MXY12max. stroke 400 mm ERIES VARIATION ERIES VARIATION SERIES VARIATION S Series Variation Piping and Switch mounting options Stroke Stroke adjuster options Bore (mm) Switch rail, centralized piping on one side. 50 100 400 350 250 150 Shock absorber Metal stopper Rubber stopper 300 200 6 8 12 Scale:100% % Scale:100% S S l 100% S l 100% Scale:100% Scale:100% Scale:100% Scale:100% Scale:100%
mount Stoke o25 1/qinch Stroke o37Veinch O5o-72 inch o75 V;inch lm1 inch 125 -1Yairch "Auto switch capabilily is not otfered on trunion or clevis mounl cylinders % , % , l z , % , 1 . 1 Y , 1 % % , % , 1 4 , % , \ 1 r , 1 ] / a '1( inch spaer is sdded lo lhe I g irch Series NCJP a :Available X : Not available Standard Accessories 8.8 PSI (0.6k97cm.) 20 PSI (1.2kgflcmr) 100 PSI (7kgf/cm,) 150
Type "A" and "8" valvs may be operated through ''internal' pilot pressure sopply porl situated in either their sub-plale (SPA)or slacking manitold blocks (IVBA). 8 PSIG (0.55 Bar) 18.20 PSIG (1.24 Bad 150 PSIG (10.3 Bar) [calla: Air {lubricaled or oil.free), any non.llammable, non-toxic, noncorroslve gases excepl oxygen, PILOT IDENTIFICATION: The otficial standard lor diagramming air logic
W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?
ranqe specilicatiofis, consult the faciory o How To Order o e Y I lccessories (optional) C'Serration joints (For NlP610) J Allen wrench (For tightening terminal cover) ' wlth joint, po1e, hex, nul, and cross rec*sed head screw N IP6 Electro-Pneumatic Pogitionet Electrical Entry 1/2 PF (female) 00 Lever type 10 Cam type Pressure geuge {SUA OUTt) 1 30 PSI (2kg cm'z) 2 45 PSI (3kgtcm') 3 150
Operating pressure range Proof pressure 1 MPa -10C to 50C Ambient and fluid temperature 30/150 m/s2 (at 0.35W,0.5W) Impact and vibration resistance Enclosure IP40 Solenoid specifications Power consumption 0.35W(standard), 0.5W(high pressure specification), 0.1W(Holding) Coil rated voltage 3, 5, 6, 12, 24VDC Allowable voltage fluctuation +/-10% of rated voltage Coil insulation Equivalent to
T N K W N S + Stroke F NA F R ZZ + Stroke MM x J B D F G H I K L N NA NB NN Model Port size REA25 REA32 REA40 Rc(PT) 1/8 46 27.8 13 8 20.5 34 10 70 M5 x 0.8 x 8 15 30 13 M26 x 1.5 Rc(PT) 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc(PT) 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 150
characteristic measurement conditions 0 1.0 Exhaust flow rate of the vacuum pump used for measurement: 500l/min (ANR) 10 Set point Upstream vacuum pressure: 100kPa (when downstream flow rate is 0l/min (ANR)) 20 0.5 Output deviation (%F.S.) 30 Maximum flow rate: 132l/min (ANR) (with upstream VAC. pressure at 39kPa) Set pressure (kPa) 40 0 50 60 0.5 70 80 90 1.0 100 80 60 40 20 50 100 150
(mm) 10 9 8 7 6 5 4 3 Manifold stations n L1 L2 2 180 165 150 135 120 105 90 75 60 235.5 223 198 185.5 173 160.5 148 123 110.5 8
excessive impact, which may result in the damage to the devices. 6 10 Bore size (mm) 6 Operating piston speed (m/s) 0.05 to 0.5 L Allowable kinetic energy (J) 0.012 0.035 100 5st 10st 15st W 100 80 Load weight W (g) 10 10 60 6 Load weight (kg) L 40 1 W 20 0.1 00 5 10 15 20 0.01 0.01 1.0 0.1 Eccentric distance L (mm) Maximum speed (m/s) 10 300 5st 10st 15st 20st 250 Load weight W (g) 200 150
double 10 Max. operating frequency (Hz) 3 position 3 Body ported Manual override (Manual operation) Pilot exhaust method Non-locking push type, push-turn locking slotted type, push-turn locking lever type Individual exhaust for the pilot valve, common exhaust for the pilot and main valve Lubrication Mounting orientation Not required Unrestricted Note 2) Shock/Vibration resistance (m/s2) 150
Response time (ms) 2 position single,double 3 position P R R P R 2 Position double 2 Position double 2 position single,double 3 position B A B A Max. operating frequency (Hz) Manual override Pilot exhaust Lubrication Mounting position Impact / Vibration resistance (m/s2) Protection structure P R R P R Individual pilot exhaust type, common exhaust(pilot and main valve)type Not required Free 150
page 60.) 15 or less Max. operating frequency (Hz) 10 Non-locking push type, push-turn locking slotted type, push-turn locking lever type Manual override (Manual operation) Individual exhaust for the pilot valve, common exhaust for the pilot and main valve Pilot exhaust method Body ported Lubrication Mounting orientation Shock/Vibration resistance (m/s2) Note 2) Not required Unrestricted 150
pressure 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Time sec Test circuit/Conditions P1 P2 Pump SRF30-m 2 Clean Room Regulator/Fluoro Resin Type Series SRF30 Flow-through Characteristics Particulate Generation Characteristics Particle concentration (particles/ml) Particle diameter: 0.1m or larger 400 1000 Value of specific resistance to that of supplied DI water 350 300 Resistivity (km) 100 250 200 150
position closed center 3 position 0.15MPa [21.75] 0.20MPa [29psi] (A) 4 (B) 2 Proof pressure 1.5MPa [217.5] 10 to 50C (14 to 122F) 5 to 50C (23 to 122F) Note 1) Note 1) Ambient and fluid temperature 1 (P) 5 (R1) 3 (R2) Lubrication Not required Manual override Non-locking push type/Slotted locking type (tool required) optional 3 position exhaust center (A) 4 (B) 2 Impact/Vibration resistance 150
For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) MPa Downstream pressure of valve (P2) MPa 0.8 Subsonic Critical pressure 0.9 0.6 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500
specifications Coil Specifications Seal material FKM, EPDM Ambient temperature 20 to 100C (4 to 212F) Fluid temperature 99C or less (210F or less) Enclosure Dust proof, Splash proof (equivalent to IP65) Environment Location without corrosive or explosive gases Valve leakage 0cm/min (0in/min) (with water pressure) Mounting orientation Unrestricted Vibration/Impact resistance m/s Note 1) 30/150
Direct Operated 2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150
46.6 46.6 81 88 94 144 144 97 97 123 135 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-1/4,3/8,1/2NPT 4-3/4NPT VH42 -N06 (Bottom porting) VH42 -N02/N03/N04 (Bottom porting) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-3/4NPT 4-1/4,3/8,1/2NPT 6 Body Mount/Dinensions Series VH (mm) / Body mount type Dimensions Scale: 35% VH600-N06/N10 2 (A) 4 (B) 1 (P) 132 152 411 132 300 223 150
pressure range Internal pilot type 5 to 50C Ambient and fluid temperature 25ms or less Response time (for 0.5MPa) Note 1) 5Hz Maximum operating frequency Non-locking push type, Slotted locking type Manual operation With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust type Not required Lubrication Unrestricted Mounting position 150