3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported Descrption Subplate Note VQZ100-S-01T 1 Body VQZ100 1/8" Aluminum die cast Metal seal VQZ200-S-01T Spool/Sleeve VQZ200 1/8" Stainless steel 2 Rubber seal VQZ200-S-02T Spool valve VQZ200 1/4" Aluminum/NBR 3 VQZ300-S-02T Piston VQZ300 1/4" Resin 4 VQZ300-S-03T Pilot valve VQZ300 3/8" 26 Base Mounted Type Series VQZ Dimensions: VQZ100 Dimensions: VQZ100 (mm) Valve Scale: 45% Grommet (G): VQZ115
5 1 10 20 30 40 50 100 200 300 400 1 5 4 10 20 30 40 50 100 200 300 400 5 10 50 100 10 50 100 Eccentric distance l (mm) Eccentric distance l (mm) Stroke (mm) Stroke (mm) l = 300mm Graph 4 l = 200mm Graph 3 v = 150mm/s or less Graph 7 v = 200mm/s or less Graph 8 20 300 300 200 200 MGF100 MGF100 20 100 100 MGF100 10 50 40 50 40 MGF63 MGF100 MGF63 Load weight m0 (kg) Load weight m0 (kg) Load
VAC Vacuum pump side Atmosphere 30 AMR 18 50.6 ITV 35 43 2-Rc 1/8 Connection port SET G SET Pad side VAC Vacuum pump side 43 IC 2-Rc 1/8 Pressure gauge connection port 2-Rc 1/8 Pressure gauge connection port 50 60 VBA 02 03 04 IRV30002-Rc 1/4 Connection port 70 VE 2.3 54 VY1 24 G 50 (R) PPA SMC 66 6 P K U C S O H L AL 42 Panel cut Panel thickness: Max. 4 10.5 x 8.5 2-Rc 1/8 Pressure gauge
MGPS50 50 11 12 A 13 B 14 1 2 3 4 5 50 80 7 8 9 A 10 B 15 16 6 17 NBR 18 NBR 19 A NBR 20 B NBR / (mm) 50 MGP50-PS 19 18 17 80 MG80-PS 20 17 20 GR-S-010(10g 18 18. 18-1.
6 cassette Solenoid on opposite A port Nil 1(P) port: Rc 1/8 3(R) port: Rc 1/8 Solenoid on same side as A port 2(A) port: Rc 1/8 S Valve stations Type S42 (Solenoid on same side as port A) 01 1 station 1(P) port: Rc 1/8 3(R) port: Rc 1/8 20 20 stations 2(A) port: Rc 1/8 4-13-7 8 Series VKF300 Dimensions: Manifold Body ported Common SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G
M5 x 0.8 (one each on three sides) Port B 47h9 0 0.062 4-M5 x 0.8 Depth 8 8 N I J E A D P A A M N 22 R R SMC 12 E O P T 25 P A I R 8 R G Y 11 A R I 6 6 29 Side A Side B Scale: 45% 10 Rotary Gripper Series MRHQ Dimensions (mm) 1in = 25.4mm Scale: 50% MRHQ20 A B 48 59 78 38.5 4-M6 x 1 Depth 10 0 0.074 54h9 26.3 opened + 2.2 0.2 8 0 0.1 M5 x 0.8 0 0.05 10 16.3 closed 0 0.7 4-M4 x 0.7 Finger
LVQ 1 (1.5 mm) 2 (2.2 mm) 3 (3 mm) 4 (4 mm) VXA31 VXA32 LQ 01 ( ) 1 8 02 ( ) 1 4 02 ( ) 1 4 03 ( ) 3 8 LVN TI/ TIL Ordering example (Example) Series VXA31, Orifice size 1.5 mm, Rc 1/8 (Part no.) VXA3114-01 PA PAX PB 17-3-103 The VX series will be revised shortly.
O ut put pressure at t hi s t i m e i s cont rol l ed by t he i nput dat a i m m edi at el y bef ore t he error occurred. 8 Syst em conf i gurat i on / Appl i cat i ons / Speci f i cat i ons Thi s product i s connect ed t o t he f i el d bus ( PRO FI BU S) as a D P sl ave.
Terminal 7 Green CH4_OUT1 8 Yellow N.C.
Avoid sources of surge generation and crossed lines. 8. Avoid accumulation of iron debris or close contact with magnetic substances.
Cable connector (option) 63 (S type: 39) L1=101 (S type: 77) Part name Part number Suited cable outer diameter Resin-made cable clamp unit (A) P368010-26 7 to 9 M8 x 1.25 Resin-made cable clamp unit (B) P368010-27 9 to 11 M8 x 1.25 Actuator main shaft Actuator main shaft Side mounting with the fork lever assembly M Side mounting with the fork lever assembly S Cable connector G1/2 Exploded
NPN 8 PNP 4-axis type * Two I/O cables are included.
M5 8 81.5 1/4, 3/8 VCL31 24 25 59 46 57 60 54.5 48.5 101 57 68 104 30 50 36.5 13.5 15 32 25 23 M5 8 86 1/2 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 107 22 45 41 11 17 36 22.5 23 M5 8 90 1/4, 3/8 VCL41 26 26.5 66.5 48 64.5 62 62 50.5 103 64.5 70 111.5 30 50 41 13.5 17 36 25 23 M5 8 94 1/2 26 26.5 70 48 68 62 65.5 50.5 103 68 70 119 35 60 41 17.5 17 36 30 28.2 M5 8 102 3/4 Note) For class
7.5 10.5 45 43 34.4 Rc1/8 NPT1/8 G1/8 NPT1/8 7.5 10.5 G1/8 Rc1/8 NPT1/8 NPT1/8 75, 100 50 33 5 to 50 46.5 29.5 40 Rc1/8 NPT1/8 NPT1/8 G1/8 8 11 G1/8 Rc1/8 NPT1/8 NPT1/8 56.5 39.5 8 11 52 50 41.4 75, 100 56.5 39.5 10 to 50 50.5 30.5 50 10.5 10.5 G1/4 Rc1/4 NPT1/4 NPT1/4 60.5 40.5 10.5 10.5 64 62 53.4 Rc1/4 NPT1/4 NPT1/4 G1/4 75, 100 60.5 40.5 HA NN NN OA Bore size (mm) 32 40 50 V W HB IA IB
71 68 104 1/2 22 45 90 41 11 17 36 22.5 23 M5 8 26 84 48 74.5 103 74.5 70 107 1/4, 3/8 30 50 94 41 13.5 17 36 25 23 M5 8 VCS41 26 88 48 78.5 103 78.5 70 111.5 1/2 35 60 102 41 17.5 17 36 30 28.2 M5 8 26 96 48 86.5 103 86.5 70 119 3/4 17-2-45 8 Series VCS How to Order Manifold How to Order Manifold Assembly VV2C S D 2 02 01 Enter the mounting valve and option part numbers under the manifold
size Model Grommet: G Conduit: C Conduit terminal: T M L K H F E D C B N A U S R Q R Q R Q M4 12.8 14 28 12.5 6.5 31 64 28 4.5 13.5 83 66 50 99 50 44 59 22 1/8 VCB21 M4 12.8 18 28 12.5 8.5 31 67.5 36 6 18 86 66 53 99 53 44 62 22 1/4 M5 19 20 32 15 11 36.5 81.5 40 8 22 99 68 66.5 101 66.5 46 76 24 1/4, 3/8 VCB31 M5 23 25 32 15 13.5 36.5 86 50 8 30 104 68 71 101 71 46 80 24 1/2 M5 23 22.5
0 +10 0 +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 90, 180 90 , 100 180 , 190 90, 180 90 , 100 180 , 190 Note) Rotating angle 5 at each rotation end 5 at each rotation end Angle adjustment range Cylinder bore size 6 8 Port size M3 x 0.5 Note) If optimum accuracy of the (rotating) angle is required, select an actuator with external stopper.
CRA1 CRJ U 05 90 E M9B S With external stopper CRQ2 Number of auto switches MSQ Nil S 2 pcs. 1 pc.
-color display (Red and green) Sampling cycle: 5 times/s Display PF2 2% F .S. 2 digit (at 25C ambient temperature) 2% F .S. 1 digit (at 25C ambient temperature) Display accuracy IF Light up when output is ON (Green) 2% F .S. or less (based on 25C) IP40 Operating: 0 to 50C, Stored: 10 to 60C (No freezing or condensation) Operating and stored: 35 to 85% RH (No condensation) 1000 VAC for 1 min