HRS100/150

Note 1) C 5 to 35 Cooling capacity 50/60 Hz Note 3) kW 9.0/9.5 13.0/14.5 Heating capacity 50/60 Hz Note 4) kW 1.7/2.2 2.5/3.0 Temperature stability Note 5) C 1.0 Circulating fluid system Rated flow 50/60 Hz (Outlet) Note 6) L/min 42/56 Maximum flow rate 50/60 Hz L/min 55/68 Maximum pump head m 50 Minimum operating flow rate 50/60 Hz Note 7) L/min 28/42 Tank capacity L 18 Circulating fluid

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

4 83 73 5 4 x 30 l Polished round 20 CDP-7A 100 250.065 0.117 4 88 78 5 4 x 36 l Polished round 24 Dd9 m l L * Split pins and flat washers are included.

Slider Type Ball Screw Drive/11-LEFS Series

[particles/m3] Particle concentration [particles/m3] Suction flow rate: 30 L/min ISO Class 5 upper limit 10 10 ISO Class 5 upper limit 1000 1000 Suction flow rate: 30 L/min Suction flow rate: 60 L/min ISO Class 4 upper limit 100 100 Suction flow rate: 50 L/min ISO Class 4 upper limit 10 10 1 1 0 0.1 0.6 0.5 0.4 0.3 0.2 0 0.1 0.6 0.5 0.4 0.3 0.2 Particle diameter [m] Particle diameter [m]

Rotary Actuator/Vane Type

E E CRQ2X MSQX L L MRQ K K D B C G G D B C N N 1 M T T M 25.5 (34.5: Connector type) 2 x R Auto switch 2 x R Y Y Auto switch W W1 Size: 20, 30 Size: 40 W W 2 67 8 8 15 32.5 When D-M9m is used 65 4 *1.

Compact Cylinder

wire and case) 10 to 60C Ambient temperature Enclosure IEC60529 standard IP67 Lead Wire Lead wire length indication (Example) D-M9BW L Lead wire length Nil M L Z 0.5 m 1 m 3 m 5 m Note 1) 1 m (M): Available D-M9(V) only The D-M9M and M9VM (lead wire length: 1 m) will be available with products delivered from August 2008 onwards.

ALF400 to 900, ALT-5/-9

N 1 * S 1 5 T L A N 9 T L A N 1 * S 1 9 T L A N ) a P M ( g i s p e r u s s e r p y l p p u s . x a M ) 5 . 1 ( 0 2 2 ) a P M ( g i s p e r u s s e r p g n i t a r e p o . x a M ) 0 . 1 ( 0 5 1 e g n a r . p m e t g n i t a r e p O ) C 0 6 ~ 5 ( F 0 4 1 ~ 3 2 t n a c i r b u l d e d n e m m o c e R ) 2 3 G V O S I ( 1 # l i O e n i b r u T y d o B C D A e r u s s e r p e n i l d n a k

Environment

1 Cable length* [m] !

10

Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T Z2K Z2L Z2M Z2N Z2P Z2Q Z2R Z2S Z2W Z2T Z3A Z3B Z3C Z3D Z3E Z3F Z3G Z3H Z3V Z3J A B C D E F H J K L M N Nil A B C D E F G H K L Z Nil XB A B D E H J L M Nil A B C D E F G H K L Z Nil XB A B C D E F G H J K L M N P Nil A B C D E F G H K L Z Nil XB A B C D E F M N P Q R S T U V W Y Z1A Z1B Z1C Z1U Z1D Z1E Z1K Z1L Z1M Z1W Z1N Z1P Z1Q Z1R Z1Y Z1S Z1T

Compact Rotary Actuator Series CRQ2

Lead wire length symbols: Auto switches marked with are made to order specification. 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Refer to pages 796 and 797 for the details of solid state auto switch with pre-wired connector.

Compact Type

Vertical Mounting L L Mounting orientation m m Max. speed (mm/s) up to 200 up to 400 up to 600 up to 800 All strokes Stroke (mm) 6 10 15 Selection graph 1 2 3 4 20 25 32 Horizontal Mounting L Mounting orientation m m Refer to the caution notes below.

53

Standard item Acid consumption amount (at pH4.8) [mg/L] 100 or less v Total hardness [mg/L] 200 or less v Calcium hardness (CaCO3) [mg/L] 150 or less v Ionic state silica (SiO2) [mg/L] 50 or less v Iron (Fe) [mg/L] 1.0 or less v v Copper (Cu) [mg/L] 0.3 or less v Sulfide ion (S2) [mg/L] Should not be detected. v Ammonium ion (NH4+) [mg/L] 1.0 or less v Residual chlorine (Cl) [mg/L] 0.3 or

MY1

MY1CW MY1MW 200 200 (kg) (kg) 190 190 (2100) (2100) (2100) (2100) 180 180 170 170 160 160 m 150 150 140 140 (2400) (2400) (2400) (2400) 130 130 L (1800) (1800) (1800) (1800) 120 120 Mass (m) Mass (m) 110 110 MY1MW63 MY1MW63 100 100 (2000) (2000) (2000) (2000) 90 90 m L (1500) (1500) (1500) (1500) MY1CW63 MY1CW63 MY1MW50 MY1MW50 80 80 m (1600) (1600) (1600) (1600) 70 70 MY1CW50 MY1CW50 MY1MW40

Compact Type Dual-Rod Cylinder Series CXSJ

Vertical Mounting L L Mounting orientation m m Max. speed (mm/s) up to 200 up to 400 up to 600 up to 800 All strokes Stroke (mm) 6 10 15 Selection graph 1 2 3 4 20 25 32 Horizontal Mounting L Mounting orientation m m Refer to the caution notes below.

Non-standard Motor/Horizontal Mount Specification Series LJ1H10

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) a = 2000 m 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 2000 L3 (mm) L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

Slide Unit Series CX2/CXWM/CXWL

Plate mounting style with auto switch: CDPXW S M Table (3) L Housing mounting style with auto switch: CDBXW M M Table (4) L Table (3) Plate Mounting Style with Auto Switch (CDPXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch (3) Component parts Material M L CDPXW 16SM L CDPXW 20SM L CDPXW 25SM L CDPXW 32SM L CDPXW

Slide Unit Series CX2/CXWM/CXWL

Plate mounting style with auto switch: CDPXW S M Table (3) L Housing mounting style with auto switch: CDBXW M M Table (4) L Table (3) Plate Mounting Style with Auto Switch (CDPXW -) Component Parts for Mounting Switches and No. of Component Parts M L 10 16 20 25 32 Assembly model no. for mounting switch (3) Component parts Material M L CDPXW 16SM L CDPXW 20SM L CDPXW 25SM L CDPXW 32SM L CDPXW

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Shock absorber Port variations R L R L Tighten the four unit fixing bolts equally to secure the unit body. R R R R L L L L R L R L L R Slide table operating direction 8-14-26

Air Cylinder

G M G 4 x J 2 x Cushion valve MM MM D D E E C B H1 H1 B1 AL AL C A A K K B F N F N H + Stroke S + Stroke H ZZ + 2 x Stroke d e 10.2 L f h + L ZZ + L + Stroke d d e e 10.2 10.2 f f L L + Stroke h + L + Stroke h + L S + Stroke ZZ + 2L + 2 x Stroke (mm) Bore size Stroke range (mm) A AL B B1 C D E F G H1 J K KA M MM (mm) 40 50 63 80 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 30 35 35 40

Cylinder with Lock Series CLS

L m m Material: Carbon steel (mm) d (drill through) Applicable bore size (mm) Cotter pin Dd9 L l m Model Dd9 4 x 40 l 4 x 40 l 4 x 40 l 4 x 55 l 5 x 65 l IY-12 IY-14 IY-16 IY-18 IY-25 125 140 160 180, 200 250 25 0.065 0.117 28 0.065 0.117 4 79.5 69.5 5 4 86.5 76.5 5 2 x d 32 0.080 0.142 40 0.080 0.142 50 0.080 0.142 4 94.5 84.5 5 4 115 105 5 5 144 132 6 Cotter pins (2 pcs.) are included.

HEC_W-E

Alarm Sequence Setting range : On, Off Indicated content : Use of temp. upper/lower limit alarm U p p e r / L o w e r T e m p . A l a r m S e q u e n c e M O D E < O f f sequence(Ex. : Off) Function : Determines whether or not temp. upper/lower limit alarm is output when power is turned on.