Series VQ Base Mounted Metal Seal/Rubber Seal

(Sl unit) Max. 16 stations Porting specifications Applicable stations Port size Port location A, B P, R Series VQ1000 C8 C3, C4, C6, M5 Max.16 Side VQ2000 C10 C4, C6, C8 Max.16 Side Flat cable(20 pin) The total number of stations is tabulated starting from station one on the D side.

CG5-S

(mm) Bore size (mm) WA WB WH W ZZ 20 22 16 23 30 118 25 22 16 25 30 123 32 22 16 28.5 25 125 40 22 16 33 20 143 50 25 18 40.5 20 167 63 25 18 47.5 20 167 80 30 22 60.5 20 201 100 31 22 71 20 202 10 Series CG5-S Dimensions R V Axial foot type (L)/CG5LNS S + Stroke H GA GB Width across flats B1 2-Rc P H1 D B LH I AL A K KA MM Width across flats NA LT M X Y X Y 8-J 4-LD C 0.1 LS + Stroke LX

LEC-OM069xx

2.4.3 Setting Parameters.2-16 2.5 Monitor Displays.2-16 3.

MQQ

Action D Double acting Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Mounting style Bore size 10 10, 20, 30, 40 Through-hole/Both ends tapped common (Standard) Foot style Rod side flange style Head side flange style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100

MQQ

style Double clevis style B L F G D Note) 10 16 20 25 28 10 mm 16 mm 20 mm 25 mm 28 mm 16 10, 20, 30, 40, 50, 60 20 10, 20, 30, 40, 50, 60 25 10, 20, 30, 40, 50, 75, 100 28 10, 20, 30, 40, 50, 75, 100 Note) Available only for MQQL.

KJ

5 32 3 16 1 4 5 16 3 8 1 2 1 2 17.46 17.46 17.46 22.23 25.4 28.6 -18 -20 9 16 -18 9 16 3 4 7 8 1-12 -14 -16 Bulkhead Male Elbow: KQ2LE Applicable tubing Applicable tubing O.D.

MQQ

30 45 10 FX FT 10 to 60 54 34 6.6 8 39 48 16 FZ L B + Stroke 10 to 60 57.5 37.5 6.6 8 42 52 20 A + Stroke 2-FD 10 to 50,75,100 64 42 5.5 8 48 56 25 10 to 50,75,100 70.5 48.5 5.5 8 54 62 28 25, 28 Bore size (mm) FZ L M FV 55 18 10 60 20 16 FT FX 64 20 20 FZ 65 22 34 25 L B + Stroke 72 22 40 28 4-FD A + Stroke Rear flange type/MQQTG 10, 16, 20 25, 28 2-FD 4-FD (mm) Bore size (mm) Stroke

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Recommended Parameter Values [LEF/LEKFS] LEFS25T6 LEFS32T7 LEFS40T8 /LEKFS25T6 /LEKFS32T7 /LEKFS40T8 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

V

Wiring Specs 20 20 Applicable up to 20 Solenoid M A N I F O L D O P T I O N S PORT PLUGS Applicable Fitting Size d A L D Model 16 32 6 KQP-04 4mm 16 32 6 KQP-03 5/32 18 35 8 KQP-06 6mm 18 35 8 KQP-07 1/4 20.5 39 10 KQP-08 8mm 20.5 39 10 KQP-09 5/16 Inserts easily into an unused cylinder port and/or SUP/EXH Ports.

15

LEYG32B 20 20 Lead 16: LEYG32DA Lead 20: LEYG32A 10 10 0 0 0 200 600 1000 1400 1200 Speed [mm/s] 0 200 600 1000 1400 Speed [mm/s] SpeedHorizontal Work Load Graph * These graphs show the work load when the external guide is used together.

•

ZPR20 , 57 61 , ZPR25 65 68 .O' ZPR100 10 12 15 24 3<.9 49 20 70 33.9 50 20 71 25 75 6 57 61 57 61 ZPR16D 16 18 16 25 25 76 7 Applicable tube 2PR32 mm . :Appli~I~1IJbe O.t;) i'P .

MXS

Contents Contents Contents 6 8 12 16 20 25 8 12 16 20 25 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS MXS8R-PS MXS12R-PS MXS16R-PS MXS20R-PS MXS25R-PS MXS6P-PS MXS8P-PS MXS12P-PS MXS16P-PS MXS20P-PS MXS25P-PS 1 set including !7 to !9 & #2 to #5 1 set including !7 to !9 & $1 to $3 1 set including !7 to !

Stopper Cylinder

1 i o w Mounting e Bore size r Port thread type t Cylinder stroke [mm] q With auto switch 12 12 mm 16 16 mm 20 20 mm 32 32 mm 40 40 mm 50 50 mm B Through-hole A Both ends tapped Nil M thread 12, 16 Rc 20 to 50 TN NPT TF G F Built-in One-touch fittings*2 Nil Without magnet for switch*1 12 10 16 10, 15 20 10, 15, 20 32 10, 15, 20 40 20, 25, 30 50 20, 25, 30 D With auto switch (Built-in magnet

MHZ2/MHZJ2

Kits include items 19, 20. and 21 from the table on the left Note) MHZJ2-10 Aluminum alloy Body MHZJ2-16 MHZJ2-20 MHZJ2-25 1 Hard anodized 10, 16 stainless steel 20, 25 Aluminum alloy 20, 25: Hard anodized MHZJ10-PS MHZJ16-PS MHZJ20-PS MHZJ25-PS Piston 2 Seal kits consist of items 19, 20 and 21 contained in one kit, and can be ordered using the seal kit number for each cylinder bore size

Environment

8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work

MXS Series Air Slide Table

Contents Contents Contents Parts no. 6 8 12 16 20 25 6 8 12 16 20 25 6 8 12 16 20 25 MXS6-PS MXS8-PS MXS12-PS MXS16-PS MXS20-PS MXS25-PS MXS6R-PS MXS8R-PS MXS12R-PS MXS16R-PS MXS20R-PS MXS25R-PS MXS6P-PS MXS8P-PS MXS12P-PS MXS16P-PS MXS20P-PS MXS25P-PS 1 set including br to bt & el to en 1 set including br to bt & dm to dp 1 set including br to bt 53 MXS Series Air Slide Table Dimensions

CNA

32 10 85 15 52 16 12 12 10 8 to 500 35 32 70 27 108 1/4 1/8 52 12 18 20 40 10 95 17 56.5 20 13 15 12 11 to 600 35 32 86 27 115 1/4 1/4 64 16 25 20 40 10 102 17 67 20 18 12 15 11 to 600 40 37 102 32 139 1/4 1/4 78 20 31.5 25 52 14 123 21 83 20 23 18 17 13 to 750 40 37 116 41 160 1/4 1/4 92 25 35.5 30 52 14 144 21 98 22 25 20 19 16 to 750 (mm) Bore (mm) 40 50 63 80 100 K J KA L MM N P Q H

5 Port Solenoid Valve

Insulation resistance MW/km, 20C 5 or more 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 Note) The minimum bending radius for D-sub connector cables is 20 mm.

Cylinder with Lock

101 32.5 30 13 37.5 37.5 13 M6 x 1.0 3 16 3.5 40 16 f8 57 28.5 42.5 48.5 73 1/8 16 115 38 35 13 59.5 44.5 M6 x 1.0 3 16 4.5 50 20 f8 66 33 49 55.5 78 1/8 16 122 46.5 40 14 64 47 M8 x 1.25 4 16 4.5 63 20 f8 78 39 52.5 59.5 90 1/4 16 134 56.5 45 14 73 53 M8 x 1.25 4 16 5.5 80 25 f8 98 49 64.5 71.5 113 1/4 17 170 72 45 20 92 65 M10 x 1.5 5 17 7.5 100 30 f8 116 58 73.5 80.5 131 1/4 17 188

Maximum of 20 stations; Available for 53-SY5000 and 53-SY7000