IDX-OM-W026

50Hz 3.9 5.7 8.4 11.0 m 60Hz 4.3 6.1 9.8 12.4 3/min (ANR)1 MPa 0.7 35 40 32 10 550 MPa 0.151.0 24085% (4) V AC200(50Hz) / AC200,220(60Hz) (2) A 4.3 / 4.7 3.3 / 3.5 4.3 / 4.7 3.3 / 3.5 6.0/6.6 7.2/8.0 (2) W 810 / 940 850 / 1070 810 / 940 850 / 1070 1450/1890 2000/2500 (3) A 10 15 R407C (HFC) g 42010 47010 73010 83010 55010 72010 R1 R11/2 R2 mm 10 1 2 kg 54 62 100 116 kW 22

IDX-OM-Y002

(Tightening torque: 1.0 Nm) Terminal width 9.9mm PE L3 L2 L1 24 23 6 5 22 21 Remote operation Error signal Ground RUN signal Power supply (to be connected to the user's equipment) IDF190D/240D Series 3.2Installation 3-5 IDX-OM-Y002 Chapter 3 Transportation and installation 4) Mount the front panel back. [Remote control] Voltage of AC200V is present on the terminal block.

IDX-OM-W014

-1 8 1 IDX-OM-W014 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W014 9 L 9 L 9-1 ( ) 9-2 1.6MPaADH4000-04 IDU3E-**-L IDU6E-**-L IDU8E-**-L N.O. () ) 0.151.6MPa ) 50L/min(ANR) IDU Series 9-1 9 1 IDX-OM-W014 9 L 9-3 Rc1/2 32 25 1) 2830Nm 30 (5) (22

IDX-OM-W023

IDX-OM-W023 8 K IDF-S1926 () 1 AD48-8-A-X2112 1 1) 2019 3 2019 2 SERIAL No.XP AD48-8-X2110 IDF-S0086() SMC WEB IDF-S0002 1 C42FP-260S 1 IDF-S0529 1 IDU Series 8-2 8 2 IDX-OM-W023 9 L 9 L 9-1 ( ) 9-2 1.6MPaADH4000-04 IDU8E-**-L IDU11E-**-L IDU15E1-**-L N.O. () ) 0.151.6MPa ) 50L/min(ANR) RC1/2 IDU Series 9-1 9 1 IDX-OM-W023 9 L 9-3 Rc1/2 32 25 1) 2830Nm 30 (5) (22

IDX-OM-W029

4) V ( 4) AC200/220V10% 50Hz/60Hz ( 4) AC230V (50Hz) 4.3 6.9 10.7 AC200V (2) A (50/60Hz) 4.2/4.8 6.7/7.3 8.2/9.3 AC230V (50Hz) 960 1570 2300 AC200V (2) (50/60Hz) 1100/1450 1570/2050 2000/2850 AC230V (50Hz) 10 20 AC200V (3) A (50/60Hz) 10 15 R407C (HFC) AC230V (50Hz) 45010 76010 55010 74510 g AC200V (50/60Hz) 47010 83010 55010 74510 R1 R11/2 R2 mm 10 1 2 kg 90 130 160 166 kW 22

IDX-OM-W095

ADH-E400 1.6MPa 0.051.6MPa 0.024m 3/h 0.7MPa IDFC60/70/80/90 Series 9-1 IDX-OM-W095 L 9.3 Rc1/225 30 5 IDFC60 2722IDFC70,IDFC80,IDFC90 22 IDFC60 (IDFC70/80/90) 1) 2830Nm 2) 9.4 1 1 IDFC60/70/80/90 Series 9-2 IDX-OM-W095 R 10 R R (GFCI) 10.1 10.2 IDFC60-23-R IDFC70-23-R IDFC80-23-R IDFC90-23-R (A) 10 15 20 30 (mA) 30 IDFC60/70/80/90 Series 10-1 IDX-OM-W095 R 10.3 M3.5

IDX-OM-W017

IDFA4E IDFA6E IDFA8E IDFA11E IDFA15E1 3 12 24 36 65 80 120 7 15 31 46 83 101 152 3/h m (ANR)1 10 17 34 50 91 112 168 MPa 0.7 oC 35 oC 25 230V 50Hz oC 550 MPa 0.15 MPa 1.0 oC 24085% 1 AC230V10% 50Hz 4 2 A 1.2 1.2 1.2 1.4 2.7 2.9 2 W 180 180 180 208 385 420 3 A 5 10 50 dB R134aHFC g 1505 2005 2305 2705 2905 3505 Rc3/8 Rc1/2 Rc3/4 Rc1 R3/8 R1/2 R3/4 R1 mm 10 12 kg 18 22

IDX-OM-W053

IEC 14-2 AC200V/2A DC24V/2A 20V/3mA (AC/DC) 14 1 14 T 14-3 ON ON/OFF 3 3 5 () 14-4 1) 2) 3) 4) : L,N PE 1,2 2,3 3 L N 1 2 PE M3 6.5mm :1.25mm 2 (17) (22) (21) (28) 14 2 14 T 14-5 (50/60Hz) AC200/200,220V GFCI GFCI R R TB L PE N 1 2 3 ILS MC TDR V V EDV MC TDR MC PTC OLR CM PE MC FM1 PE PRS P FM2 PE MC TDR CM FM1,2 OLR PTC PTC ILS PRS TB MC TDR C11 PE

IDX-OM-W035

IDFB22E-11 IDFB22E-23 IDFB37E-23 IDFB55E-46 IDFB75E-46 107SCFM 161SCFM 226SCFM 300SCFM 37 F (2.8) 3/h) 3/h) 3/h) 3/h) (182m (273m (384m (510m (ANR) (1) 120SCFM 173SCFM 258SCFM 353SCFM 45 F (7.2) 3/h) 3/h) 3/h) 3/h) (205m (294m (438m (600m 130SCFM 181SCFM 297SCFM 406SCFM 50 F (10) 3/h) 3/h) 3/h) 3/h) (221m (308m (504m (690m 100psi (0.7MPa) 100 F (37.8) 100 F (37.8) 41122 F (550) 22

IDX-OM-W038

(2) 17. 18. 19. 20. () IDH Series 22 2.2 IDX-OM-W038 2. 2.2.2 6.2 IDF-AB500 1 2 600mm 600mm 600mm 600mm 600mm 600mm 600mm 600mm 1 2 IDH Series 23 2.2 IDX-OM-W038 2. 2.2.3 4040 3 2 121 2.2.4 10mm ( IDH Series 24 2.2 IDX-OM-W038 2. 2.2.5 ,(6-1 ) 1 2 3(0.61Nm) 4 5 (17) (17) 3 7 6 5 1 2 4 PE M3 6.5mm (N.O) 2 1.25mm (N.C) IDH Series 25 2.2 IDX-OM-W038 2. 2.3

Pressure Relief 3 Port Valve with Locking Holes

Recommended tightening torque Unit: N-m Thread size 1/8 1/4 3/8 1/2 Torque 7 to 9 12 to 14 22 to 24 28 to 30 4. Do not apply torsion or bending moment other than the product's own weight. Support external piping separately as it may cause breakage. Non-flexible piping, such as steel tube piping, are prone to be affected by excess moment load or vibration.

IR30-OM00013

PRESS. 1. 0 M Pa O U TPU T PRESS. 0. 010. 2 M Pa M AD E I N J APAN So G No. o S o1 T P2 U Q3 V R4 W Z12 6- (1) Nm 1/4 3/8 1/2 12~14 22~24 28~30 (2) (3) (4) 7- (1) (2) (3) (4) (1) (2) (3) (1) (2) O 3 (3) 3 (4) P.5 0 (5) 0 8- (1) (2) (3) 21Nm (4) ON-OFF 5 79Nm (6) (7) (8) 0.5MPa 0.1MPa (9) AN Rc1/2 (1) (2) 9- (1) (2) 1.5~2 (1) 1 1.5 (2) (3) a b

VBA-OM-S001

OUT port Mounting VBA1: Tightening torque of 12 to 14 Nm (R1/4) VBA2: Tightening torque of 22 to 24 Nm (R3/8) Drain port Rc1/4 (4) O-ring : Mount the O-ring in the groove on the joint of the tank at the back of the booster regulator.

VBA-OM-P018

VBAT-M35 / VBAT-M35C () () 1 1 1 1 SMC ( 3 ) VBA2 VBA1 () 30 IN 1.5MPa VBA1A 2MPa, O 1.5MPa OUT VBATA1--X104 VBAT-V1 OUT 4 11 () 1 VBAT05A1-U-X104 VBAT10A1-U-X104 1.5MPa Q235B 5L 10L 075 6.6kg 11.5kg IN 3/8 VBAT-V1 OUT 3/8 1/2 1/4 VBA1 VBA1/VBA2 TSG R0003-2007 2 () IN (I) :VBA1 4VBA2 8 6 : OUT VBA2 (J) Rc3/8 VBA1 OUT IN Rc1/2 Rc3/8 () OUT VBA1 12~14Nm(R1/4) VBA2 22

VBA-OM-P019

VBAT38A1-T-X104 VBA4 4 VBA2 1 O VBA4 1 1 / VBAT-T 1 1 1 / VBAT-M36 / VBAT-M36C () () 1 1 1 SMC ( 3 ) () 30 IN 1.0MPa OUT VBATA1--X104 O VBAT-V1 OUT 4 13 () 1 VBAT20A1-T-X104 VBAT38A1-T-X104 1.0MPa Q235B 22L 38L 075 15kg 26kg VBAT-V1 IN 1/2 OUT 1/2 3/4 1/4 VBA2/VBA4 TSG R0003-2007 2 () IN :VBA2 8VBA4 8 10 (I) 6 : Rc3/8 OUT (J) OUT Rc1/2 IN Rc1/2 () OUT VBA2 22

VBA-OM-S006

Chiyoda-ku, Tokyo 101-0021 JAPAN 417 367 VBA11A 391 328 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 180 460 454 2010 SMC Corporation All Rights Reserve Rc1/4 URL http://www.smcworld.com Rc3/8 VBAT05S1 VBA10A VBAT10S1 VBA20A VBA22A VBA10A VBAT10S1-VBA2 IN OUT VBA2 VBAT05S1VBAT10S1VBA2 OUT VBA1 2 () VBA1 IN OUT OUT OUT VBA1 OUT IN IN :VBA1 4VBA2 8 O : VBA1 12~14Nm(R1/4) VBA2 22

VBA-OM-S007

OUT (J) 4-14-1 , Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Rc1/4 477 429.8 527 479.8 481 531 206 674 520 256 824 570 Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 2010 SMC Corporation All Rights Reserve IN (I) URL http://www.smcworld.com VBAT20S1 VBA40A VBA42A VBAT38S1 VBA40A VBA42A VBA20A VBA22A VBA20A VBA22A VBA4 VBA2 2 () OUT OUT OUT IN OUT IN :VBA2 8VBA4 8 10 O : IN VBA2 22

PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

PSxx-OML0002CN

] 31 1000 [F 5] 32 [F 6] 34 0 [F 7] 35 OFF [F 8] 36 OFF [F90] 37 OFF [F97] 39 OFF [F98] 41 [F99] 43 OFF -25No.PS-OML0002CN-G [F 0] (kPa/MPa) <> [F 0] ZSE ZSE [F 0] ZSE30AF ZSE30A ISE30A MPa 0.001 0.001 0.001 kPa 0.1 0.1 1 kgf/cm 2 0.001 0.001 0.01 bar 0.001 0.001 0.01 psi 0.01 0.01 0.1 InHg 0.1 0.1 mmHg 1 1 -26No.PS-OML0002CN-G [F 1] OUT1 OUT1 ONON OUT1ON,OFF 29 <> [F 1] 22

PSxx-OMM0006CN

X B(ZS-24-B) M45L B -16No.PS-OMM0006CN-E M8(3) (ZS-35-C/ZS-35-D) +(ZS-35-F/ZS-35-G) () ZS-35-C/D -17No.PS-OMM0006CN-E 79 Nm M5 (12mm) 1 2 1) 0.1 mm 2)0.1 mm 3)+0.15 mm -0.2 mm -18No.PS-OMM0006CN-E () TU0425 ( 4 2.5) -19No.PS-OMM0006CN-E (M8(3)22) Z/ISE40A--DC(+) -S/-R () NPN 2 Max.28 V80 mA 1 V R15 V 1 k S420 mA 12 V 300 24 V 600 50 OUT1 OUT2 DC(-) DC(+) -S/-R () NPN 2