Override: Non-locking Push Style, Vacuum Switch Model: E55 (1 Output w/o Analog Output, 200° Setting, PNP Output), Vacuum Switch Electrical Entry: C (Connector Lead Wire Length 0.6m), Release Flow Rate Adjusting Needle: L (With Lock Nut), Made to Order: None, CE Compliant: Q (CE compliant)

Override: Non-locking Push Style, Vacuum Switch Model: E55 (1 Output w/o Analog Output, 200° Setting, PNP Output), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: Without Lock Nut, Made to Order: None, CE Compliant: Q (CE compliant)

Override: Non-locking Push Style, Vacuum Switch Model: E55 (1 Output w/o Analog Output, 200° Setting, PNP Output), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: Without Lock Nut, Made to Order: None, CE Compliant: Q (CE compliant)

Override: Non-locking Push Style, Vacuum Switch Model: E55 (1 Output w/o Analog Output, 200° Setting, PNP Output), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: Without Lock Nut, Made to Order: None, CE Compliant: Q (CE compliant)

: Non-locking Push Style, Vacuum Switch Model: E55 (1 Output w/o Analog Output, 200° Setting, PNP Output), Vacuum Switch Electrical Entry: C (Connector Lead Wire Length 0.6m), Release Flow Rate Adjusting Needle: L (With Lock Nut), Made to Order: None, CE Compliant: Q (CE compliant)

Override: Non-locking Push Style, Vacuum Switch Model: E55 (1 Output w/o Analog Output, 200° Setting, PNP Output), Vacuum Switch Electrical Entry: C (Connector Lead Wire Length 0.6m), Release Flow Rate Adjusting Needle: L (With Lock Nut), Made to Order: None, CE Compliant: Q (CE compliant)

50～, Suction Flow(l/min): 15, Body Material: Aluminum, Nozzle Diameter: 0.5mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: L-type plug connector, without connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Manual: Non-locking push type, Vacuum switch type: 1 output, without analog, 200° setting, PNP

50～, Suction Flow(l/min): 30, Body Material: Aluminum, Nozzle Diameter: 0.7mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: L-type plug connector, without connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Manual: Non-locking push type, Vacuum switch type: 1 output, without analog, 200° setting, PNP

l/min): 30, Body Material: Aluminum, Nozzle Diameter: 0.7mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: L-type plug connector, without connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Manual: Non-locking push type, Vacuum switch type: 1 output, without analog, 200° setting, PNP output (ZSE1),

50～, Suction Flow(l/min): 50, Body Material: Aluminum, Nozzle Diameter: 1.0mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: L-type plug connector, without connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Manual: Non-locking push type, Vacuum switch type: 1 output, without analog, 200° setting, PNP

50～, Suction Flow(l/min): 66, Body Material: Aluminum, Nozzle Diameter: [Others] 1.3mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: L-type plug connector, without connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Manual: Non-locking push type, Vacuum switch type: 1 output, without analog, 200° setting

l/min): 66, Body Material: Aluminum, Nozzle Diameter: [Others] 1.3mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: L-type plug connector, without connector, Light/surge voltage suppressor: With light/surge voltage suppressor, Manual: Non-locking push type, Vacuum switch type: 1 output, without analog, 200° setting, PNP output

Nozzle Diameter: ø1.3, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: Rc, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking

Nozzle Diameter: ø0.7, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: G, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push

Nozzle Diameter: ø1.3, Body Style: Single Unit w/Valve + Standard Silencer, Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: 0.5 MPa, Thread Type: G, Supply/Release Valve: Supply Valve+Release Valve, Solenoid Valve Rated Voltage: 24VDC, Electrical Entry: L Plug w/o Connector, Light/Surge Voltage Suppressor: w/Light/Surge Voltage Suppressor, Manual Override: Non-locking Push

CUJ

Auto switch CUJ cylinder Cylinder B Cylinder A Auto switch Magnetic substance Non-magnetic spacer of 2.5 mm or more Without Shielding Plate d Bore (mm) 10 L 6 8 L d 19 6 19 6 19.5 6 The space can be reduced by attaching shielding plates (steel plates 0.2 to 0.3 mm thick) to the sides of the cylinders facing each other.

Speed Controller with Uni One-touch Fitting AS Series

rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations 631 AS Series Construction/Component Parts Elbow type Meter-out type Universal type Meter-out type !

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

AS-FPQ/FPG

AS121FP-M5 AS221FP-01 AS221FP-02 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 08,10 06,08 06 04 04 Number of needle rotations Number of needle rotations Number of needle rotations AS321FP-03 AS421FP-04 Upstream pressure: 0.5 MPa Upstream pressure: 0.5 MPa 12 10 Flow rate (L/min (ANR