Size: For AC5000, 6000, Bracket: T Bracket, Thread: M Thread, Rc(PT), Port Size: 3/4

Magnet: D (Built-in), Mounting: T (Trunnion), Bore Size: Ø10 mm, Stroke: 15 mm, Rod End Thread: With Thread, Auto Switch: M9PV--Solid State, Gen. Purpose, 3 Wire PNP, Vertical, 0.5M, Lead Wire or Prewired Connector: M (1m)

Size: 32, Motor Mounting: Top Mounting Type, Motor Type: T7 [AC Servo Motor, (Absolute Encoder), Output 200W], Lead: B [LEY25, 6mm; LEY32, 8(10)mm], Stroke: 50mm, Motor Option: w/o Option, Rod End: M (Rod End Male Thread, 1 Rod End Nut Included), Mounting: L (Foot), Actuator Cable Type: S (Standard Cable), Cable Length: A (10m), Controller Type: 92 [LECSN2-T EtherNet/IPâ„¢ (Absolute Encoder

Magnet: None, Mounting: D (Double Clevis), Bore Size: 50mm, Port Thread Type: Rc: 32-100 Bore; M Thread 12 to 25 Bore, Stroke: 20mm, Action: T (Single Acting, Spring Extend), Body Option: Standard (Rod End Female Thread), Auto Switch Groove: Z (Auto Switch Mounting Grooves), Mounting Bolt: None, Rod End Bracket: D (Simple Joint A Type + Joint)

DIQ-69200-OM002

DIQ-69200-OM002-A P R O D U C T N A M E High Pressure E/P Regulator MODEL/ Series/ Product Number ITVH Series Install and operate the product only after reading the Operation Manual carefully and understanding its contents. Specifically, read the safety instructions carefully. Keep this operation manual available whenever necessary.

ITV2-OM00112_E

ITV2-OM00112-C P R O D U C T N A M E E/P Regulator (10bit digital input type) MODEL/ Series/ Product Number ITV1000/2000/3000/2090-60* Series Install and operate the product only after reading the Operation Manual carefully and understanding its contents. Specifically, read the safety instructions carefully. Keep this operation manual available whenever necessary.

IN20267

M Ethernet/IP PC Personal Computer. P PLC Abbreviation for Programmable Logic Controller. A digital computer/controller used for automation of electromechanical processes. R Reboot Unless otherwise noted, the term reboot in this document means that the MPC must be power cycled. The specified position which the MPC has been directed to maintain.

Multi-connector with One-touch Fittings DMK Series No. of Connecting Tubes: 6, 12

Type KS KX Multi-connector Plug side only Socket side only Nil P S 23 04 3.2 4 KM Precautions KF M Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 13 to 17 for Fittings and Tubing Precautions. H/DL L/LL KC Caution How to Use Caution KK Please do not attach metal rods or metal pipes.

Speed Controller with

Safety Instructions Be sure to read Handling Precautions for SMC Products (M-E03-3) before using.

AS-FPQ/AS-FPG

ASF Recommended Applicable Tubing Tubing material Clean series polyurethane tubing: Series 10 Tubing O.D. 4, 6, 8, 10, 12 Polyurethane tubing: Series TU, Nylon tubing: Series T and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will decline. Relation between Operating Temp. and Max.

I

nder With rMMI hqnge NOtes m handle are not exch6nb(e to OCPOslte DOSlllOn. er toFICi.1 ror shape a caY19Cter on nancie. ,/%-' /,V/ /",://' -'ij,' . >,;--7r-',, ( \ /%,' \/' ,'\_ \ ' ---' Ar. 1 IIMCCoipiiajlcir . "'I

3 Port Air Operated Valve VPA3145/3165/3185 Series

3 Port Air Operated Valve VPA3145/3165/3185 Series How to Order 04 4 5 1 VPA3 Thread type VPA Air operated valve Nil Rc G NPT NPTF F N T Port size (IN, OUT port) Number of pilot 1 Single Symbol Port size Rc size VPA3145 VPA3165 VPA3185 Body size 03 04 (10A) 3 8 (15A) 1 2 (20A) 3 4 (25A) 1 1 4 6 1 2 06 10 12 14 20 8 1 2 1 Valve option Nil For ordinary pressure For vacuum and low pressure

Manifold Specifications

NPTF Side Side 1 0 G F Option 05 5 stations 10 10 stations Dimensions 65 (89.5) [68] 2-7 91 (115.5) [94] Mounting hole n-Rc 1 4 4-Rc 3 8 ( ): DC [ ]: AC, with indicator light n L L1 L2 2 87 100 3 125 138 4 163 176 5 201 214 6 239 252 7 277 290 8 315 328 9 353 366 10 391 404 L1 = 38n + 11, L2 = 38n + 24 n: Station Formula for manifold weight M = 0.16n + 0.1 (kg) 4-16-4

Water Regulator

Description Material Part number 4 Valve Stainless steel/NBR 1349173-5 Rc (NPT)1/8, 1/4 Gauge port size Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Slit Valve

2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Compact and

Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

Body Size: 40, Thread: NPT, Port: 1/2, Option: C + M, Attachment: T-spacer, Semi-Standard 1: Standard, Semi-Standard 2: Name Plate, Caution Plate for Bowl, and Pressure Gauge: psi, °F

Body Size: 60, Thread: Rc, Port: 1, Option: M [Round type pressure gauge (with color zone)], Attachment: T-spacer, Semi-Standard 1: Nylon Bowl, Semi-Standard 2: Exhaust Mechanism, Non-relieving

Body Size: 40, Thread: NPT, Port: 3/4, Option: C + M, Attachment: T + V, Semi-Standard 1: Standard, Semi-Standard 2: R + Z

Body Size: 30, Thread: Rc, Port: 3/8, Option: M [Round type pressure gauge (with color zone)], Attachment: T-spacer, Semi-Standard 1: Standard, Semi-Standard 2: Drain Cock w/Barb Fitting for ø6 x ø4 Nylon Tube