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Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 9 MB f l 9 h ZZ + Stroke MB1 3 Width across flats B 3 Width across flats B CA2 With rod boot (Both sides) e e CS1 C76 9 9 l + Stroke 9 l 9 f f C85 Cushion valve Width across flats 1.5 h + Stroke h ZZ + 2 x Stroke C95 With air cushion CP95 NCM NCA Built-in One-touch fittings One-touch fitting port size P D-X

Input size = 2 bytes Output size = 4 bytes (for EX260-SEN1/-SEN2) 2 bytes (for EX260-SEN3/-SEN4) -26No.EX-OMP0013-E Example: Tag Set D00100 (2 bytes) to the Input, and D00150 (4 bytes) to the Output. -27No.EX-OMP0013-E If the allocation has been correctly completed, the registered IP address will be displayed with the SI unit icon in the network window. -28No.EX-OMP0013-E EtherNet/IPTM Device

E D P F Nil Model ZX1 K1 Vacuum switch (E) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Vacuum switch (ZSE2) ZX1-K1-E Adsorption confirmation switch (P) (Release to atmospheric pressure) Pressure sensor Spacer 1 (For side mounting) Manual override (Non-locking

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

: Double, 3-position/With light (For B side) E: Single, Double, 3-position/ Without light (A/B side common) V118-A B E V118-A B E 4 Pilot valve assembly 4 Pilot valve assembly Coil type Coil type Nil Standard (0.95 W) Y Low wattage type (0.4 W) Nil Standard (0.95 W) Y Low wattage type (0.4 W) 528 Construction VQ5000 Series Plug Lead Unit Metal seal type Rubber seal type e q w q w e SV SYJ

O e b u t ) m m ( . n i M e l o h . a i d t h g i e W ) g ( . o N t r a P T ) M ( H ) . x e H ( L g n i t n u o M e l o h M 6 1 / 3 M 0 0 5 0 E 2 Q K 1 X 4 1 M 7 1 4 3 5 1 5 . 6 1 5 . 3 0 3 4 / 1 M 0 0 7 0 E 2 Q K 1 X 4 1 M 7 1 5 . 4 3 5 1 7 1 6 . 4 0 3 6 1 / 5 M 0 0 9 0 E 2 Q K 1 X 6 1 M 9 1 8 3 7 1 5 . 8 1 6 8 4 8 / 3 M 0 0 1 1 E 2 Q K 1 X 0 2 M 4 2 5 . 2 4 1 2 1 2 7 2 6 2 / 1 M 0 0 3 1

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

[Dl r T l l L_J I Reter to Std How to Order Page2 Includes mounling screws and gaskets with yal\,/e unils.

e, axT01&5 I P[ot cotr asrmDty with oprator.

LH 0.2 d W W C B D E LY 4-LD MM Width across flats G LT NA NB Y X X Y S + Stroke LX B LS + Stroke ZZ + Stroke With rod boot h + l 10 f l e ZZ + l + Stroke (mm) Bore size (mm) A B a B C D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 d E F G GA GB J K LD LH LS LT LX LY M MA MM NA NB 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 M8 x 1.25 10 17 45 23 60

34 -1No.EX-OMO0030-E Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

E F F E E B C Cross interface E: 4-Rc F: Without thread A D E Model Y14-M5 Y24-01 Y24-02 Y34-01 Y34-02 Y44-02 Y44-03 Y54-03 Y54-04 Applicable model AC10 Port size M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 C 14 D 25 B 16 A 23 AC20 22 40 40 40 AC25, AC30 28 48 43 49 AC40 Cautions in Mounting 36 54 48 60 62 When mounting a cross interface directly on the IN side of the lubricator, be sure to use a

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

O e p u t ) h c n I ( . n i M e l o h . a i d d a e r h T F N U l e d o M H ) . x e H ( D L A M . t W ) f g ( 4 / 1 1 / 5 6 8 1 0 0 7 0 E R K 1 1 / 6 1 ) 6 4 . 7 1 ( 3 6 . 0 ) 6 1 ( 2 5 . 1 ) 5 . 8 3 ( 0 6 . 0 ) 8 0 . 5 1 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 5 3 8 / 3 / 1 8 4 1 0 0 1 1 E R K 1 ) 4 . 5 2 ( 0 8 . 0 ) 3 . 0 2 ( 3 8 . 1 ) 2 4 ( 1 9 . 0 ) 3 2 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 3

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.