• e J1IS1Jr1aces, 15 105 tID 115 Same surface) With I pL 41 11 5+40~ With n pes. 2 15+40(1\ 2 2) 105 + 40[0 2 4) 110+40!n 2 (" 2. 4. 6. 8 ..) (" = 4. 8. 12. ' 6 ..) (" =4. 8. ' 2. '6.. ) (" = 4. 8. ' 2. ' 6 .. ) With 2 pes tDrtterent slIriaces, 90 80 85 '0 Same surface), Wilh 1 pc. D-M90V D-M90WV 80 + 3O
Note 4) L Note 2) CN1 CN1 Sequencer power supply .
position 2.6 LC3F2 D-M9NAV/D-M9PAV D-M9BAV 500(1000)(3000)(5000) Mounting screw M2.5 x 4 L Stainless steel Indicator light Slotted set screw (flat point) Indicator light Slotted set screw M2.5 x 4 L 8 2 8 3.2 4.6 2 4.6 2.6 SMC SMC 4 2.8 2.8 2.7 22 22 2.6 2.6 2.6 9.3 9.3 4 4 6 Most sensitive position 6 Most sensitive position 507 A
(Turn proof structure at pressurized state) 1.17-2 AL1000 to 6000 Standard Specifications AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 Model 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 M5 X 0.8 Port Size Air 1.5MPa 1.0MPa Fluid Proof pressure Max. operating pressure 1/4: 30 3/8: 40 1/2: 50 130 1/4: 30 3/8: 40 50 Min.operating flow (l/min (ANR))(1) 50 190 220 4 15 130 130 130 7 25
When closed 8.8 When open 22.8 7 Standard Type/Series MHZ2 Finger Position/Options Side Tap Mounting Type [1N1] Through Hole in Opening/Closing Direction [2N2] 4-MM Attachment mounting thread C C B A 4-H Attachment mounting hole S S O O B A Unit: mm Unit: mm Model A 3 4 5 6 Model A 3 4 5 6 B 5.7 7 9 12 C 2 2.5 4 5 MM M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 B 5.7 7 9 12 H 2.9 3.4 4.5 5.5 1
/C6 (6) C6 (6)/N7 (1/4") C8 (8)/N7 (1/4") Screw-in (Rc, NPT, G) 01 (Rc1/8)/N1 (NPT1/8)/F1 (G1/8) 02 (Rc1/4)/N2 (NPT1/4)/F2 (G1/4) Piping entry direction Straight, Rear Main materials of parts in contact with fluid PPS, PBT, FKM, Stainless steel 304, Brass (Electroless nickel plating), Si, Au, GE4F Piping*15 Body One-touch fitting Straight: 40 g Rear: 55 g Straight: 48 g Rear: 63 g Screw-in
This will cause a malfunction. 8 1 R , 4 1 R G 1 4 The dimensions in ( ): Connecting thread R X2: Stud parts nickle plated 8 1 R PPA 8 1 R , 4 1 R AL 8 1 R , 4 1 R X3: Wetted parts stainless steel MPa 8 1 R 8 1 R , 4 1 R 8 1 R , 4 1 R X4: Oil-free (Wetted parts degreasing) 8 1 R 8 1 R , 4 1 R How to Order G 43 01 Option Connection thread size Symbol Specifications Nil X2 X3 Stud parts nickel
Note 3) Max. number of rotations Metric size Inch size Model Port size Seal method AS 2 Note 2) 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" AS1ll1FSGl-M5 M5 x 0.8 Gasket seal VNote 4) V V V V V V 8 AS1ll1FSGl-U10/32 10-32UNF VNote 4) V V V V V V AS-FE KE AS2ll1FSGl-l01 1/8 V V V V VNote 4) V V V V AS2ll1FSGl-l02 1/4 VNote 4) V V V V VNote 4) V V V V AS-FG AS-FG R NPT Note 1) Sealant
4, !5, !6 Seal kit includes !4, !5, !6.
the attached hexagon socket head screws for mounting holes. 4-M3 x 0.5 thread depth 4 14 Mounting thread 4-M2.5 x 0.45 thread depth 3 Attachment mounting thread Auto Switch Mounting Groove Dimensions M2.5 x 0.45 4 1.3 12 26 4 15 Accessory option: Hexagon socket head screw (special screws) 3 3 6 6 2-2H9 +0.025 0 depth 2 10 10 Groove for auto switch mounting 2-M3 x 0.5 thread depth 4 Mounting
4-M3 x 0.5 thread depth 7 Mounting thread 32 72 2-M3 x 0.5 thread depth 4 Mounting thread 15.8 58 5.9 E 11 11 14 19 E 0 -0.1 4-2.6 through (Mounting hole) M3 x 0.5 17 18 0.8 18 0.8 Finger closing port M3 x 0.5 4-4.5 +0.1 0 Finger opening port Close: 0 E-E Open: 321 Use the attached hexagon socket head screws for mounting holes. 8-M2.5 x 0.45 thread depth 3 Attachment mounting thread 4-M3
Modular Type Regulator Series AR Regulator Series AR Port size Model Accessory AR10 M5 x 0.8 AR20 1/8, 1/4 AR25 1/4, 3/8 AR30 1/4, 3/8 AR40 1/4, 3/8, 1/2 AR40-06 Bracket 3/4 Square embedded type pressure gauge (except for AR10) AR50 3/4, 1 AR60 Pages 36 through 40 1 Round pressure gauge Regulator with back flow mechanism Series ARK AR20K 1/8, 1/4 Panel mount AR25K 1/4, 3/8 AR30K 1/4, 3/8
Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 ISA3-mmm-mmmB-LNm ISA3-mmm-mmmB-RNm 44.6 L1 L1 44.6 52.5 30 52.5 30 64.5 H 90.1 115.9 64.5 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 Supply port ISA3-C: Rc1/4 ISA3-F: G1/4 1 Unit: mm Stations 1 2 3 4 5 6 L1 55.6 93.6 131.6 169.6 207.6 245.6 L2 136.4 174.4 212.4 250.4 288.4 326.4 *: Bracket mounting only *1: Conforming to ISO16030 *2: Conforming to
B08 8 9 2.5 7 13 4.7 10.1 4 ZP25U U25 25 28 4 15 9.5 14 4 ZP10B B10 10 12 4 13 11.7 16 5.5 13.8 5.5 ZP32U U32 32 35 4 15 10 14.5 4.5 ZP13B B13 13 15 4 13 14.2 18.5 8.7 19 7.5 ZP40U U40 40 43 7 18 13.7 18.5 6.5 ZP16B B16 16 18 4 13 15.7 20 9.9 21 8.5 ZP50U U50 50 53 7 18 14.7 19.5 7.5 ZP20B B20 20 22 4 15 19 23.5 121.4 25 10.5 ZP25B B25 25 27 4 15 19.5 24 15.6 28 10.5 ZP32B B32 32 34 4 15
pressure 0.1 0.3 MPa 2 x Rc 1/4, NPT 1/4 HAA HAW 0.1 MPa Max. flow rate line B Pressure drop MPa AT IN 0.01 IDF IDU 0.7 MPa 0.5 MPa IDF FS A 0.001 IDFA A B Model Connection Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 Rc 1/4 NPT 1/4 SFA100-02 SFA101-02 SFA200-02 SFA201-02 SFA300-02 SFA301-02 46 76 IDFB 51 96 IDH 0.0001 1000 1 10 100 59 120 ID Flow rate L/min (ANR) IDG SFA20 SFA102, SFA202, SFA302 IDK 0.1
() 4 0 V() 5 FE (2)EX600-ED3PWR IN7/8 5 1 0 V() 2 0 V() 3 FE 4 24 V() 5 24 V() (3)EX600-ED4PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 24 V() 2 24 V() 3 0 V() 3 0 V() 4 0 V() 4 0 V() 5 (4)EX600-ED5PWR INM12 4 A code PWR OUTM12 5 A code 1 24 V() 1 24 V() 2 0 V() 2 0 V() 3 24 V() 3 24 V() 4 0 V() 4 0 V() 5 -29No.EX-OMN0027CN-D 2 SI IP67 -30No.EX-OMN0027CN-D EX600-ED2EX600
C-9 MYM50-15AK0502 GMY50 MC-16 P44 C-4 C-11.2 MYM63-15AK0503 GMY63 MC-20 P53 C-4 C-14 GMY20 GMY16 GMY25 GMY32 MYB20-15-A7164 MYB16-15-A7163 RCS-8 RCS-10 P16 P12 TMY-25 TMY-32 5.1 x 3 x 1.05 4 x 1.8 x 1.1 7.15 x 3.75 x 1.7 8.3 x 4.5 x 1.9 7 x 4 x 1.5 7 x 4 x 1.5 C-6 C-7 MYMK-20-stroke Side seal assembly Polyurethane MYMK-16-stroke MYMK-40-stroke MYMK-25-stroke MYMK-32-stroke Note) Two types