Stations: 2 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 3 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 6 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 8 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 5 Stations, Exhaust Style: 2 (Common Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 5 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 10 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Stations: 12 Stations, Exhaust Style: 3 (Individual Exhaust), A Port Size: 01 (1/8 Common Exhaust/Individual Exhaust), Thread: Rc

Vacuum Pad

q Pad unit Dimensions Part no.

FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

1 q t i PF2D540 o !0 u !0 !2ywr e !

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Compact Cylinder Series NCQ8

Q J E D-rod Dia.

Solid State Auto Switches

CE marking Precautions Caution D-A44C Relay, PLC 100 VAC 5 to 25 mA q Built-in 2.4 V or less (Up to 20 mA)/3.5 V or less (Up to 50 mA) Red LED illuminates when turned ON. CE marking 24 VDC (3) 5 to 50 mA 200 VAC 5 to 12.5 mA 1. Use cable whose O.D. is within the size in the figure to maintain water resistant performance. 2.

0.01

ID Construction IDG SFD101-02 SFD102-02 IDK w q r t e q r e w AMG AFF AM AMD AMH Component Parts Component Parts No. Description Note Material Aluminum alloy No.

Compact Guide Cylinder

2) 10 16 (12 x 2) 12 (10 x 2) 1 0 50 100 150 200 250 300 350 Maximum speed [mm/sec] 5 Compact Guide Cylinder JMGP Series Bore Size 12 (10 x 2), 16 (12 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view WA + Stroke/2 Z 4 x OA through 4 x OB counterbore depth OL 4 x MM depth ML L 2 x P (Plug) (OL) 4 x NN through PW X U H VA PE T R 2 x P (Plug) 2 x P D 2 x P (Plug) GB GA S Q

Size: Body Ported, Operation: Air Operated Style, Port Size: 1/8, Thread: Rc(PT), Voltage: Air Operated, Lead Wire: Air Operated, Surge Suppressor: None, Option: Foot

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: -, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: -, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: -, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -