High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

XL

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

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Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

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Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

Manilold Sa$e as NVJ3OO Series manitold base Type 20,41, S41,42,S42.

-fl Seies

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

VCC

M4 x 16 Round head combination screw Tightening torque: 1.2 0.2 Nm y w Note) e Note) r Note) e Note) t r q e w Note) o i q u t The figure shows the 2 port valve manifold block assembly.

Modular Type Filter Regulator Series AW

IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slotBdimension Work piece mounting reference plane 6.5 27.5 T-slot B Cross Section C-C (mm) D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model Refer to page 301 for mounting.

2 Phase Stepper Motor/Without Motor Brake Series LXP

D E Model LXPB2BC-50 LXPB2BC-75 LXPB2BC-100 LXPB2BC-125 LXPB2BC-150 LXPB2BC-175 LXPB2BC-200 34 44 52 120 90 4-M6 x 1 Section C 30 D Refer to page 300 for mounting.

PSxx-OMF0005CN

Corporation All Rights Reserved No.PS-OMF0005CN-E-E

CLA

_(mm) e ,.

Booster Regulator/Air Tank

Description q O-ring 1 1 (VBA1A) 1 1 (VBA2A) w Hexagon socket head taper screwed plug (For drain port) 1 1 1 e Hexagon socket head cap screw 4 4 (VBA1A) 4 4 (VBA2A) r Anchor bolt/nut 4 Keep the manufacturers certificate of compliance in a safe place. 1030-1 A Air Tank VBAT Series Dimensions VBAT05AN1-E-X105/VBAT05A1-E-X105 VBAT05SN1-E-X105/VBAT05S1-E-X105 Connected to VBA10A, 11A Tank IN

SMC Pneumatic Clean Series

With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.

XM, XY

A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ XM XY XM XY B DH J XSA K XVD 45 XGT CYV A Fn (KF flange) E M (mm) Model A 121 148 177 B 80 100 117 C 31 39 45.5 D 53 61 80 E 75 87 114 Fn 95 110 Fd 52 70 83 G 104 126 150 H J K M XYC-50 XYC-63 XYC-80 178 209 268

Thermo-chiller

Effective in preventing foreign matter from entering the customer equipment and chiller Step e Press the key to stop operation.

Pulse Valve

port 1/8, 1/4 (Rc, NPT, G) 2 x P Port size 2 x P Port size F E F E D D C B C B Port size: Size 14 A A ( 52) ( 52) (20) (20) Silencer (Option) Silencer (Option) Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot port 1/8, 1/4 (Rc, NPT, G) Exhaust port 3/8 Exhaust port 3/8 2 x P Port size 2 x P Port size F E F E G G D C B D C B 20 20 Dimensions [mm] Model Port size P A B C D E F G JSXFAF-06 3/4 74 55.5

CM2

Please delete the unnecessary part. 20 20 17.5 13 8.5 8 6 23 25 25 17.5 13 10.5 8 6 26 32 32 17.5 13 11.5 8 6 28.5 40 40 21.5 16 15 11 8 32.5 1.4-17 Standard: Double Acting Single Rod Series CM2 Integrated Clevis (E) CM2E Bore size Stroke CJ1 CJP CJ2 CM2 C85 CG1 MB C95 CA1 CS1 (mm) Stroke range Bore K NA NN A D I L AL CD MM B1 CI N CX F G H H1 E 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13

MRHQ

D D t D t t c e c c e e u u s u s s d i d i d i g g g o o o n n n r r r P P P A A A 1 1 9 9 9 9 9 9 w w 9 w 9 9 m I m I n n 9 9 9 u d u d a a a r u r u o s o F s tr F i e tr i e 9 9 9 D r r D r r r e e e e v v s 1 d d s 1 1 d o o i i n g n g n n n n a a H H n P n P g g r r o o i i s s d d e e u u D D c c t t d A d A r r w w a a 12-11-1 2 Courtesy of Steven Engineering, Inc.-230 Ryan Way,