Compact manifold regulator ARM5 Series Panel cut dimension 2 x 3.2 16.5 14.5 11 8.2 20 2 x 3.2 2 x 3.2 M3 thread hole 8.2 8.2 P U P S U H S H L O L C O K C K R V R S W V X S W T 19 T X 19 L2=50+T+X L2=50+T+X L1=50+R+V 14 L1=50+R+V 14 Pressure gauge (Accessory) 50 Pressure gauge (Accessory) 50 55 (at knob locked) 55 (at knob locked) IN OUT IN OUT 41.5 43.5 U Y 4 25 6 25 U Y 14 14 SMC SMC 2 x 3.2 2 x 3.2 42 42 IN side OUT side IN
J K KA MM NA PG PH PL S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x
S TA TB TC WA WB WH WW XA XB P 30 M5 x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 141 (149) 11 11 88 15 (16) 23 5.5 3 12 30 M6 x 0.75 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 151 (159) 11 11 98 15 (16) 25 6 3 12 25 M8 x 1.0 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc 1/8 26.5 2.5 73 154 (162) 11 10 (11) 99 15 (16) 28.5 6 3 12 20 M10 x 1.25 M6 x 1 depth 12
M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm J D side G1/4 port part Tightening torque: 10 1 Nm K G e w q Note) H r q w e Note) e w q Note) F q w E C A U side B D M5 x 20 Hexagon socket head cap screw Tightening torque: 3.5 0.5 Nm Block Assembly C: 2 port valve manifold block assembly Manifold block assembly for gate valve D: 3 port valve manifold block assembly
Buffer assembly part no. q ZPB2J10-B5 [Weight: 21.8 g] Buffer assembly part no. q ZPB2K10-B5 [Weight: 23.6 g] w ZPB2J20-B5 [Weight: 35.9 g] w ZPB2K20-B5 [Weight: 36.9 g] Width across flats 8 M5 x 0.8 Width across flats 8 M5 x 0.8 Width across flats 14 Width across flats 14 5 5 3 3 3 3 D A B 4 D A B M10 x 1 M10 x 1 Gasket (t = 0.5) Gasket (t = 0.5) 2 M5 x 0.8 2.5 M5 x 0.8 4 Dimensions Dimensions
Refer to gauge guide (P.94,95). t t r Sample Order Number Port w w w q q q t AK1002S e q 4 4 4 4 4 w 4 4 4 4 4 r 2P 3P 4P 4PL 5PC 2P 3P 4P Pressure gauge unit 2) MPA MPA MPA MPA V3 V3 V3 V3 t r t 1 Unit psig/bar MPa Code 0 0 No code MPA 1 w w q q 2) Pressure gauge unit MPa or psig/bar selectable.
A B C 50 56 72 82 98 106 130 142 180 210 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 8 10 12 15 18 18 22 22 28 33 12 16 20 25 32 40 50 63 80 100 M4 x 0.7 D By-pass port dia. M5 x 0.8 M5 x 0.8 C 0.2 M6 x 1.0 [Bottom mount] M8 x 1.25 B 0.2 B Pin hole M8 x 1.25 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2.0 A 0.2 3.
, Spring extend: CVM3L T Bore size Stroke RS Q G RS H A H + Stroke RZQ MI W S CEP1 Z + Stroke ZZ + 2 x stroke CE1 CE2 ML2B Bore size (mm) B2 MM LZ LY LX LT LH LD H1 B1 LC H B K F AL NA H2 I D A N 20 25 32 40 26 M8 x 1.25 55 70.5 40 3.2 25 6.8 4 41 40 5 13 15.5 24 28 8 18 15 13 5 8 C J G5-S 32 M10 x 1.25 55 76.5 40 3.2 28 6.8 4 45 47 5.5 13 19.5 30 33.5 10 22 15 17 6 8 32 M10 x 1.25 55 78.8
(2 position) Twist Selector (3 position) Foot Pedal Push-Pull P3.5-7 P.3.5-11 P3.5-19 Effective Area (Cv) Number of Ports 1 (0.055) 2, 3 Poppet 2.5 (0.14) 2, 3 19 (1) 2, 3 Poppet Poppet Function 3.5-1 Series VM Mechanical Valve SlA VlA VM400 VZM500 VZM400 VFM300 VFM200 VM800 21 X 35 X 53 18 X 28 X 87 18 X 30 X 91 26 X 35 X 94 23 X 40 X 115 30 X 40 X 57 SlA VlA VM/VR VH Roller Lever Adjustable
B + Stroke L K Auto switch 2 x 4 x M6 x 1.0 effective depth 10 A + Stroke M W Rod end male thread MM H1 Width across flats B1 C1 X L1 Rod End Male Thread mm Bore size (mm) MM H1 B1 C1 X L1 20 25 18.5 13 5 12 14 M8 x 1.25 22.5 17 6 15 17.5 M10 x 1.25 Basic Style mm A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21
0.8 Port size M5 x 0.8 1/8 P, R port A, B port M3 x 0.5 M5 x 0.8, C4 (One-touch fitting for 4) Flow Characteristics Flow characteristics Port size 14/2 (PA/B) 4/25/3 (A/BR) Effective area (mm2) C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 1(P), 5/3(R) Port 2(B), 4(A) Port Manifold Body ported for internal pilot Type SS5YJ3-20 SYJ32 M5 x 0.8 M3 x 0.5 0.9 31 S31 Type SS5YJ3SYJ33 M5 x 0.8 M3 x
Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System Solenoid valve Speed controller Tubing diameter x Length Silencer A B C D E F G H I J K 10 x 1 m 12 x 1 m 12 x 1 m SGP15A x 1 m SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m VEX VEX3 2-02 1 2 AS4000-02 AN200-02 AS420-03 AS420-04 AS420-04 AS500-06
23 55 53 28 M8 x 1.25 10 86 6.9 9.5 16 PA Bore size (mm) M MM (N) (NA) NN PB PW Q QW RB RW S T U W X Y Z 12 M4 x 0.7 M8 x 1.0 6 8 27 30 60 80 85 26 RB0806 17.5 96 13 1 77 22 7.5 5 16 M5 x 0.8 M8 x 1.0 8 8 27 45 70 95 90 40 RB0806 15 103 13 2 92 22 7.5 5 20 M6 x 1 M10 x 1.0 10 10 29 60 100 120 105 46 RB1007 26 122 17 2 117 29.5 9 5.5 25 M6 x 1 M14 x 1.5 10 12 50 60 100 130 105 50 RB1411
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 125L x 150L x 175L x 200L x 225L x 250L CQ-M12 x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 155L x 180L x 205L x 230L x 255L CQ-M14 x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 135L x 140L x 145L x 170L x 195L x 220L x 245L x 270L CQ-M16 x 120L x 125L x 130L x 135L x 140L x 145L x 150L x 155L x 160L x
e Drain cock with barb fitting: 6 x 4 nylon tube W AC25 to 60 q w Note 3) Name plate, caution plate for bowl, and pressure gauge in imperial units (PSI, F) q w Z AC10 to 60 w q e When more than one specification is required, indicate in ascending alphanumeric order.
Stations (mm) 1 85 104 2 118 137 3 151 170 4 184 203 5 217 236 6 Symbol L1 52 71 L2 964 Large Size Vacuum Module: Ejector System Series ZR Circuit diagram ZA Individual spacer ZR1-R1-4 ZX PS EXH PD PV Function plate ZR1-RV1-4 ZR PE PS X X X ZM X X Silencer SOL.C Pressure switch for vacuum ZMA SOL.B SOL.A X PV PD X X ZQ Ejector X X Suction filter Release valve ZH Supply valve V ZU X X PE PS
R/W detection/ R/W no-detection button When the NFC reader/writer (R/W) is inserted into the USB port of the PC and the PC detects the NFC reader and writer, "R/W detected" is displayed. When the PC cannot detect it, "R/W undetected" is displayed.
2 14.5 x 10.5 x 2 11.5 x 8.5 x 1.5 Valve O-ring NBR y 2 2 Bracket A Bracket B Hex. socket head cap screw Bracket assembly 1 set 2 136312 136412 JIS B 2401 P5 JIS B 2401 P3 O-ring NBR u !3 35 x 31 x 2 28 x 25 x 1.5 O-ring NBR i How to order (1) When adding n stations to ARM Regulator n pcs.