CRB2-OM00001

As a result, it could pose a hazard to humans and cause damage to machinery and/or equipment. (15) Do not use two or more rotary actuator with the aim of synchronized movement.

MHx-OMZ0004

Nm JMHZ2-16D M3x0.5 0.59 14 - 3 Force Sensor LAN LAN HAN D (5x10) M5x10 3.0Nm 15 - M6x23 6.3Nm M4x10 1.0Nm 16 - P145-2. M3x7 0.59Nm 17 - 12 (No.1No.4)KQ2L04-M3G1 KQ2L04-M3G1 2(TCU0425B-1) 3(M44 ) TCU0425B-1 44 (No.1No.4)6 () 5(KQ2H04-06A1)1)4 6 () 4 6 KQ2H04-06A1 18 - () 19 - 5-3 1. 2. 3. 4. 1.() 2. 5m 3. 4. 5 5-4. 1.

LEF-OM007xx

10,000,000 80 [/min] 100 [/min] ISO CLASS4 ISO CLASS5 ISO CLASS6 1,000,000 Particle concentration [particles/m3] 100,000 10,000 1,000 100 10 1 0 0.1 0.2 0.3 0.4 0.5 0.6 Particle diameter [m] Clean class Amount of recommended vacuum aspiration (/min(ANR)) Type Speed mm/s) ISO 14644-1 Fed.Std.209E 6 1000 5 5 100 10 4 10 30 6 1000 5 5 100 10 4 10 30 6 1000 20 5 100 30 4 10 50 6 1000 5 5 100 15

IDX-OM-W094

90 Series 6-4 IDX-OM-W094 7 7.1 IDFA60-23 IDFA70-23 IDFA80-23 IDFA90-23 oC 565 MPa 0.151.0 8) 1 () oC 24585% 3 oC 204 312 552 810 (ANR) 2 7 oC 300 408 654 900 m 3/h 10 oC 360 480 720 960 3 oC 216 331 585 859 7 oC 318 432 693 954 3) 10 oC 382 509 763 1,018 MPa 0.7 oC 35 oC 25 () AC230V(50Hz) 10% 4 7-2 5) W 820 1,300 1,950 2,220 5) A 4.9 7.2 12.0 13.0 (30mA) 6) A 10 15

C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?

C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)14.1 scfm (400 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?

C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)21.2 scfm (600 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?

C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)21.2 scfm (600 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?

C)44 to 145psi (0.3 to 1.0 MPa)59 to 86F (15 to 35?C) (Relative humidity 85% or less)59 to 86F (15 to 30?C)22 to 123psi (0.15 to 0.85 MPa)(The inlet air pressure should be at least 22psi (0.15 MPa) higher than the outlet air pressure.)21.2 scfm (600 L/min [ANR])102psi (0.7 MPa)95F (35?C)86F (30?C)86F (30?C)50F (10?C)?0.18F (?0.1?C)?0.9F (?0.5?C) (including accuracy of the sensor)Single?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?

10%, 12 to 15 VDCPower supply voltage 24 VDC type: 0.12 A or less Power supply voltage 12 to 15 VDC type: 0.18 A or less0 to 5 VDC, 0 to 10 VDC4 to 20 mA DC, 0 to 20 mA DCApproximately 10 k Approximately 250 1 to 5 VDC (Load impedance: 1 k or more) Output accuracy: Within ?6% (Full span)Within ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?