ModelMin. operating pressure differential (MPa)Max. operating pressure differential (MPa)Flow characteristicsMax. system pressure (MPa)Weight (g) ACDCCbCv1/2 (15A)15VXZ2240-04--1.00.723.00.346.01.5760

ModelMin. operating pressure differential (MPa)Max. operating pressure differential (MPa)Flow characteristicsMax. system pressure (MPa)Weight (g) ACDCCbCv1/2 (15A)15VXZ2240-04--1.00.723.00.346.01.5760

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Regulator AR30 to 60

AR30 Option Thread type Port size Symbol Nil B E G P Applicable models AR30 to 60 AR30 to 60 AR30 to 60 AR30 to 40 Contents With bracket With square embedded type pressure gauge (with limit indicator) Round pressure gauge (with limit indicator) Panel mount (with set nut) Metric thread (M5) Rc NPT G Nil Note 1) 1 4 02 03 04 06 10 N F 3 8 Note 2) 1 2 3 4 1 Note 1) Bracket assembly is not

I

Ll 3.66 (93) 4.96 n26) (tss) (1e2) 8.86 (225) t0.t6 (258) 11.46 (2er ) 12.76 (324) 14.06 (357) < ):3 position n:with indicator light and surge voltage suppreseor L, 315 (80) 4.45 (fl3) 7.O5 (17e) 8.35 (a2) 9.O5 (245) r0.94 (2781 12.24 (3t1) 13.54 (344) Series VFSOOO Series NVFSOO Sub-Base Mounted/Dimensions inch(mm) NVF5144 Grcmmet/NVF5144-OG clommt Terminal/ilvF5l/t4-OE ( ):NVF5i44-OG-04

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

B C d H MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M NTJ-015A NT-015A NT-02 NT-03 NT-04 8 9.2 6 15.5 5 9.2 M5 x 0.8 4 10 20.5 10 8 8 9.2 8 16.5 6 11.5 M6 x 1.0 5 16 22.5 16 10 8 9.2 10 18.5 6 15 M8 x 1.25 5 20 24.5 20 13 10 11.5 12 22.5 11 19.6 M10 x 1.25 6 25 33.5 25 17 14 16 16 28.5 12 25.4 M14 x 1.5 8 30, 40 40.5 30, 40 22 Applicable bore size (mm) Part no.

Clamp Cylinder with Lock Series CLK1

switch 12 32 207 (46) 276 (62) 346 (78) 415 (93) IN (691) 1.11 BMA2-032 BMA2-050 BMA2-063 BMA2-040 D-H7A1, H7A2, H7B, H7C D-H7NW, H7PW, H7BW D-H7LF, H7NF 378 (85) 504 (113) 630 (142) 756 (170) OUT (1260) 2.02 Solid state switch 16 40 318 (71) 424 (95) 530 (119) 636 (143) IN (1060) 1.70 588 (132) 784 (176) 980 (220) 1180 (265) OUT (1960) 3.14 Reed switch D-B53, B54, B64, B59W 20 50 BA-32 BA-04

Precision Cylinder Series MTS

42 0.2 0 0.021 4-5.5 through 2 x 4-9, counter bore depth 5.5 (opposite side also) 50 0.2 20.5 20 10.5H7 36 0.2 20h7 5.5 42 0.2 54 47 48 90 47 26 151 + Stroke 177 + Stroke 36 0.2 4-M6 x 1.0, effective length 9 50 0.2 29 Rod end male threads 0 0.021 M12 x 1.25 Width across flats 17 20h7 M12 x 1.25 19.8 25.4 18 8 22 20.5 8.5 55 Stud bolt part number: MT-S40 Rod end nut part number: MCN-NT-04

Ambient Dryer Series AMG

J 1n 114 250 3/8 350 112 450 3/4 5 5 0 1 650 1 1i2 850-2 I I Port Sr" I PT pofts ilodel Bracket Beplacement Element AMG150 BM5'I AMG-EL150 02 1/4 (AMG 1s0) 03 3y8 (AMG 250) 04 1/2 (AMG 350) 06 3/4 (AMG 4s0) 1 o 1 ( A M G 5 5 O ) 14 1 1/2 (AMG 6s0) 20-2(AMGsso) AMG250 BM52 AMG-EL25O AMG35O BM53 AMG-EL35O AMG45O BM54 AMG-EL45O AMG550 BM55 AMG-EL55O AMG65O BM56 AMG-EL65O AMG850 BM57 AMG-EL85O

Filter Regulator AW30, 40

Accessories AW40 Applicable models AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 AW30, 40 Symbol Nil B C D E G P Contents With bracket Float type auto drain (N.C) Float type auto drain (N.O) With square embedded type pressure gauge (with limit indicator) With round pressure gauge (with limit indicator) Panel mount (with set nut) Direct operated type, Relieving type Note 1) Port size 02 03 04

Compact Electric Actuator Series LG1

How to Order B LG1 02 1 Cable length 02 03 04 05 2m 3m 4m 5m Nonstandard Motor Cables Cables for connecting nonstandard motors and drivers. Cable lengths other than those shown below should be arranged by the customer.

Air Cylinder NCM Series Stainless Steel Cylinders

NCDIIB 07$04(Xlil ior, "r*"*n"nf capattlity Rod Booi J-Nylon K-Neoprene DIilENStOt{S ! 7 Series NCM Piwt Bracket Rear Pivot Mount NCMC NC$-PCo75 31".%'..1%a".11/i' Pirsot Bracket (End Mount NCME) Series NCM Foot Bracket Rod Cleuis Jam Nut noart,reaat

Rotary Actuator NCRB1BW Series Single Vane / Double Shaft

Switch with left hand mounting A t r t fit gI Switch with right hand mounting t[ n-r ffi I+l+| + t 2 switches With right hand moun0ng D6A&1 D-8G&2 Rotation Speed Range Model 20--{.03-0.3sec/90' Model 30-O.04-0.3sec/90" lf a rotation speed is used slower than 0. 3sec/90" sticking may occur. _n_ | d l l"l l l n , t d .

Series M Miniature Fittings M3, R(PT) 1/8, M5

D L1 A KBC1 KBC2 KBC3 KBC4 13.6 17.6 25.2 27.0 30.0 32.5 35.5 34.0 26.5 28.5 31.5 29.5 23.4 37.0 46.7 74.4 13.0 14.0 15.0 5 Bracket Bracket: KBX Weight (g) Applicable model KBP, KBC KBE1-04 Part No. A KBX6 KBX12 KBX14 KBX16 KBX20 KBX22 7 13 15 17 21 23 27.5 26.1 25.4 24.4 22.6 21.6 In case of KBX6, use the enclosed mounting screws designed for KBP(plug) and KBC(cap).

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 2 3 4 Clean room class 1000 Accumulated pulse output Accumulated pulse output Output 1 Switch output Switch output Shipment Accumulated pulse output Accumulated pulse output Output 2 Switch output Switch output For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order PF2D5 13 20 1 Remote Type Sensor Unit Flow rate range 0.4 to 4l/min 1.8 to 20l/min 4 to 40l/min 04

Pneumatic Positioner IP300/IP3100

catalog N5-Gl l\,lodular type FFL Combinalion Recommended for control of pilot signal: NIT 200 ' OO 2G Elecko-pneumalic regulator Ref. catalog N8-01 HOW TO ORDER x x T I I L aterial I t NIL NBB (Buna) I S Copper Free Extarnal I TFPM (Viton) High Tamperature tP300 42 0 -T-T | l t l Supply & Output Preasure Gauge I t00 no gauge Operution 01 2kgllcrf r bsingte Acring 02 3 kgf/cm'z 03 10kg /cnf 04

Vacuum Regulator Series IRV

multiple pressures IRV 000 1 01 Work piece Vacuum regulator Body size 1 2 3 IRV1000 type IRV2000 type IRV3000 type Leak tester Pressure transducer Solenoid valve Solenoid valve Work piece Vacuum pump IRV Filter Thread type Nil N F Rc NPT G Optional Inspection equipment Port size Solenoid valve Application IRV Work piece Tank Vacuum pump Filter Symbol Bore IRV1000 IRV2000 IRV3000 01 02 03 04

5 Port Solenoid Valve Series SV

size: 50, 63, 80, 100 Applicable related components Total stroke time s Tubing Speed controller Solenoid valve Silencer 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 400 MB 50 10% 30% 70% 300 50% Stroke mm AS2201F -02-10 200 100 50% 30% 10% 70% 0 400 MB 63 300 Stroke mm AS3201F -03-10 200 100 0 ANA1 -C12 T1075 400 MB 80 300 Stroke mm AS4000-03 200 100 0 400 MB 100 300 Stroke mm 200 AS4000-04

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

Nil N F Rc NPT G OUT 1 IN Port size Symbol 01 02 03 04 06 Class 3 Class 2 Port size 1/8 (6A) 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Voltage 1 2 3 4 36 100VAC 200VAC 110VAC 220VAC 230VAC Orifice size Consult P/A regarding other voltages.

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.