ZQ

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 71.9 (74.9) 66.9 (63.1) (M5 x 0.8) Vacuum port (V port) Note 4) 57.3 (M5 x 0.8) SM C 29.4 3 20.2 30.5 P 20.3 9.7 V Exhaust part 17.7 22.8 0.8 (Grommet type) 3 107 10 Note 1) The above dimensions are for ZQ11U-K1 -DC.

Compact Hydraulic Cylinder

Bore size (mm) 20 32 40 50 63 80 100 M5 x 0.8 M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M10 x 1.5 2 4 4 4 4 4 4 3 3 3 6 11.5 24 34 7. Do not use two cylinders facing one another horizontally or vertically in such a way that their piston rods strike each other. 8.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

x 0.8 depth 7.5 M5 x 0.8 depth 8 M6 x 1 depth 12 Up to 300 301 to 1500 M8 x 1.25 depth 16 M10 x 1.5 depth 16 M10 x 1.5 depth 22 M12 x 1.75 depth 22 No trunnion mounting female thread is provided for clean series. ( ): Denotes the dimensions for long stroke.

Slider Type/Ball Bushing Bearing

x 0.8 M5 x 0.8 M6 x 1.0 L 106 108 138 LL 44 48.5 56 LW 71.5 75.5 86 M M5 x 0.8 M5 x 0.8 M6 x 1.0 MM 8 8 10 N 16.5 18 20.5 NL 15 15 18 NT 8 8 9 EA 26.5 26.5 29 CY1L CY1H15 CY1H20 CY1H25 CY1H CY1H Model P M5 x 0.8 Rc1/8 Rc1/8 PA 50 50 65 PB 62 65 75 PP 21 23 27 S 161 169 209 TW 65 70 75 W 88.5 92.5 103 XA XB Z 194 205 250 ZZ 17.5 19.5 23.5 CY1F CY1H15 CY1H20 CY1H25 CYP 11.3 9.5 D-X Technical

New

Thread depth N 2 x P 1(IN), 2(OUT) port B 2 x M5 Thread depth N K K J H J H Conduit terminal DIN terminal Cable 0.24 to 0.47 Q F D D S G1/2 Qp0.08 F 1.34 (1.73) 1.26 R 1.24 0.99 T C K C R E E Sp0.08 A A B1 2 x P 1(IN), 2(OUT) port B1 2 x P 1(IN), 2(OUT) port B B 2 x M5 Thread depth N 2 x M5 Thread depth N K J H G1/2 J H (inch) Grommet Grommet (with surge Dimensions Size Port size voltage

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

3.5 80 ZPT80H-B8 82 16.5 28 M8 x 1.25 4.5 80 ZPT80H-B10 82 16.5 28 M10 x 1.5 4.5 Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 Model A 63 ZPT63H-A16 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16 82 16.5 28 M16 x 1.5 4.5 1191 Series ZPT ZPT H-A16 (Male thread) 100 125 ZPT H-B (Female thread) 100 125 Width across flats 60 M16 x 1.5 70 Hexagon width across flats 22 4 x M5

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Thread type 20 25 32 40 50 63 80 M5 x 0.8 Rc NPT Stroke (mm) Refer to Standard Stroke on page 8-25-21.

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

x 0.8 (External pilot port) 15.5 15.5 4 Insulation Black () B A 17.5 A B 35 X P EB EA Insulation Red (+) E P 17 4.3 56 17 M5 x 0.8 (Pilot EXH. port) 65 62.5 109.1 66.5 (For E type) L (Lead wire length) 0.3 mm2 1.55 22 9.5 18 18 5 x 1/4" (Piping ports) 28 L plug connector with cover (LL) 52-SY5140 (R) -LL-02 L 104 (Lead wire length) Insulation: Red (+) Insulation

Miniature Regulator

fitting R1/8, M5 x 0.8 2 1 6 One-touch fitting 5/32" One-touch fitting NPT1/8, M5 x 0.8 1/4" One-touch fitting M5 x 0.8 female thread is cut inside the pipe.

180

Gripper Cam Type MHY2-20D 2 x M5 x 0.8 thread depth 8 Pin hole positioning (Mounting thread) 14 5 19 42 4H9 + 0.030 depth 4 0 4 x M4 x 0.7 through (Thread for mounting attachment) 8 4 x M5 x 0.8 thread depth 10 10 0.005 0.025 (Mounting thread) 5 9 2 x 5.5 through (Mounting hole) 2 x M5 x 0.8 thread depth 10 18 (Mounting thread) (Limted area for mounting attachment) 38 48 36 36 37 25 21H9

MU

S 55 58 60 74 75 P M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 NY 26 28 36 42 46 NX 6 6.5 8 10 11 NC 7.5 depth 4.5 9 depth 5.5 10.5 depth 6.5 13.5 depth 8.5 17 depth 10.5 MM M10 x 1.25 M12 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 NS 43 45 44 54 53 N 14 15.5 16 21.5 21.5 KA 10 12 14 18 18 ND M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M12 x 1.75 NE 4.3 5.1 6.9 8.7 10.5 ZZ 69 72 75 92 96 Model MUB25 MUB32 MUB40

Speed Controller: Standard Type Series AS In-line Type 1

1 14143 14144 14147 Stainless steel NBR 15-9-30 4 Speed Controller: Standard Type In-line Type Series AS Dimensions: AS1000-M3 Dimensions: AS1000-M5 Male M5 x 0.8 Female M5 x 0.8 Dimensions: AS2000/3000 Dimensions: AS4000 2-1/4 to 1/2 AS 2-port size ASP ASN AQ ASV Dimensions AK Max. Min.

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8 1

M1 Weight (g) ASV120F-M3-04 ASV220F-M5-04 ASV220F-M5-06 Model 5 8 9 M3 x 0.5 M5 x 0.8 M5 x 0.8 5.5 8 8 9.3 9.3 11.6 7.2 9.6 9.6 21.4 22.8 23.6 25 27.6 28.4 9.8 11.1 11.1 28.6 31.4 31.4 26.1 28.6 28.6 25.8 27.7 27.7 23.3 24.9 24.9 12.7 12.7 13.5 4 4 6 Reference dimensions of M thread after installation. Inch Size Applicable tubing O.D. d T H D1 D2 L1 L2 L3 L4 A Max. Min. Max. Min.

MHL2

D(Finger closing port) M5 x 0.8 (Finger closing port) M5 x 0.8 20Auto switch mounting groove (4 locations) 4-M6 x 1 (Piston rod and rack screw) Width across flats 10 (4 locations) Closed E 4-M5 x 0.8 through Open F (Thread for mounting attachment) (mm) A B C D E F G H 40 70 90 J 98 152 192 Model MHL2-16D MHL2-16D1 MHL2-16D2 45 75 95 60 90 110 28 58 78 68 110 130 98 170 210 128 200 240 26

AKH/AKB Series

Effective area (mm) Weight g A M5, UNF10-32> H L M Model (Width across flats) AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 Applicable tubing 2.8

PA300/500/700

1/4,1/8 (Breathing port) M5 x 0.8 16.5 20.4 Body ported: VPA342VA B 20.4 16.5 NO NC 2(A) 26.5 21.5 2.25 Switch mark 26.7 23.2 Bracket (Mounting hole) 23.2 (PA port) Rc 1/8 (Mounting groove for M5 thread) 2-R2.7 PA 5 36 35 35 3.5 21.5 31 17.5 1.6 15 26.7 45 9 54.5 65.6 54.4 1(P) 3(R) 4.5 (Piping port) Rc 1/4,1/8 (Breathing port) M5 x 0.8 16.5 20.4 5-5-15 4 Series VPA300/500/700 Dimensions

3 Way,3 Port Solenoid Valve NVZ Series

2-OOO-M5 NVZ312M-O60-M5 Top portsd NW3Z3-2(}01 NW3Z3-20-ffir-OOr *,*l oal, stattr^ -TiA|*rk plet dy: oxTr70-25-1A ll there are more than 6 shtions, rupply air and exhaust fYofi both 6ids ol manitold. 'rgJ 20 stations Applixble valvee NVZ312R-OOO-M5 r{w3z3.2rR-o1 NW3Z3-21R-@ 1-007 Bbnk phe !!

MU

X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8Depth7.5 M6 X 1Depth12 M8 X 1.25Depth13 M8 X 1.25Depth11 M10 X 1.5Depth15 M10 X 1.5Depth14.5 M12 X 1.75Depth18 M12 X 1.75Depth15 Rod end female thread (mm) (mm) P M5 X 0.8 Rc(PT)1 /8 Rc(PT)1/8 Rc(PT)1/4 Rc(PT)1/4 MM M6 X 1Depth12 NY 26 28 36 42 46 H 14 14 15 18 21 NX 6 6.5 8 10

AS

VCHC AS1201F-M3, AS1211F-M3 AS1301F-M3, AS1311F-M3 AS1201F-M5-02, AS1211F-M5-02 AS1201F-M5, AS1211F-M5 AS1301F-M5, AS1311F-M5 AS2201F-01, AS2211F-01 AS2301F-01, AS2311F-01 ASS Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa ASR ASQ Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Number of needle rotations Number of needle rotations Number of