = T2 T1 Cooling capacity = Considering a safety factor of 20%, 1400 [W] x 1.2 = 1680 [W] T1: Outlet temperature 207 HRSE Series Required Cooling Capacity Calculation Example 3: When there is no heat generation, and when cooling the object below a certain temperature and period of time.

energy saving effect

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 70 x 4.186 x 103 x 4.0 60 = = qm x C x (T2 T1) 860 Q = = 19535 [J/s] 19535 [W] = 19.5 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 19.5 [kW] x 1.2 = 23.4 [kW] 1 x 70 x 60 x 1.0 x 103 x 4.0 860 = Thermo-chiller T1: Outlet temperature Q: Heat generation amount 1680 [cal/h] 860 Users equipment = T = T2 T1

53

Q = qm x C x (T2 T1) x qv x C x iT 60 1 x 35 x 4.186 x 103 x 3.0 60 = = qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x iT 860 = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Q: Heat generation amount T1: Outlet temperature Thermo-chiller Users equipment 7325 [W] = 7.3 [kW] T = T2 T1 Cooling

Thermo-chiller

[W] = 7.3 [kW] T = T2 T1 Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 8.8 [kW] T1: Outlet temperature 23 Cooing Capacity Calculation Series HRS100/150 Required Cooling Capacity Calculation Example 3: When there is no heat generation, and when cooling the object below a certain temperature and period of time.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Mark: 45T and T1 only S type is available for 24 VDC only. Nil CE-compliant CE-compliant X90 Main valve fluoro rubber (Refer to page 332.)

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

Vacuum Pad

-A5 V V ZP3PA-T1-AG1 V V ZP3PA-T2-A12 V V ZP3PA-T2-AG2 V V ZP3PA-T2-AG3 V V p. 11 w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions w T male thread adapter assembly w T female thread adapter ZP3PA-T1-B5 V V ZP3PA-T2-B8 V V p. 11 q Pad unit Dimensions Part no.