With Bracket, 1/4" NPT Fitting $127.00 VMW-240-B-N03 With Bracket, 3/8" NPT Fitting $130.00 VMW-240-B-N04 With Bracket, 1/2" NPT Fitting $135.00 VMW-240-B-N07 With Bracket, 1/4" Push to Connect Fitting $64.00 VMW-240-B-N09 With Bracket, 5/16" Push to Connect Fitting $64.00 VMW-240-B-N11

With Bracket, 1/4" NPT Fitting $127.00 VMW-240-B-N03 With Bracket, 3/8" NPT Fitting $130.00 VMW-240-B-N04 With Bracket, 1/2" NPT Fitting $135.00 VMW-240-B-N07 With Bracket, 1/4" Push to Connect Fitting $64.00 VMW-240-B-N09 With Bracket, 5/16" Push to Connect Fitting $64.00 VMW-240-B-N11

With Bracket, 1/4" NPT Fitting $127.00 VMW-240-B-N03 With Bracket, 3/8" NPT Fitting $130.00 VMW-240-B-N04 With Bracket, 1/2" NPT Fitting $135.00 VMW-240-B-N07 With Bracket, 1/4" Push to Connect Fitting $64.00 VMW-240-B-N09 With Bracket, 5/16" Push to Connect Fitting $64.00 VMW-240-B-N11

With Bracket, 1/4" NPT Fitting $127.00 VMW-240-B-N03 With Bracket, 3/8" NPT Fitting $130.00 VMW-240-B-N04 With Bracket, 1/2" NPT Fitting $135.00 VMW-240-B-N07 With Bracket, 1/4" Push to Connect Fitting $64.00 VMW-240-B-N09 With Bracket, 5/16" Push to Connect Fitting $64.00 VMW-240-B-N11

With Bracket, 1/4" NPT Fitting $127.00 VMW-240-B-N03 With Bracket, 3/8" NPT Fitting $130.00 VMW-240-B-N04 With Bracket, 1/2" NPT Fitting $135.00 VMW-240-B-N07 With Bracket, 1/4" Push to Connect Fitting $64.00 VMW-240-B-N09 With Bracket, 5/16" Push to Connect Fitting $64.00 VMW-240-B-N11

PSxx-OMS0004CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4

MGP

MGPS50 50 11 12 A 13 B 14 1 2 3 4 5 50 80 7 8 9 A 10 B 15 16 6 17 NBR 18 NBR 19 A NBR 20 B NBR / (mm) 50 MGP50-PS 19 18 17 80 MG80-PS 20 17 20 GR-S-010(10g 18 18. 18-1.

Foot Pedal Type

Specifications Model Model XT34-60 XT34-67 Lock With lock Without lock Weight 0.8 kg 0.5 kg Fluid Air/Inert gas Operating pressure 0.15 to 0.9 MPa Ambient and fluid temperature 5 to 60C (No freezing) Flow-rate characteristics C [dm3/(sbar)] b Cv 1(P) 2(B)/4(A) 0.76 0.22 0.17 2(B)/4(A) 4(EB)/5(EA) 0.53 0.28 0.13 Lubrication Not required (Use turbine oil Class 1 ISO VG32, if lubricated) Port

MXH

B MY CY 22 (20) MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A CX D-A9V D-M9V D-F9WV D-X 20( ): Denotes the values of D-M9V, D-F9WV. 5(7) B W Data D-A9, D-A9V D-F9W, D-M9 D-F9WV, D-M9V Bore size (mm) A A W B W B A W B 6 12.5 3.5 (6) 16.5 7.5 2.5 16.5 5.5 2.5

Clean Air Module

Bushing Connecting bracket B Restrictor assembly Connecting bracket A Flow direction arrow Connecting bracket B r Mount the connecting bracket A, and tighten the hexagon socket head cap screw with the following torque.

PFxx-OMO0007CN

8370: JIS B 8361: JIS B 9960-1: -(1 :) JIS B 8433-1: -1 : 2) : : : 1. 2. 3. 1. 2. 3. 4

HRX-OM-W038

Optuon B ventilation air outlet Earth leakage breaker Handle Lid for circulating fluid fill port (There is a handle on the other side too.)

AKH/AKB Series

Check for the following during regular maintenance, and replace components as necessary. a) Scratches, gouges, abrasion, corrosion b) Air leakage c) Twisting, flattening or distortion of tubing d) Hardening, deterioration or softness of tubing 2.

3 Port Solenoid Valve Rubber Seal Series SY100 1

For driving air operated valves for fluid control N.C N.O N.C N.C Air operated style fluid control valve Vacuum valve Vacuum pad A, B 1(P) A, B 1(P) A, B 1(P) A, B 3(P) 3(R) 3(R) 3(R) 1(R) Vacuum releasing air Atmospheric pressure or micro pressure The characteristic values shown in the catalog are representative values, not warranting the performance. 4-3-1 2 Series SY100 Precautions Be

MXH Series Compact Slide

Auto switch groove positions (mm) B 6.9 8.8 13.7 17.1 A 10 14 19 26 Bore size (mm) 6 10 16 20 4-4.2 Auto switch mounting groove B A 38

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

4.68 (0.26) A/BR 4.68 (0.26) C8: PA/B 12.6 (0.7) A/BR 12.6 (0.7) A, B port piping specifications SY3000 SY5000 SY3000 Operating pressure range External pilot operating pressure range MPa 2 position single Pilot pressure range 2 position double 0.25 to 0.7 Port size 3 position A/B ports Ambient and fluid temperature C Maximum 50 10 3 5 3 SY5000 2 position single, double 3 position Max. operating

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

MHx-OMM0057

8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2. 3. 4. 2 - / 1 1.5 *3) *3)1 1 () 3 - 2

140-G-N09 With Gauge, 5/16" Push to Connect Fitting $70.00 VMW-140-B-N01 With Bracket, 1/8" NPT Fitting $123.00 VMW-140-B-N02 With Bracket, 1/4" NPT Fitting $125.00 VMW-140-B-N07 With Bracket, 1/4" Push to Connect Fitting $62.00 VMW-140-B-N09 With Bracket, 5/16" Push to Connect Fitting $62.00

140-G-N09 With Gauge, 5/16" Push to Connect Fitting $70.00 VMW-140-B-N01 With Bracket, 1/8" NPT Fitting $123.00 VMW-140-B-N02 With Bracket, 1/4" NPT Fitting $125.00 VMW-140-B-N07 With Bracket, 1/4" Push to Connect Fitting $62.00 VMW-140-B-N09 With Bracket, 5/16" Push to Connect Fitting $62.00