Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: C6L (ø6 One-touch Fitting, Elbow Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Micro Mechanical Valve Series VM1000

(Total Travel) 3 P .T.

LFE-OMY0008

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(A) 2 1 (P) 3 (R) Rubber seal type VQZ200 300 / Metal seal type 3 2 1 3 2 1 N.C. N.C. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) 3 2 1 3 2 1 N.O. (A) 2 N.O. (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Parts list No.

VXR21/22/23

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

FGX-OM-L011

L-27S SUS316 U-8SU-9SU-10S SUS304 SUS304 J-4S SUS316 AL-25S NBR O AL-22S FKM CY-27S SUS304/SWCH SUS304 SUS304 SS400 BH-73S BH-77S 5/8 FGX-OM-L011 2 2. 0.7MPa 80 27L,43L,52L 19.5kg,23kg,30kg 0.1MPa 3 M12 23 4 1 V 2 6 [] 23 6/8 FGX-OM-L011 5 1 INLETOUTLET O (1)(2) (2) AL-25S(:NBR) AL-22S(:FKM) (1) 2 3 23 7/8 FGX-OM-L011 4 O O 1 2 (1) (2) 5 (a)(b) V [(c)] [(c)] O 1 V V

System: P (Vacuum Pump System, Single Unit), Valves: J (Supply Valve; N.C., Release Valve; None), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor, 0 to -101, Analog Output 1 to 5 V), Connector: L1 (L-type Plug Connector Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit, (Mounting Screw Attached

System: P (Vacuum Pump System, Single Unit), Valves: J (Supply Valve; N.C., Release Valve; None), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor, 0 to -101, Analog Output 1 to 5 V), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit

System: P (Vacuum Pump System, Single Unit), Valves: J (Supply Valve; N.C., Release Valve; None), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor, 0 to -101, Analog Output 1 to 5 V), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 07 (Inch Size, ø1/4" One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit

System: P (Vacuum Pump System, Single Unit), Valves: K (Supply Valve; N.C., Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor, 0 to -101, Analog Output 1 to 5 V), Connector: L (L-type Plug Connector, Lead Wire w/Connector & Lead Wire for Pressure Switch), Vacuum, V Port: 06 (Metric Size, ø6 One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit

System: P (Vacuum Pump System, Single Unit), Valves: R (Supply Valve; Self-holding, Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: P (Pressure Sensor, 0 to -101, Analog Output 1 to 5 V), Connector: L1 (L-type Plug Connector Lead Wire for Pressure Switch), Vacuum, V Port: 09 (Inch Size, ø5/16" One-touch Fitting), Bracket: B [One Bracket for Mounting Single Unit, (Mounting

PFMB.eng

NOTE [ on] Display ON [F80] [ dSP] Display OFF mode [F81] [P in] Security code [oFF] Not used The direct current power supply used should be UL approved as follows. Circuit (class 2) of maximum 30 Vrms (42.4 V peak) or less, with UL 1310 class 2 power supply unit or UL 1585 class 2 transformer. The product is a UL approved product only if it has a mark on the body.

AMR3000 to 6000

N Bracket dimensions With auto-drain Model Port size A B C D E F G H J K L M U (Body) V (Adapter) L 178 211 277 321 B 260 298 366 436 T 9 9 11 11 S 8 16 21 26 R 78 97 98 115 P 50 35 45 46.5 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 1/4, 3/8 1/4, 3/8, 1/2 1/2, 3/4 3/4, 1 AMR3000 AMR4000 AMR5000 AMR6000 100 120 130 160 180 210 246 290 264 302 370 440 10 10 45 70 101 121 131 161 51 61 66 81 28

Profi-E

M ast er Pow er SU P. ( D C24V) PRO FI BU SD P Sl ave1 O t her D P equi pm ent Sl ave2 O t her D P equi pm ent The pressure proportional to the signal on the second side is obtained.

Microspeed Cylinder

Vertical actuation I II P W A P a (b) (a) P P a A W (1) Basically adjusted with meter-out control. When meter-in control is also used, lurching is reduced. (1) Basically adjusted with meter-out control.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 M2 Weight (g) ASV310F-N01-07 ASV310F-N01-09 ASV310F-N02-07 ASV310F-N02-09 ASV410F-N01-09 ASV410F-N01-11 ASV410F-N02-09 ASV410F-N02-11 ASV410F-N03-09 ASV410F-N03-11 ASV510F-N02-11 ASV510F-N02-13 ASV510F-N03-11 ASV510F-N03-13 ASV510F-N04-11 ASV510F-N04-13 73 73.8 73 73.8 83.1 85.2 83.1 85.2 83.1 85.2 90.2 91.9 90.2 91.9 90.2 91.9 17.2 19.3 17.2 19.3 19.3 23.3 19.3 23.3 19.3 23.3 23.3 26.5

NAMUR

) NPT Nil F N Voltage Manual override/Classification C F H J P V Y Z 9 1 2 3 4 5 6 7 8 A B 115 VAC, 50/60 Hz 32 VAC, 50/60 Hz 42 VAC, 50/60 Hz 230 VAC, 50/60 Hz 100 VDC 6 VDC 48 VDC 110 VDC Other voltages 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 to 120 VAC, 50/60 Hz 220 VAC, 50/60 Hz 24 VDC 12 VDC 240 VAC, 50/60 Hz 48 VAC, 50/60 Hz 12 VAC, 50/60 Hz 24 VAC, 50/60 Hz Electrical entry Non-locking

Stations: 10 (Stations), Wiring: F (D-sub Connector), Manifold Options: B (with DIN Rail Mounting Bracket), Exhaust: F (Individual Port Exhaust), Pressure Switch for Vacuum/Pressure Sensor: P (Pressure Sensor, 0 to -101, Analog Output 1 to 5 V), Leadwire: Y (2m Switch/Sensor Only), Unit Options: J (Vacuum Break Flow Adjusting Needle, Round Lock Nut), 1st Nominal Nozzle Size: 1 (ø0.7), 1st