Two Hand Control Valve

VHS One-handed operation Two-handed operation Clamping Press fitting with an air cylinder, Caulking Application Examples 1681 Two Hand Control Valve VR51 Series RoHS How to Order VR51 B C06 Option Two hand control valve Nil B None With bracket Silencer (Accessory) Connection piping size Flame resistant One-touch fitting C06 C07 Flame resistant One-touch fitting 6 Flame resistant One-touch

Conforming to OSHA Standard Pressure Relief 3 Port Valve With Locking Holes Series VHS20/30/40/50

VR A + 3 VH OUT IN B EXH.

Series HAW Water Cooled Aftercooler 1

Cooling water (l/min) 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Model 50C 70C 100C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 40 44 46 39.5 43 44.5 41 43 45.5 A B C A B C A B C A B C A B C A B C A B C 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 34.5 36 37 34.5 35.5 36 34.5 35.5 36 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 38 40 42.5 38

05-hyq-e

4 Bumper B Bumper B Bumper B Bumper B Resin Resin Resin Resin (Only 63 is common to the bumper A.) (Only 63 is common to the bumper A.) 13 !4 13 !4 Bumper B Bumper B Resin Resin (Only 63 is common to the bumper A.) HYQB20R-PS HYQB32R-PS HYQB20-PS HYQB25-PS 20 25 HYQB32-PS HYQB40-PS HYQB50-PS HYQB63-PS 32 40 50 63 Set of nos. above o, !0, !4.

AC

20 30 40 Symbol Nil B* H* Symbol 02 03 04 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

The port on the piston rod B side for 10-/12-, 21is plugged since unlike the vacuum, it is not necessary to exhaust from 2 ports.

Series AC Epoxy Coated F.R.L.

20 30 40 Symbol Nil B* H* Symbol 02 03 04 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

Process Gas Diaphragm Valve

Construction Diaphragm Seat Body 1110 B Diaphragm Valve for Ultra High Purity Air operated type Series AZ3542 & 4542 Dimensions inch (mm) AZ3542 & 4542 Ports: 2PW (Welded) Ports: 2P (Machined) M5 x 0.8 Actuation port Actuation port M5 x 0.8 1.57 (40) 1.57 (40) FORGED BODY BAR STOCK BODY Note) 2.24 (57) 2.24 (57) 0.44 (11.2) 0.44 (11.2) A A B A A Connections: MV, FV Connections: MV B A A A

Fieldbus system Ethernet POWERLINK compatible SI unit

code, Socket, Straight 2 m, SPEEDCON compatible PCA-1564930: Cable with M12 connector, B code, Socket, Straight 6 m, SPEEDCON compatible PCA-1564943: Cable with M12 connector, B code, Socket, Right angle 2 m, SPEEDCON compatible PCA-1564969: Cable with M12 connector, B code, Socket, Right angle 6 m, SPEEDCON compatible (8)Ethernet communication cable PCA-1446566: Cable with M12 connector,

EXxx-OMY0006CN

. *2) *1) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433: *2) 1. 2. 3. 1. 2.

LV50-OMQ0002

The proof pressure is double the operating pressure range. -69No.LV50***-OMQ0002-G Analogue output Flow/Analogue output Output A B C Voltage output 1 V 1.1 V 5 V C Current output 4 mA 4.4 mA 20 mA Rated flow[L/min] B Model Minimum Maximum A LFE1 0.5 20 Flow rate 0 Minimum rated flow Maximum rated flow LFE2 2.5 100 LFE3 5 200 Out of range -70No.LV50***-OMQ0002-G Dimensions Note) The electrical

IZ-OMU0031-CN

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: 2) : 1. 2. 3. 1. 2. 3. 4

HRX-OM-R016

If foreign objects with a size of 20 m or more are likely to enter, install the particle filter. 6 Filter Rc1/2 20m Note FQ1011N-04-T020-B-X61 Note) The filter shown above cannot be directly connected to the thermo-chiller.

HRX-OM-O021

DO NOT k i id hi d l h b i d HRX-OM-O021 Chapter 1 Safety Instructions 1.3.4 Locations of Hazard Labels There are various warning labels on the product to show the potential hazards.

XL-OMV0002

8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 2 XL-OMV0002 1. 2. 3. 4., / 1 1.5 *3) *3)1 1 () 3 XL-OMV0002 1.1 A6063SUS316LSUS304 FKM XLC-80,XLC-100,XLC-160 :Y-VAC2 60 XLC-16,XLC-25,XLC-40 0.3MPa0.5MPa XLC-50,XLC-63,XLC-80,XLC-100,XLC-160 0.4MPa0.5MPa 245250Hz 30m/s (/H0 H4 H5) 4 XL-OMV0002 510 O 0.1mm0.2mm Assy O 5 P11 O 6 (P12P14) 5 XL-OMV0002 2.2

XG_-OMV0028

11 27 13 12 9 2A 2 2B 2 12 18 2 7 - 3-4 2B2C A 16 17 12 18 2 8 9 13 B 11 9 10 17 A 16 12 18 2 2 O 3 19 12 27 12 14 27 15 12 12 3-5 2C2B OPENCLOSE 9 B 11 10 A 16 18 2 2 12B 11 9 27 13 12 14 27 15 9 B 11 12 13 2 19 3-6 2B 2A 2 18 12 9 2 21 23 3-7 20 22 24 8 8 - 4. 4-1.

CM2x-OM0230Q

P23 -1- *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-1992: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -1 ) JIS B 8433-1993: *2) 1.

CEU1

L 2 3 4 5 0 1 2 3 4 8 8 8 8-2 2 2 2 LCD ON OFF ON OFF A B (+) (-) (+) (-) (+) () (-) () 100ms LCD 100ms ON + 100ms ON A B (+) (-) () (-) () () () (-) LCD ON ON +ON ON A B () () () () () () () () [MODE] LCD SET LCD ROM ROM CPU RAM RAM CPU E ROM E ROM6.5 E ROM OUT 0.0 0.0 (100ms) MODESHIFTSET DATA No.SET MODE No.

Clean Gas Filter

MPa 0.1 MPa B IN 0.01 AM 0.7 MPa AMD A 0.001 AMH 0.5 MPa A B Model Connection SFA102-02 SFA202-02 SFA302-02 76 96 120 89 93 101 TSJ 1/4 Tube Swage Joint AME AMF 0.0001 1000 1 10 100 ZFC SFA103, SFA203, SFA303 Flow rate L/min (ANR) SF SF 2 x UOJ 1/4 SFA30 SFD 7 9.5 6.5 0.1 LLB B Inlet pressure IN 0.3 MPa AD Max. flow rate line Pressure drop MPa 0.1 MPa 0.01 GD A 0.7 MPa A B Model Connection

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE