Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: Female Thread, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Wedge Cam Operation Provides

M5 X 0.8 (Finger opening port) 22.5 2.3 2.4-13 Series MHK2 Dimensions MHK2-20l /Standard model 18.6 20 2-M5 X 0.8 thread depth 8 (Mounting thread) 4H9 depth 4 +0.030 0 21H9 depth 1.5 +0.052 0 2-M5 X 0.8 thread depth 10 (Mounting thread) 4-M5 X 0.8 thread depth 10 (Mounting thread) Bottom hole 4.3 through (Mounting hole) 0 -0.1 8 Open 26 +1.2 0 5 16 0.02 13 . 5 42 30 60 58 32 0 -0.2 29 Closed

Clean Air Module

Real-time switch output Hysteresis mode ON Flow rate conversion YES OFF P-1 P-2 Normal condition {0C, 101.3 kPa, Dry air} or standard condition (ANR) {20C, 101.3 kPa, 65% RH} can be selected.

Heavy Duty Stopper Cylinder Series RSH/RS1H

Caution Operation instructions Consult P/A when using solvents other than water.

Single Axis Electric Actuator Series LJ1H

Consult P/A.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: ø6 One-touch Fitting, Straight Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

IDX-OM-U021

1.6MPa 1-2-4 P 1-2-5 R 30A (IDF100F, IDF125F, IDF150F) 30Ma 1-2-6 V ON 1.5 OFF 0.5 1-2-7 3 2 1 1-2 IDF100150F 1 2 IDX-OM-U021 1 1-3 A 3 300 A 1-3 IDF100150F 1 3 IDX-OM-U021 1 B V IDF100F V IDF125F V IDF150F B 1-3 IDF100150F 1 4 IDX-OM-U021 1 3.6 5.2 (IDF100F, 125F) R OFF 5.2 L1 L2 L3 M5 9.5mm 3.5mm 2 1,2 3,4 5,6 L1,L2,L3 PE: L1 L2 L3 PE 1 2 3 4 5 6 M4 9.5mm

LFE-OMY0008

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Serial Transmission System Series EX250 Series EX500

Seal 0 1 Metal seal Rubber seal 12 SI unit Serial Unit (SI Unit) Dimensions/EX250 DeviceNet PROFIBUS-DP CC-Link SI SI SI PW PW(V) RUN PWR(V) MOD/NET PWR(V) PWR STATION NO.

VXR21/22/23

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

180
Angular Style Air Gripper Series MHY2/MHW2 Cam Style Rack & Pinion Style 1

24 V 3-wire (NPN) Y7NWV Y7NW IC circuit 5 V 12 V Diagnosis (2-color indication) 3-wire (PNP) Y7PWV Y7PW IC circuit 12 V 2-wire Y7BWV Y7BW Lead wire length symbols: 0.5 m Nil (Example) Y59A 3 m L (Example) Y59AL 5 m Z (Example) Y59AZ Auto switches marked with a symbol are produced upon receipt of order.