size P , A port R port Body size Port 01 02 02 03 04 04 06 10 10 12 14 20 Nil 01 02 8 1 1 4 1 4 1 3 8 3 Body ported Base mounted 2 1 2 1 5 4 3 1 1 1 1 2 4 1 1 7 4 1 2 1 9 2 Without sub-plate 8 1 2 4 1 Option Description Part no. 0 3 0 3 0 3 0 3 0 3 0 3 VEX1A33 VEX1B33 VEX113 VEX123 VEX133 VEX153 VEX173 VEX193 B Bracket (With bolt and washer) VEX1-18-1A VEX1-18-1A VEX3-32A VEX5-32A VEX7-

Check Valve Series AK 1

NPT thread Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32 1/4 5/16 3/8 1/2 From One-touch fitting to male thread B Bushing type AKB 01 A 01 S With seal (Standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction Female/Male

Turntable Cylinder Series MGT

l (mm) l 300 200 300 MGTL80 P = 0.5MPa m 200 MGTM80 100 P = 0.5MPa Load weight m(kg) Load weight m(kg) 40 50 100 Larger than 75st 50st 25st Larger than 50st 30 20 50 40 25, 50st 10 30 5 4 3 2 20 10 20 30 40 50 100 200 300 1 1 2 3 4 5 10 20 304050 100 200300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) MGTL100 300 200 300 MGTM100 200 P = 0.5MPa 100 P = 0.5MPa Larger than

MHx-OMU0057

MH*-OMU0057 / / MHZ2-10* MHZ2-16* MHZ2-20* MHZ2-25* MHZ2-32* MHZ2-40* 1. 1-1. 2. 2-1 2-2 2-3 2-4 2-5 2-6 2-7 3. 3-1. 3-2. 3-3.

MHS

L L 2 . 3 . 6 4 . 5 . 6 . 2 2-3. 1 2 Nm mm 16 5 20 M30.5 0.59 6 25 6 8 32 40 M40.7 1.4 8 10 50 63 M50.8 2.8 10 80 M61 4.8 12 100 M81.25 12 16 125 M101.5 24 20 3 P9P11 7 Nm mm MHSH(J)3-32DA,B M30.5 0.6 6 40DA,B M50.8 2.8 10 50DA,B M61 4.8 12 63DA,B M81.25 12 16 80DA,B M101.5 24 20 A J/ / 8 MHS2 Nm mm MHS2-16D M40.7 2.1 8 20D M40.7 2.1 8 25D M40.7 2.1 8 32D M50.8 4.3 10 40D M61 7.3

Process Valve

2 (B)) 65 (Grommet terminal: E) 70 (Conduit terminal: T) Port size: refer to table below 74 (DIN terminal: D) Bracket 2 x 4.5 2 x M4 x 0.7 depth 7 Main port 1(A), 2(B) Model VNB1-6A VNB1-8A VNB1-10A 1 8 1 4 3 8 In the case of EZ or TZ, the length is longer by 10 mm.

212

Applicable model LVR20 LVR40 LVR50 03 3 x 2 LVR20 LVR40 LVR50 03 1/8" x 0.086" 04 4 x 3 05 3/16" x 1/8" 06 6 x 4 07 1/4" x 5/32" 10 10 x 8 11 3/8" x 1/4" 12 12 x 10 13 1/2" x 3/8" 19 19 x 16 19 3/4" x 5/8" LQ3 Metric size Inch size Symbol Applicable tubing size Applicable model Symbol Applicable tubing O.D.

PSxx-OMV0008CN

* 1015 10 1% 2162 LCD * -8No.PS-OMV0008CN-E ISE70G 02 L2 M 3 Y K T ISE70G 0~1 MPa ISE75G 0~2 MPa ISE76G 0~5 MPa ISE77G 0~10 MPa ISE78G 0~16 MPa 2 A A B B 02 Rc1/4 N02 NPT1/4 F02 G1/4 :ISO1179-1 1 M12 5m M12 5m T S : L IO-Link/1+2 NPNorPNP L2 1 M SI2 1 2kPaMPa / A ZS-50-A M46 2 B ZS-50-B M46 2 ZS-48-A ZS-31-B 5 m M12 ZS-31-C 5 m -9No.PS-OMV0008CN-E M12 4 24 OUT1 IO-Link

EXxx-OMU0020CN

EX245-EA2-1/2 9.1. . 9-1 EX245-EA2-1 . 9-2 EX245-EA2-2 61 No.EX-OMU0020CN 9.2. . 9-1 EX245-EA2-1 (WLH) mm 28.612061.5 200 g . 9-2 EX245-EA2-2 (WLH) mm 1412061.5 200 g EX245-EA2-2 P 36, 0.80.05Nm) 62 No.EX-OMU0020CN 10. 10.1. (EX245-DX1EX245-DY1) 88 EX600-ZT1 . 10-1 (EX600-ZT1) 63 No.EX-OMU0020CN 10.2.

Soft Start-up Valve

Dust-protected (DIN terminal: IP65*2) *1 If the temperature is low, use the product with dry air to prevent it from freezing. *2 Based on IEC60529 Solenoid Specifications Electrical entry Grommet DIN terminal Rated coil voltage [V] DC 24, 12 V AC 50/60 Hz 100, 200, 110 [115], 220 [230]*1 DC 24 V 10% of the rated voltage 12 V 10% of the rated voltage 100 V 10% of the rated voltage 110 V*1

ZL3-OM00801

3 3 dm 1 m 3) 0.1 d 0.5 0.5 d 1.0 1.0 d 5.0 () (mg/m 1 20,000 400 10 1 -70 1 0.01 2 400,000 6,000 100 2 -40 2 0.1 3 90,000 1,000 3 -20 3 1 4 10,000 4 +3 4 5 5 100,000 5 +7 6 +10 3.3.2 1 9 No.ZL3-OM00801-A 3.4 3.4.1 P5 (2/V) (3/E) G (1/P) 06 Rc3/4 Rc1 Rc1/8 04 Rc1/2 F06 G3/4 8() G1 G1/8 F04 G1/2 N06 NPT3/4 5/16(inch) N04 NPT1/2 NPT1 NPT1/8 3.4.2 1) 2),

EXxx-OMN0035CN

7 2 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 4 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 (EX600-DXE) 1 2 3 4 5 6 7 8 0 2 4 6 8 10 12 14 Bit 0 Bit 2 Bit 4 Bit 6 Bit 8 Bit 10 Bit 12 Bit 14 14 15 16 17 18 19 20 21 1 3 5 7 9 11 13 15 Bit 1 Bit 3 Bit 5 Bit 7 Bit 9 Bit 11 Bit 13 Bit 15 -30No.EX-OMN0035CN-A (EX600-DXF) 0 1 2 3 4 5 6 7 2 Bit 0 Bit 2 Bit 4 Bit 6 Bit

IDX-OM-W094

-1 5.2 . 5-2 5.2.1 . 5-2 5.2.2 . 5-2 6 . 6-1 6.1 . 6-1 6.2 . 6-4 IDFA60/70/80/90 Series IDX-OM-W094 7 . 7-1 7.1 . 7-1 7.2 GWP . 7-2 7.3 . 7-3 7.4 . 7-4 7.5 . 7-5 8 A . 8-1 8.1 . 8-1 8.2 . 8-1 8.3 . 8-1 8.4 . 8-1 8.5 . 8-2 9 C . 9-1 9.1 . 9-1 9.2 . 9-1 10 L . 10-1 10.1 . 10-1 10.2 . 10-1 10.3 . 10-2 10.4 . 10-2 11 R . 11-1 11.1 . 11-1 11.2 . 11-1 11.3 .

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

73 93 112.5 123 4 72 83 103 125 135.5 5 82 93 113 137.5 148 6 92 103 123 150 160.5 7 102 113 133 162.5 173 8 112 123 143 162.5 173 9 122 133 153 175 185.5 10 132 143 163 187.5 198 L1 L2 (L3) (L4) (L5) 10 Base Mounted Plug-in SI Unit Series VQ100 VV3Q11-X11 (L5) (L4) (L3) L2 L2 (5.5) (35.0) (45.0) (23.5) (12.3) (21.5) Manual Override D Side U Side 1 2 3 4 5 n 2-M5x0.8 (E Port) 2-M5x0.8 (P

VHK

(mm) M5 M5 4 4 Port size R Port size R 1 8 1 8 6 6 1 4 1 4 8 8 3 8 3 8 10 10 1 2 1 2 12 12 Flame Resistant Type (UL-94 Standard V-0 equivalent) 1(P): One-touch fitting 2(A): One-touch fitting 1(P): Male thread 2(A): Male thread 2(A) 2(A) Port size R Applicable tubing O.D. (mm) 1 8 1 4 3 8 1 2 1(P) 4 6 8 10 12 1(P) Applicable tubing O.D.

3 Position Cylinder Series RZQ

RR 50, 63 Flat washer (Included) 4-HR 2-RR Flat washer (Included) b 2-N 4-O 4-N b Section b-b (mm) Bore size (mm) A B C D E FA FB G H I J K L M N O1 O P Q RA RB RR RH T W Z 100.5 82.5 14 22.4 45 33 12.5 9 M8 x 1.25 60 4.5 17 18 34 5.5 M6 x 1.0 9 Rc1/8 24.5 14 10 5.5 7 4.5 49.5 14 32 110 92 16 28 52 35 14 9 M10 x 1.5 69 5 24 18 40 5.5 M6 x 1.0 9 Rc1/8 26 14 10 5.5 7 4.5 57 14 40 118.5 96.5

Mini Free-Mount Cylinder Series CUJ: ø4, ø6, ø8, ø10

10 Single acting (spring extended) Series CUJ How to Order Bore size 4 6 4mm 6mm 8 10 8mm 10mm 6 D 10 CUJ B Without Auto Switch CDUJ B 6 F8N S D 10 With Auto Switch With auto switch (built-in magnet) Basic type (through type) Mounting B Number of auto switches 2 pcs. 1 pc.

CEx-OMG0106

Contents Chapter 1: Read Before Use 49 Chapter 2: General 2-1. Features 10 2-2. Position Control 11 2-3. Positioning at Cylinder Rod 11 2-4. Minimum Interval 11 Chapter 3: System Configuration 3-1. System Checking Flow Chart 1213 3-2. System Configuration 14 3-3. Pneumatic Circuit 1516 Chapter 4: Selection Method 4-1. Selection Procedure 17 4-2. Selection Information 1819 4-3.

0.4

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) Nil Without filter F With filter Note) 100 Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specifications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port

Guide Cylinder Series MGG

Y (mm) Deflection Y (mm) 400st 2 500st 400st 2 300st st: Stroke (mm) st: Stroke (mm) 400st 1 300st st: Stroke (mm) 200st 1 300st 1 200st 100st 200st 100st 100st 75st 75st 0 0 0 0 0 0 10 20 30 40 50 60 10 20 30 40 50 20 40 60 80 100 Allowable end load F (N) Allowable end load F (N) Allowable end load F (N) MGGL 40Stroke 4 (Ball bushing type) 800st Deflection Y (mm) 3 700st 600st 2 500st 400st