Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements.

Series AFM Modular Style Mist Separator is a cost effective, clean looking solution to your filtration needs. The standard filtration is 0.3µm with a 95% particle size collection rate. The modular design allows connection with other SMC air preparation equipment. Use in combination with the AF series to meet your clean room filtration requirements.

"AIR FILTER. N.

Made to Order

B-A XC11 Z XC11 Z CG1 Mounting type Type Bore size Stroke A Stroke B-A Suffix MB MB1 Mounting type Bore size Stroke A Stroke B-A Suffix Suffix XC11 Z Except trunnion type XC11 Z CA2 Mounting type Type Bore size Stroke A Suffix Stroke B-A Suffix Except trunnion type CA2K Mounting type Type Bore size Stroke A Suffix Stroke B-A Suffix XC11 Except trunnion type XC11 CS1 Mounting type Tubing

CATALOG

www.stevenengineering.com I 2.e VALVES Z VALVE SERIES OVERVIEW ZValve F a m i l y SMC P n e u m a t i c s h a s a g a i n c o n f i r m e d i t s t e c h n o l o g i c a l l e a d e r s h i p i n t h e w o r l d pneumatics market with the release of the Z valve series.

Table of Contents

SE1(L)-14/-15 I Z In the event of setting, use a flat head screwdriver suited for the groove of a trimmer, and rotate it lightly with a fingertip.

Table of Contents

m2 x g x Y m3 x g x Z M2 z y Y Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a weight movable by thrust.

A

www.stevenengineering.com I 1.83 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCA1 H O W T O O R D E R S E R I E S N C A 1 A I R C Y L I N D E R O P T I O N S A D J U S T A B L E S T R O K E E X T E N D X C 8 O P T I O N XC8 A NC A1 A U T O S W I T C H C A P A B L E M O U N T I N G A D J U S TA B L E R A N G E A: 0~1 B: 0~2 B O R E S I Z E S T R O K E T E C H N I C A L SPECIFICATIONS A D J U S

5 Port Solenoid Valve Series SY3000/5000/7000/9000

A A A A SS5Y5-45S1UStations D.

Table of Contents

Endurance 10 G; X, Y, Z directions, 3 times each Impact resistance 350 g or less Weight 1) 90 phase difference input Multi-counter/Dimensions A phase I 24-M3 x 0.5 B phase J B C D A A COM COM COM B 12 VDC GND F.G.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Table of Contents

Working principle A + A A Series CXS 6, 10, 15, 20, 25, 32 Reverse mounting Piston seal A A A R H R H 1. When the piston is retracting, air is exhausted through both A and A until piston seal H passes air passage A. 2. After piston seal H has passed air passage A, air is exhausted only through A.

Air Cylinder

MM R1 MM CJP ND E1 NX1 A U1 R2 H Z E1 NX U1 LB A A NX A1 CJ2 A1 U1 LB JCM Part no.

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

CV/MVGQ

) NN NB NA MM HX H F D C B A ND RHC Z Z S Z S Z S S 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 116 [117] 117 [118] 128 [129] 129 [130] 10 16 84 72 60 52.5 M8 x 1 9.5 12.5 M4 x 0.7 34.5 28 8 4 14 12 15 0 0.022 8 MK(2) 85 73 61 52.5 M10 x 1 9.5 12.5 M5 x 0.8 40.5 28 8 5 20 18 15 0 0.022 10 RS Q G Single Acting, Spring Extend/Axial Foot Style (L) RS H A CVJ3L T Bore size Stroke 48 [49] RZQ

CV/MVGQ

S RHC T MK(2) CVM3 L 32 100 T 1 L Z Without auto switch RS Q G L 32 100 T 1 L Z H7BW CDVM3 RS H A With auto switch RZQ Built-in magnet Number of auto switches Piping MI W S 2 pcs. 1 pc. n pcs.

5

+0.1 A NA B 0 0.3 S + Stroke H U CZ 0 0.3 Z + Stroke R ZZ + Stroke (mm) * A clevis pin and retaining rings are included.

Air Slide Table

) Lr = 70 mm MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C MXQ8( )-Z, MXQ6B-Z A C 0.007 0.004 0.120 ST 10 to 30 ST 75 0.006 ST 75 0.100 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 40 0.003 0.005 ST 30 to 50 0.080 0.004 ST 50, 75 0.060 0.002 ST 50 0.003 ST 20 0.040 0.002 ST 40 0.001 ST 10 ST 10 to 30 0.020 0.001 ST 75 ST 10 to 30 0.000 0.000 0.000 0 5 10 15 0

CJ2

B B A B A A B B A 1 (0) 1 (7.5) 2 (0.5) 2 (8.5) 6 CJ1 10 16 1.5 2 1.5 2 2.5 3 2.5 3 3 3.5 3 3.5 3.5 4 3.5 4 0.5 1 0.5 1 CJP Figures in parentheses for bore 6 are in the case of double rod type, (Series CJ2W).

Electric Actuators

A A A A A Speed Home position A B C Speed no. Time Two pattern combination example (A five point movement of absolute move A and incremental move B) Acceleration no.