Possible to transfer a workpiece at low-speed.

End of rotation Rotation starting point 5 5 5 5 5 e R g ot n End of rotation B ra at n io n io ra at n ot 5 g e R A B R o 5 t a 5 ti o n B r Rotation starting point a End of rotation n g e 5 5 5 A A Rotation starting point The figure shows the view from the long shaft end. The figure shows the view from the long shaft end. The figure shows the view from the long shaft end.

Cylinder with Lock

D-Z7m D-Z8m D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-F5m D-J59 D-F59F D-F5NT D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P3DWA D-P4DW Bore size A B A B A B A B A B A B A B A B A B A B 32 10 8 6 4 6.5 4.5 11.5 9.5 0 0 4 2 0 0 3.5 1.5 5.5 3.5 3 1 40 9 9 5 5 5.5 5.5 10.5 10.5 0 0 3 3 0 0 2.5 2.5 4.5 4.5 2 2 50 10 9 6 5 6.5 5.5 11.5 10.5 0 0 4 3 0 0 3.5 2.5 5.5 4.5 3 2 63 10

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Connection threads Rc/NPT Model L1 L2 H G F M N E B Applicable tubing O.D.

CM2

D-H7BAL D-H7NF D-C7 D-C80 D-H7 D-H7W D-H7BAL D-H7NF Auto switch D-A3A D-G39A D-K39A D-A44A D-C7 D-C80 D-C73C D-C80C D-A3A D-G39A D-K39A D-A44A model Data D-C73C D-C80C D-B5 D-B6 D-B59W D-G5NTL Bore size A 1() 1() 2(0) 7 B 0() 0() 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 B 5(3) 5(3) 6(4) 11 Hs 22.5 25 28.5 32.5 A 7(5) 7(5) 8(6) 13 A Hs 25 27.5 31 35 B 6(4) 6(4) 7(5) 12 Hs 60 62.5

Integrated Controller

parallel motor B B-B B Component Parts Component Parts (Right/Left side parallel only) No.

Process Pump

B Control unit Diaphragm B Diaphragm A 1.

MXS

7 2 12 6.6 11 12 A B 34 16 34 16 H Cross section AA Cross section BB (NN-1) X H G (mm) Refer to "Dimensions" of MXS25 on p.3.11-23 for one with shock absorber as symmetric.

CLQ

Bore size (mm) 2-6.6 A + Stroke B + Stroke L G 8 FZ FX B A A B 5 to 50 5 to 50 29.5 32.5 69 76.5 19.5 22.5 59 66.5 20 25 Bore size (mm) FZ FX FV G L L1 S Rod end nut 60 64 27 31 48 52 39 42 4.5 5 18.5 22.5 40.7 44.2 20 25 L1 Double clevis type: CLQD/CDLQD CD hole H10 Shaft d9 4-M5 x 0.8 Cap bolt Double clevis type (mm) S Stroke range Without auto switch With auto switch Bore size (mm) A

VQ4000

SMC SMC SMC SMC B A 2 4 L2 L1 A B A B 4 B A Indicator light 2 4 A B A B 3 B A 2 4 B A A 2 A 44 P = 25 P = 25 50.5 2 4 B A A 1 A 4 2 D side Stations 38 26.5 2-Rc 1/8 (External pilot port) R4.5 91 12 140 (Single) 16.5 149 (Double) 43.5 50.5 163 (3 position) 59 96.5 Note) In the case of EX124 for SI unit, conduit port (G 1/2) will be 4 locations.

Compact Cylinder with Lock Series CLQ

Bore size (mm) 2-6.6 A + Stroke B + Stroke L G 8 FZ FX B A A B 5 to 50 5 to 50 29.5 32.5 69 76.5 19.5 22.5 59 66.5 20 25 Bore size (mm) FZ FX FV G L L1 S Rod end nut 60 64 27 31 48 52 39 42 4.5 5 18.5 22.5 40.7 44.2 20 25 L1 Double clevis type: CLQD/CDLQD CD hole H10 Shaft d9 4-M5 x 0.8 Cap bolt Double clevis type (mm) S Stroke range Without auto switch With auto switch Bore size (mm) A

Vacuum Unit

V port type A C Metric size 06 6 8.25 4 08 8 11.4 6 Inch size 07 1/4" 9.7 4.76 09 5/16" 11.4 6 PV port type B Metric size 06 6 9.7 Inch size 07 1/4" 12.3 For screwdriver operation type long lock nut For high-noise reduction silencer exhaust K R A B G ZK2 m mmLA-m A to J E Exhaust port Manual override (Supply valve) 33.5 6 Long lock nut Vacuum break flow adjusting needle G Ejector system,

MY1

2-H E E F A B C D Side support B MY-SB 2-J 2-H C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 G 6.5 8 9.5 11 A 61 67 81 100 120 142 172 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80 MY-S40A

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G RE A B REC CX D E CY H1 MQQ M AL B1 K A N F N B C M S + Stroke H RHC ZZ + Stroke MK(2) RS Q G (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to 500 Up to 600 Up to 600 Up to 700 Up to 700 RS H A B C A AL B1 D E F G H H1 J K KA M MM N P S ZZ 30 35 35 40 40 27 32 32 37 37 60 70 85 102 116 22 27 27 32 41 44 52 64 78 92

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

Basic style: CA2YB 4-J 2-P (Rc, NPT, G) MM Width across flats KA G G RE A B REC CX D E CY H1 MQQ M AL Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com B1 K A N F N B C M S + Stroke H RHC ZZ + Stroke MK(2) RS Q G (mm) Bore size (mm) 40 50 63 80 100 Stroke range Up to

ZPT/ZPX

Hexagon width across flats 24 25 G Width across flats 37 45 45 4-M4 x 0.7 4-M4 x 0.7 E 10 10 G Width across flats 37 F F E Y Y 8 8 34 34 C C A A B D B D Dimensions Dimensions (mm) (mm) Model Model B A B C D E F G Y A C D E F G Y ZPT63HB-A16 ZPT63HB-B8 63 65.1 45.5 67.6 31.5 43 73 21.5 M8 x 1.25 ZPT80HB-A16 -B10 80 83 58.4 85.1 37 48.5 78.5 27.5 M10 x 1.5 63 65.1 45.5 67.6 31.5 43 21.5 -B12

5 Port Air Operated Valve Series SYA3000/5000/7000 1

(For details, refer Best Pneumatics Vol. 1.) 5-2-4 3 5 Port Air Operated Valve Series SYA3000/5000/7000 Flow Characteristics/Weight Model/Series SYA320 (Body ported) Port size Flow characteristics Weight (g) Pilot port size (Nominal size) Valve model Type of actuation C (dm3/(sbar)) b Cv C (dm3/(sbar)) b 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Cv P, EA, EB A, B 35 37 Single Double 2 position

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

[46] [54.5] 22.5 1 4.1 32 5.5 P B B B B B B 4.7 35 44.4 <45.1> 10.2 23.5 26 3 R A A A A A A DIN rail (VZ1000-11-1-) G: Approx. 300 H: Approx. 600 [46] [54.5] ( ) lead wire length ( ) lead wire length DIN rail holding screw (Voltage rating indication) 33.2 (Port M5) (Pitch) P = 10.5 13.5 24.3 2n2-One-touch fitting (ports A, B) Applicable tube O.D.: 4 6 L2 [rail mounting hole pitch 12.5] (

KR

H (width across flats) Applicable tubing Port B Min. bore Weight (g) O.D.

SZ3000

2 B 2 B 2 B 2 B 2 R 3 B 2 B 2 B 2 B 2 PE R 3 B 2 R 3 R 3 SY A 4 A 4 A 4 A 4 A 4 P 1 P 1 A 4 A 4 A 4 A 4 X P 1 P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 2One-touch fitting (X, PE ports) Applicable tubing O.D.: 6 2n1-M5 x 0.8 [4(A), 2(B) port] SYJ Applicable tubing O.D.: 4 6 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-

ISO Standard Hydraulic Cylinder

CHSD40-PS CHSD50-PS CHSD63-PS CHSD80-PS CHSD100-PS Seal kit consists of items @1 to @5 and @9, and can be ordered by using the seal kit number for each bore size. 335 CHSD Series Dimensions Basic: CHSDB Z + Stroke PJ + Stroke Y GB GA J MM 2 x RcP V V D E MA K F G NA Cushion valve M B C A SS NB Air release S + Stroke H ZZ + Stroke Stroke range Bore size (mm) MM A B MA V C D PJ F G NB SS GA