Clean Room Regulator/Fluoro Resin Type Series SRF30

pressure 0 0 0.5 1 1.5 2 2.5 3 3.5 4 4.5 5 Time sec Test circuit/Conditions P1 P2 Pump SRF30-m 2 Clean Room Regulator/Fluoro Resin Type Series SRF30 Flow-through Characteristics Particulate Generation Characteristics Particle concentration (particles/ml) Particle diameter: 0.1m or larger 400 1000 Value of specific resistance to that of supplied DI water 350 300 Resistivity (km) 100 250 200 150

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

position closed center 3 position 0.15MPa [21.75] 0.20MPa [29psi] (A) 4 (B) 2 Proof pressure 1.5MPa [217.5] 10 to 50C (14 to 122F) 5 to 50C (23 to 122F) Note 1) Note 1) Ambient and fluid temperature 1 (P) 5 (R1) 3 (R2) Lubrication Not required Manual override Non-locking push type/Slotted locking type (tool required) optional 3 position exhaust center (A) 4 (B) 2 Impact/Vibration resistance 150

Direct Operated, 2 Port Solenoid Valve, For Water, Oil, Steam, Air, Series VX

For Air Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) MPa Downstream pressure of valve (P2) MPa 0.8 Subsonic Critical pressure 0.9 0.6 0.7 0.8 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

specifications Coil Specifications Seal material FKM, EPDM Ambient temperature 20 to 100C (4 to 212F) Fluid temperature 99C or less (210F or less) Enclosure Dust proof, Splash proof (equivalent to IP65) Environment Location without corrosive or explosive gases Valve leakage 0cm/min (0in/min) (with water pressure) Mounting orientation Unrestricted Vibration/Impact resistance m/s Note 1) 30/150

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Direct Operated 2 Port for Oil Dimensions (mm) (N.C.) 1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150

VH Series, 4 Way Hand Valve

46.6 46.6 81 88 94 144 144 97 97 123 135 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-1/4,3/8,1/2NPT 4-3/4NPT VH42 -N06 (Bottom porting) VH42 -N02/N03/N04 (Bottom porting) 2 (A) 2 (A) 46 54 1 (P) 3 (R) 1 (P) 3 (R) 4 (B) 4 (B) 4-3/4NPT 4-1/4,3/8,1/2NPT 6 Body Mount/Dinensions Series VH (mm) / Body mount type Dimensions Scale: 35% VH600-N06/N10 2 (A) 4 (B) 1 (P) 132 152 411 132 300 223 150

Multistage Ejector Series ZL

pressure range Internal pilot type 5 to 50C Ambient and fluid temperature 25ms or less Response time (for 0.5MPa) Note 1) 5Hz Maximum operating frequency Non-locking push type, Slotted locking type Manual operation With vacuum pressure gauge Pilot valve individual exhaust type, Main valve/Pilot valve common exhaust Pilot exhaust type Not required Lubrication Unrestricted Mounting position 150

A dedicated solenoid valve is not required for unlocking, thus reducing the initial costs and replacement of the existing equipment.Bore size (mm): 32-63, Stroke (mm): 50-150, Can be locked at any position within the entire stroke, Selection of retraction locking & extension locking is possible, Piping not required for unlocking CLAMP CYLINDER W/LOCK CLKQ, CLK2.

Auto switches can be mounted on any of the 4 surfaces with no projection of the switch.Rotary clamp cylinder w/auto switch mounting grooves, Bore sizes (mm): 12, 16, 20, 25, 32, 40, 50, 63, Standard stroke (mm): 10, 20, 30, 50 (depending on bore size), Clockwise or counterclockwise rotary direction, Auto switch capable, Cylinder, Rotary Clamp, CLAMP CYLINDER, 150 lb

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

The multi-stage ZL series is a high-efficiency vacuum generator, which operates at 150% efficiency (compared to about 40% for other units). For each scfm of compressed air it consumes, the ZL generates an incredible 1.587 scfm of suction flow. The ZL is available with a built-in vacuum switch with digital readout for design flexibility.

Standardized mounting options conform to both ISO 21287 and 6431.Conforms with the ISO 21287 standard, Bore sizes of 20, 25, 32, 40, 50, 63, 80 & 100 mm, Large stroke range from 5 mm up to 150 mm, Construction is similar to the current CQ2 lateral load resistant specification, Snap ring construction allows easy and quicker maintenance, Auto switches can be mounted on any of the four sides

Standardized mounting options conform to both ISO 21287 and 6431.Conforms with the ISO 21287 standard, Bore sizes of 20, 25, 32, 40, 50, 63, 80 & 100 mm, Large stroke range from 5 mm up to 150 mm, Construction is similar to the current CQ2 lateral load resistant specification, Snap ring construction allows easy and quicker maintenance, Auto switches can be mounted on any of the four sides