VFR3000-OMJ0001

B-+COM-COM 1.25-31.25-3S1.25Y-3N1.25Y-3S G DC ++(-) DIN 2 1 SOLA 1 A B B + SOLB 2 3 COM B (COM) A DC AC A B + + + + A B 70 8 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 2 2 2 2 3 3 3 3 (A,B) ( ( ( (VFR3 VFR3 VFR3 VFR3 00 00 00 00) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 10 10 10 10) ) ) ) ( ( ( (VFR3 VFR3 VFR3 VFR3 40) 40) 40) 40) VFR3 VFR3 VFR3 VFR3

Digital Flow Switches

Connector pin numbers 2 1 (43.5) 4 3 A B Pin no. 1 2 3 4 Output specification Pin description DC(+) NC/Analog output DC() OUT A Pulse output only 42 62 52 Pulse output + Analog output 72 Flow direction 18 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 (43.5) A A B Output specification 63 Pulse output only 77 73 87 Pulse

3 Port Solenoid Valve

2 3 Port size Symbol Nil M3 M5 Sub-plate Without sub-plate With sub-plate S070 B 5 B G Base Mounted S070 C 5 B G 32 Body Ported Body type Body type Body ported Symbol C Port size Symbol 32 Connection Barb fitting Applicable tubing 3.18/2 Coil voltage 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Electrical entry G Grommet C Plug lead with light/ surge voltage suppressor Power consumption Pressure

Power Valve: Economy Valve Series VEX5

They conform to JIS B 8372 (Air pressure regulator).

Series MSQ 11- Rack & Pinion Type Rotary Table 22- Size: 1, 2, 3, 7, 10, 20, 30, 50

Reed switch Auto switch A90 Solid state M9B, M9N, F8B, F8N Size: 10, 20, 30, 50 11 Vacuum suction type Clean series 10 Size 20 30 50 11 MSQ B 10 A M9B 22 MSQ B 10 A M9B Number of auto switches A High precision type B Basic type Nil S n 2 pcs. 1 pc. n pcs.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

02-mgp-e

MGP20-B-PS 20 25 32 40 50 63 80 100 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS MGP63-B-PS MGP80-B-PS MGP100-B-PS @4 @5 @6 @7 #5 #6 $4 $5 Piston seal NBR MGP25-B-PS Set of left nos. @4, @5, @6, @7, #5, $4, $5 Rod seal NBR MGP32-B-PS Gasket A NBR MGP40-B-PS Gasket B NBR MGP50-B-PS Set of left nos. @4, @5, @6, @7, #5, #6, $4, $5 Set of left nos. @4, @5, @6, @7, #5, $4, $5 MGP63-B-PS

One-touch Fittings

Y Applicable tubing O.D.: 4, 6 Different Diameter Straight: KQ2H Effective area [mm2] Min. port size Release button dimensions a *1 D2 Release button dimensions b L M1 M2 Applicable tubing a Applicable tubing b Applicable tubing O.D.

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

With lock/226) 28 (64) Stroke 39 (4) 21 Motor cable (6) 70 58 47 6.7 17.5 Vacuum port Rc1/8 Note 3) 35 Encoder cable (7) Lock cable (4.5) Motor option B: With lock 8H9 ( ) depth 6 +0.036 0 13 n x 6.8 B 30 8H9 ( ) depth 6 +0.036 0 140 200 E C x 200 (= D) 25 Note 1) Please consult with SMC for adjusting the Z-phase detecting position at the stroke end of the end side.

PF-OMM0004_C

(Part1:General requirements) ISO 10218-1992:Manipulating industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1:-((1 :) JIS B 8433-1993: 2) : : : 1 2. 3. 1. 2. 3. 4.

AXTS-OMY0007

Port size Flow characteristics Internal pilot type External pilot type 1(P)4(A) 3(R2)2(B) Body port [dm3/(sbar)] B Cv C C [dm3/(sbar)] B Cv 1/2 12 0.14 2.9 14 0.18 3.4 This is the flow rate when the main valve is fully open. 3. How to order Switching type -5 - 4.

HRX-OM-W060

(B contact). Contact output signal 5selects Signal type and N.O. (A contact ) or N.C. (B contact). Contact output signal 6selects Signal type and N.O. (A contact) or N.C. (B contact).

FGD-C

FGDCA/B FGDEA/B FGDTA/B FGDFA/B (Rc) 3/81/23/4 (MPa) 1) 0.7 1.0 ( oC) 80 FGD*A:1 FGD*B:2 2) (mm ) FGD*A:6570250 FGD*B:6570500(2 :6570250) (MPa) 0.1 SCS14 SPCE SUS316 /O NBR () () 4) (kg) FGDCA/FGDEA:1.3 FGDCB/FGDEB:2.2 FGDTA/FGDFA:2.3 FGDTB/FGDFB:3.8 (L) FGD*A:1.7 FGD*B:3.4 1) 0.5MPa 2) (65500mm) 3) 4) 3. 001 -B FGD C A 03 B N 1 * -B * * A L250 B L500(L2502 ) 03 3/8 04

Rotary Table

Round plate (Including column) Position of rotational axis: Through the center axis (B) Number of teetha 1. Find the moment of inertia I for the rotation of shaft (B). B r 2. I is converted to the rotation of the shaft (A). B 2 r I = m2 2 b a I I = A B Number of teethb 5.

10

Mounting side Closed C B A A Open D Open E F F Mounting side MHL2-25DZ-X86/X86A MHL2-25D Z-X86/X86A 1 2 200 200 160 160 Gripping force [N] Gripping force [N] Pressure 0.6 MPa Pressure 0.6 MPa 0.5 MPa 120 120 0.5 MPa 0.4 MPa 0.4 MPa 80 80 0.3 MPa 0.3 MPa Closed F (Fingers closed) 40 40 0 0 40 80 120 160 200 0 0 40 80 120 160 200 [mm] Model A B C D E F Weight [g] MHL2-25DZ-X86(A) 9 106 128

,

2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other

AMF

550 3 4 650 1 850 11 2 1 4 3 8 04 1 2 06 10 14 None B With bracket Port size (Dimension B) 01 B 1 8 02 03 B B Thread B Rc(PT) F G(PF) N NPT 3 4 1B B Note) Refer to p.4.7-7 regarding How to Order of case assembly. 1 1 2 20 2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket

MHL2

Switch operating position (ON) Hysteresis Switch reset position (OFF) Unit: mm Auto switch model Air gripper D-Y7 W N B D-Y59A B D-Y69A B D-Y7 WV N B D-Y7BA 0.8 0.6 0.7 0.5 MHL2-10Dl Note)Use a watchmakers screwdriver with a grip diameter of 5 to 6mm to tighten the auto switch set screw. Use a tightening torque of 0.05 to 0.1 Nm.

PA300/500/700

(Value in the initial stage) Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) (1) Port size Weight (kg) Series Model C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] C [dm 3/(sbar)] b Cv b Cv b Cv b Cv VPA342 (Body ported) 3.3 4.0 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 0.93 1.1 0.89/0.89 1.0/0.95 2.0 2.5