0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)220190 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%36/13?61?
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)220190 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
ANR: 20C atmospheric pressure, relative humidity 65% 200 300 , 0.2 AMC-EL3 BE30 1,000 1 4 3 8 1 4 , 3 4 1 2 0.12 AMC-EL2 BE20 0.5 AMC-EL5 BE50 5-10-11
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)585520 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
42Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%34/13?57?
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)430365 28Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%28/1522/125142
0.050.5 or less150/30605 to 4090 or less (No condensation)165135 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
0.050.5 or less150/30605 to 4090 or less (No condensation)220190 20Step motor (Servo/24 VDC)Incremental A/B phase (800 pulse/rotation)24 VDC ?10%11/78/7191/4
Output pressure (kPa) 40 0 0 Out 60 0.5 0.5 80 1.0 1 0 2 4 6 8 10 0 25 50 75 100 0 25 50 75 100 Input signal (%F.S.) Count Input signal (%F.S.)