SMC Corporation of America
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Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A1 (Bracket A, Vertical Mounting)

Output Specification: X (NPN Open Collector 2 Outputs + Copy Function), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 01 (R 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Applicable tubing O.D. 6 10.4 9.7 L1 L2 13.3 12 13.3 2 x Connection thread Rc1/8 13.3 12 L1 One-touch Connection Screw-in Connection Model L1 L2 ZU05mA 52 25.4 ZU07mA 59 32.4 Model L1 ZU05mA01 67.2 ZU07mA01 74.2 2 These safety instructions are intended to prevent hazardous situations and/or equipment damage.

in 24 variations Available in 24 variations Digital flow switch Regulator Regulator + Pressure outlet port ON/OFF valve Restrictor Filter Regulator + Filter Digital flow switch + Regulator + ON/OFF valve + Filter Regulator + ON/OFF valve + Restrictor + Filter LLB4 Flow range: 50 to 500 L/min (ANR) LLB3 Flow range: 5 to 100 L/min (ANR) Related Equipment Pressure gauge for clean room G46-4-01

Model: T (Male Branch Tee, Union Tee), Applicable Tube O.D. x I.D.: 0403 (Ø4 x Ø3), Port Size for Tubing O.D.: 01 (Rc1/8 Thread Connection)

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 XL-OMY0002 / 1 1.5 *3) 3)1 1 () 3 XL-OMY0002 1 &/ 1.52 2 ( ) 5 5 P-01

(2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series). Having the amplifier built into the electro-pneumatic pilot valve, only an external (24V DC) power supply and (1 to 5V DC) signal voltage need to be connected making handling simple.

(2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series). Having the amplifier built into the electro-pneumatic pilot valve, only an external (24V DC) power supply and (1 to 5V DC) signal voltage need to be connected making handling simple.

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

A maximum effective area of 670mm (2B) can be covered by the combination of an ultra-compact electro-pneumatic pilot valve (22.4 X 30 X 39) and a 3 port, high-capacity exhaust main regulator (VEX1*00 series).

Conversion example for a 8[mm] lead actuator driven at an acceleration of 3000 [mm/sec2] Acceleration/Deceleration time constant (ms) = {3000 (r/min) 60 (S) } 8 (mm) 1000 3000 (mm/s2) Rated Motor Rotation Speed (mm/s) Acceleration time constant/deceleration time constant (ms) = {Rated rotation speed (r/min) 60 (S) } x screw lead (mm) x 1000 Acceleration/deceleration speed (mm/s2) *Note)

Conversion example for a 8[mm] lead actuator driven at an acceleration of 3000 [mm/sec2] Acceleration/Deceleration time constant (ms) = {3000 (r/min) 60 (S) } 8 (mm) 1000 3000 (mm/s2) Rated Motor Rotation Speed (mm/s) Acceleration time constant/deceleration time constant (ms) = {Rated rotation speed (r/min) 60 (S) } x screw lead (mm) x 1000 Acceleration/deceleration speed (mm/s2) *Note)

() (R) () (PE) -14No.VFR2000-OMM0001 NO 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7