MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

AC

55.2 5 5 7 7 7 7 10 10 10 7.5 8.5 11 11 13 13 16 16 16 16 23 26 26 33 36 40 40 40 16 16 20 10 12.5 9.5 14.5 14.5 14.5 38.5 50 70.5 70.5 88 88 115 117.5 117.5 90.5 126.5 AC1020 AC2020 AC2520 AC3020 AC4020 AC4020-06 AC5020 AC5520 AC6020 1/8, 1/4 1/4, 3/8 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1 181 191 225.5 230.5 309.5 323.5 323.5 Option For piping adapter AC2520, 3020, port size 1/2: 40mm For

One-touch Fittings Series KQ2

20 10 21 16 KQ2R10-16 20.9 50.5 (29.5) 42 25.5 12 16 KQ2R12-16 20.9 50.5 58.3 (46.1) 37 25.5 22 Note) ( ): Values for soft nylon.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

Slider Type Ball Screw Drive/11-LEFS Series

8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

4..20 mA 3 Reserved 3 4..6 (Ch1 in) Analogue input or output range 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0..2 (Ch0 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 3 Reserved 4 4..6 (Ch1 out) Analogue input or output range 0 to 3: 0..10 V, 4: 0..5 V, 5: 1..5 V, 6: 0..20 mA, 7: 4..20 mA 7 Reserved 0: None, 1

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

Series MXQ 13226, 8, 12, 16, 20, 25 Air Slide Table RoHS How to Order Port thread type Bore size Symbol Type 6 to 16 M thread Nil Clean series 20, 25 Rc 13 Vacuum suction type (Special treatment on guide) TN 20, 25 NPT TF 20, 25 G MXQ 12 13 50 M9N MXQ 12 22 50 M9N Number of auto switches Copper, fluorine and silicone-free + Low particle generation Nil 2 pcs.

Table of Contents

0 -0.052 25h9 20 A port B port 63 2-M5 x 0.8 Connection port for axial port 21 3-5.5 depth(Through) (Body A side only) 3-5.5 depth(Through) (Body A side only) 11-2-16 16 Series CDRB2 Rotary Actuator Vane Style Dimensions: 10, 15, 20, 30 (With auto switch unit) Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

ported> 10 g6 -0.005 -0.014 0 -0.052 25h9 20 A port B port 63 2-M5 x 0.8 Connection port for axial port 21 3-5.5 depth(Through) (Body A side only) 3-5.5 depth(Through) (Body A side only) 11-2-16 16 Series CDRB2 Rotary Actuator Vane Style Dimensions: 10, 15, 20, 30 (With auto switch unit) Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

0 -0.052 25h9 20 A port B port 63 2-M5 x 0.8 Connection port for axial port 21 3-5.5 depth(Through) (Body A side only) 3-5.5 depth(Through) (Body A side only) 11-2-16 16 Series CDRB2 Rotary Actuator Vane Style Dimensions: 10, 15, 20, 30 (With auto switch unit) Single vane type Following illustrations show actuators for 90 and 180 when B port is pressurized.

SMC

16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 13-/22-MXS16-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 143 MXS Air slide table 1322Dimensions / MXS16 1322Axial piping (16) MXS16-P 132253.3 Maximum 6.5 Operating port 2-M5 x 0.8 26 12 23.5 12 Other dimensions are the same

Stability of suction position,

CL 2 5 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50BM ZP3E-125BM ZP3 12 30 S, F S, F 25 Displacement [mm] Displacement [mm] ZP3E ZP3E 20 8 N N ZP2 15 U U 10 4 ZP2V CL CL 5 ZP 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZPT ZPR ZP3E-63BM XT661 16 N, S, F Displacement [mm]

ZP3

46 6 6 109.5 Rotating, Non-rotating Rotating Rotating, With bushing Non-rotating 56 10 10 1.5, 2, 3.5 114.5 59 15 15 4, 6, 8 10, 13, 16 66.5 20 20 124.5 25 25 Wide selection of piping For 2 piping!

Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

SMC Pneumatic Clean Series

No 3000G 45-089 Stripper for round cable (2.0) can be used for a 2-wire type cable. 181 Applicable auto switch list Cylinder CDQSX CDBM2 CDM2X CDQ2X CDQS CDM2 CDG1 CDQ2 CDA2 CXSJ CDJ2 MGP MXQ Cylinder series MGF MXP MXS CDU REC CXS CYP CUJ 40/63/100 32 to 100 20 to 40 20 to 40 20 to 63 40 to 63 12 to 25 20 to 40 12 to 63 12 to 25 32 to 63 20 to 40 80/100 6 to 10 6 to 25 6 to 32 6 to 16 6

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

(mm) D H Bore size B GA L LB GC GB C A LX LH MM NB Y X NA Z S LD 3.5 through, 6.5 depth of counterbore 4 9.5 M4 x 0.7 12 28 8 4 8 31.5 85 65 10 15 12 14 16 5 11 20 23 16 4.5 through, 8 depth of counterbore 5 5 9.5 16 15 18.3 20 16 5 11 20 26 20 M5 x 0.8 28 8 10 16 31.5 86 66 Specific Product Precautions Be sure to read this before handling. Mounting Caution 1.

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

LEY-OM007

INP 1 INP ON 0.50 2 INP ON a bINP ON < / [mm/sec] [mm/sec] 1 4 30% 1 4 40% 5 20 35% 5 20 60% LEY*16** 21 50 60% 85% LEY*16*A* 21 50 80% 95% 1 4 20% 1 4 40% 5 20 35% 5 20 60% LEY*25** 21 35 50% 65% LEY*25*A* 21 35 80% 95% 1 4 20% 5 20 35% LEY*32** 21 30 60% 85% -41- LEY*16** LEY*25** LEY*32** LEY*16*A* LEY*25*A* A B C A B C A B C A B C A B C [kg] 1 1.5

High Vacuum Angle Valve

7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

PC Wiring System

Dimensions 2 x 5 machined for bar ring Mounting hole 4 x M3 x 0.5 5 1010 55 55 1.2 Alphabetical Index Length Measuring/ Counter 6 (3.7) 67.4 59 55 65 CH IN OUT (3) 33.5 139 8 40 158 41.2 (2) 55 55 2 x 8 6 x 4 16 14 16 16 14 16 14 10 25 25 597 Series PCW 16 Point Output Reduced Common Unit Specifications Model Output PCW-993195 Weight 80 g Refer to page 43 in CAT.E02-20 about the circuit