5 Port Air Operated Valve

0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2

SMC

Front matter 12 Particle Generation Grade Cylinder Model Particle generation grade by series 222113121110Standard Description 12-/1321-/223 4 2 4 3 MGPL Compact Guide Cylinder 4 2 10-MGF Guide Table 1, 2, 4 Note) 1, 2, 4 Note) 1122MXP Air Slide Table 11221 1 MXPJ6 1322MXQ 3, 4 Note) 3, 4 Note) Air Slide Table 1322MXS 2 CYP Clean Rodless Cylinder 4 3 12-CY1B Magnetically Coupled Rodless Cylinder

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Y I w l.8 ),8 ).8 U04 4 .8 1.6 OOU U06 6 2.5 7 , " ~u< U08 8 2.5 7 < 2 1 3 3 Ul0 10 12 4 --'~ 7.7 12 (mm) ZP1: 13 4 13 7.7 12 ZP16 1 16 4 13 8.2 ' 12.5 3.5 Part No.

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

ZP3

One-touch fitting 2, 4 2, 4 2, 4, 6 Vacuum inlet Barb fitting1 2, 4 2, 4 2, 4, 6 1 2 polyurethane tubing, 4, 6 soft tubing Vacuum Inlet Direction Lateral Y Type/ZP3-Y Connection Female thread Pad diameter 1.5 to 3.5 4 to 8 10 to 16 Connection thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Female thread M3 x 0.5 M5 x 0.8 M5 x 0.8 Vacuum inlet One-touch fitting 2, 4 2, 4 2, 4, 6 Barb fitting1 2, 4 2, 4

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

REA/REB

0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts No. Description Body No.

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Stability of suction position,

4 !3 !4 !0 !0 o i !1 o !1 i Component Parts r r No.

REA/REB

Dimensions: 15 to 40 ta EA FA tb 4-counter bore dia.

1

Function 2-Hexagon socket head set screw H4 4/2.5 CJ-5H-4 With a fixed orifice (0.8) H6 6/4 CJ-5H-6 MH4 4/2.5 M-5H-4 Without fixed orifice MH6 6/4 M-5H-6 Dimensions (Dimensions other than below are the same as standard type.)

VZ100/300/500

DXT170-34-1B Note With screw (For VZ32) Refer to pages 4-6-18 to 4-6-28 for manifold use.

Series VQ Metal Seal/Rubber Seal Body Ported

SX VK L C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZ C6 (6) kit VF VFR N1 (1/8) N3 (5/32) N7 (1/4) N7 (1/4) VP7 Built-in silencer P.1.10-16 P.1.10-18 VP4 C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit VQ N1 (1/8) N3 (5/32) N7 (1/4) VQ4 VQZ Built-in silencer P.1.10-48 P.1.10-52 VQD C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) VZS kit C6 (6) VFS N1 (1/8) N3 (5/32) N7 (1/4) VS N7 (1/4)

Modular Type Filter Regulator Series AW

Modular Type Filter Regulator Series AW Filter regulator Series AW Filtration Accessory Model Port size AW10 M5 x 0.8 AW20 1/8, 1/4 AW30 1/4, 3/8 AW40 1/4, 3/8, 1/2 AW40-06 3/4 Pages 56 through 60 Filter regulator with back flow mechanism Series AWK 5m AW20K 1/8, 1/4 AW30K 1/4, 3/8 AW40K 1/4, 3/8, 1/2 Bracket Square embedded type pressure gauge (except for AR10) AW40K-06 3/4 Pages 63 through

Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

Rotary Actuator/Vane Type

L1-(3 x P) X = L1 = X = Q2 = M CRJ CRA1 [mm] Size CRB2, CRBU2 Y L2 max Q2 10 5.5 to 8 Y-1 3 15 7.5 to 9 Y-1.5 3, 4 20 9 to 10 Y-1.5 3, 4, 5 30 11 to 13 Y-2 3, 4, 5, 6 40 14 to 15 Y-4.5 3, 4, 5, 6, 8 [mm] CRQ2 Size CRB2 CRBU2 X L1 max Q1 X L1 max Q1 10 7.5 to 14 X-3 3 5.5 to 14 X-1 3 15 10 to 18 X-4 3, 4 7.5 to 18 X-1.5 3 20 12 to 20 X-4.5 3, 4, 5 9 to 20 X-1.5 3, 4 30 14 to 22 X-5 3, 4, 5

Air Fittings Fitting Series For Special Environment

4 5 . 1 ) 9 3 ( 7 6 5 3 . 0 ) 9 ( 4 . 7 3 4 2 . 1 ) 5 . 1 3 ( 4 5 . 1 ) 9 3 ( 4 9 . 0 ) 4 2 ( 4 / 1 S 5 3 3 1 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 4 0 . 1 ) 5 . 6 2 ( 7 6 . 0 ) 7 1 ( 2 2 . 1 ) 1 3 ( 8 / 3 S 6 3 3 1 T R K 2 3 . 1 ) 5 . 3 3 ( 1 6 . 1 ) 1 4 ( 8 3 . 0 ) 6 . 9 ( 2 / 1 4 . 6 4 2 / 1 S 7 3 3 1 T R K 7/8 ) 3 2 . 2 2 ( 8 4 . 1 ) 5 . 7 3 ( 7 6 . 1 ) 5 . 2 4 ( 4 . 2 7 Note: Fitting cover ordered

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Secondary Batteries

in imperial units: psi Note 4) Note 4) Note 4) Note 4) Note 4) Note 1) Option B, H are not assembled and supplied loose at the time of shipment.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

4 4 4 4 6 8 8 8 G 23 23 23 23 32 44 31 56 H 55 55 55 65 80 44 66 66 NN 2 2 2 2 2 3 4 4 4 GA 23 23 23 23 32 72 88 97 122 HA 55 55 55 65 80 65 88 132 132 I 16 16 16 16 16 31 20 18 18 J 56 56 56 66 90 100 150 205 230 K 35 45 55 65 75 100 125 150 175 KA 170 223 248 NA 4 4 4 4 4 4 8 8 8 M 107 107 107 117 141 166 205 258 283 Z 105.5 105.5 105.5 115.5 139.5 164.5 203.5 256.5 281.5 ZZ 148.5 148.5