SMC Corporation of America
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Part No. cD-P11 cD,p12 Load voltage 100 vAC ziovac 24VDC 2smA 12.5mA 5omA Inch Contacl Proleqtion gox/Dimensions 0.80 1_20 1.40 ot7,.., 15 iffiqffi Hou To MountThe Auto Stoitch fllL_ #F*t-q -s-ffi*""*"-'" *-jil-|--.e*',**" @712 OTo set swikh posili,m, loGen tfie scre$/ and rno f|e sviitcfr to fie desircd po6itbn. f ighten tre soewtotre recommended brque (0.9" 1.1 lb indr). o Series NCDJP

E l r ^ r ^ r ^ n i ^ \ Ambient and fluid temoerature l;NPTF (temale) Air connections lrPF (temale) Electrical connections Aluminum diecast N,laterial of body 6.7 (3) Weight lbs (kgf) { For split ranqe specilicatiofis, consult the faciory o How To Order o e Y I lccessories (optional) C'Serration joints (For NlP610) J Allen wrench (For tightening terminal cover) ' wlth joint, po1e, hex, nul

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations R

Initial value Recommended value No Servomotor Rotation Direction can Pn000 0 0001 (+Counter motors side ) Tuning-less Function Related Switch Pn170 1401 1401 Electronic Gear Ratio (Numerator) *3 Pn20E 4 65536 Electronic Gear Ratio (Denominator) *3 Pn210 1 1250 750 375 1500 1000 500 1875 1250 625 LEFS25(L,R) LEFS32(L,R) LEFS40(L,R) Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8

-7No.PS-OMM0002CN-F 0~50(5) SUS630() SUS304() ( ) * 10~15 15 /1% 1941 LCD * -8No.PS-OMM0002CN-F ISE80 02 N 3 ISE80 -0.11MPa ZSE80 0-101KPa ZSE80F -100100KPa ISE80H -0.12MPa Y K + T + 2 02 R1/4 N02 NPT1/4 F02* G1/4 G01 Rc1/8 A2 URJ1/4 B2 TSJ1/4 A (ZS-24-A/ZS-35-A) B *(ZS-24-D) C D + F02 ISO228-1 1 *1 L M SI*2 P (psi)*1 1 2 ISE80H: MPa MPa kpa N NPN1 P PNP1 A NPN2 B PNP2 R

03-12 ( ( ( ( ) ) ) ) 0.1 2 () C-R () C-R DC 3% AC 125% 3 4 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / / / / / (SSR (SSR (SSR (SSR )AC )AC )AC )AC 1) (C-R ) OFF 2)() 1.52 -10 Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 5 VFR3000-OMJ0001-A VFR3000 VFR3000 VFR3000 VFR3000 Series Series Series Series 5 5 5 5 / / / / ( ( ( ( ) )

[Option] How to Order Light/Surge voltage suppressor Rated voltage Nil S Z R U Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor With surge voltage suppressor (Non-polar type) With light/surge voltage suppressor (Non-polar type) DC CE-compliant 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC For AC voltage valves there is no S option.

(Type 20 manifold) SYJ3 2 5 M 1 M3 3 10 Body ported Base mounted (4 port) 2 3 10 3 5 M SYJ3 (Manifold use only) Base mounted (5 port) 10 4 M 2 5 3 SYJ3 Clean series 4 port Manual override Port size Body option Nil: Non-locking push type Nil: Without sub-plate 3: Main/Pilot valve common exhaust type For type 31, S31, 32, S32 manifold 5 port R port P, E port (With gasket and screws) D: Push-turn

Description Material w e Bronze Element 11352-5B Bowl assembly AF11-4 AF11-4 JIS B2401 G130 r O-ring NBR 630332 t NBR 113136 113136 O-ring 11217 112310 NBR u Gasket for element Bowl (polycarbonate), drain cock, bowl guard and clamp ring are assembled. Assembly part no. for bowl (polycarbonate) and drain cock is 11316A (for AF800/900).

Standard Manifold body Aluminum Brass q Retainer Manifold base Coil assembly Aluminum Aluminum Brass w e r Class H molded t y Stainless steel, Copper Stainless steel Class B molded Core assembly Armature Stainless steel, Silver Gasket NBR FKM/EPDM u Stainless steel FKM/EPDM Polyacetal, NBR Valve assembly i Return spring O-ring o Stainless steel !0 NBR FKM/EPDM Support spring !

2 w y r u e ASN !2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

1Tank pressure gauge 272 272 153 238 153 238 e e 189.5 153 2 189.5 2 u u w r i w r i o o Material Note Main Parts List Part no. Spare Parts/Replacement Parts Part No. No. Description No. Qty.

Pressure Control Equipment Industrial Filters w e w e r r !4 !4 !5 !5 @8 @9 @9 #0 @8 @7 Theres no seal kit for CLKQPDA50. Theres no seal kit for CLKQGDA50. The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CKQD/CLKQD. The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CKQD/CLKQD. *BLUE links will lead to purchase pages.

Pressure Control Equipment Industrial Filters w e w e r r !4 !4 !5 !5 @8 @9 @9 #0 @8 @7 Theres no seal kit for CLKQPKC50. Theres no seal kit for CLKQGKC50. The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CKQK/CLKQK. The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CKQK/CLKQK. *BLUE links will lead to purchase pages.

CKQPMC50 The below figures indicate the CKQPMC50-RAL. w e w e r r !4 !4 !5 !5 @8 @9 @9 #0 @8 @7 Theres no seal kit for CLKQPMC50. Theres no seal kit for CLKQGMC50. The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CKQM/CLKQM. *BLUE links will lead to purchase pages. Seal Kit List Description Material Note No.

CKQPUA50 The below figures indicate the CKQPUA50-RAL. w e w e r r !4 !4 !5 !5 @8 @9 @9 #0 @8 @7 Theres no seal kit for CLKQPUA50. Theres no seal kit for CLKQGUA50. The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CKQU/CLKQU. The numbers are the same as the "Construction" of the Best Pneumatics No.3 Series CKQU/CLKQU.

However, for FHM-055, the flat portion of the magnetic material functions as the contaminant adsorption surface. w Mount the magnetic separator in a location where fluid is constantly flowing by in laminar flow. e Avoid locations such as near the suction pipe or return pipe, places where there is turbulence, and locations where the flow speed is 3 m/min or greater. r If necessary, fix the

Description Material q w e r No. Description Material Note o !0 !1 !2 NBR Brass Brass Steel O-ring Body Needle Lock nut Nipple Zinc alloy Stainless steel Brass Stainless steel Needle guide Electroless nickel plated Electroless nickel plated Black oxidized coated Handle E type snap ring Electroless nickel plated Replacement Parts No.

6 q e r t !5 w !4 !0 u y 32 to 50 With auto switch (built-in magnet) !6 q e r t !5 i o !1 !3 !2 !7 w !4 !0 u y Description No.