&snac

3 4 5 5 6 7 l\caut ion l n s t a l l a t i o n l n s t a l l a t , I D G s * M ( V ) i o n . r o n i n l e t s i d e 0 f m e m b l a n e a i r J i u t t , s u r e l v i n s t a l l m i s t s e p a r a t 0 r a n d m i c r o m i s t s e P a r a t o r ' t w i f n o u t t t r e m , i t d 0 e s n o t p e r f o r m ' w e l l b e c a u s e v a t e r a n d o i l f l o w i n ' l t F I u s h P j P

Aluminum High Vacuum Angle Valve

D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m. Add L to the end of the part number when 3 m is desired, M when 1 m, and Z when 5 m. Example) -M9NL !

Compact Guided Cylinder series 90-MGP and 91-MGP are designed for high side load applications found in material handling, lifting and stopping. 90-MGP is made from materials compatible with secondary battery manufacturing. 91-MGP includes a "Lub-retainer" and is compatible with low dew point (40°C) applications. The cylinder utilizes an ultra-compact design by  incorporating the cylinder

Battery-less

Absolute (Step Motor 24 VDC) LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 Model Lead Pushing speed [mm/s] Pushing force (Setting input value) LEYG16M L mE A/B/C 21 to 50 45 to 65% LEYG25M L mE A/B/C 21 to 35 40 to 50% LEYG16 mE M L 160 Lead 2.5: LEYG16 EC M L 140 120 Lead 5: LEYG16 EB M L LEYG32M L mE A 24 to 30 50 to 70% B/C 21 to 30 Force [N] 100 Lead 10: LEYG16 EA M L 80

Table of Contents

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 L2 (mm) Mer Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

SMC Basic Pneumatics

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .

Electric Actuator/Slider Type

[m] 2 2 5 5 A 10 B LE-CSM: Motor cable (13.7) SSCNET#optical cable (LECSS -S , LECSS2-T ) LE CSS (30) L 1 LE-CSB: Lock cable Motor type (11.8) (13) Cable length S AC servo motor L 0.15 m K 0.3 m J 0.5 m 1 1 m 3 3 m L (29.6) Cable description S SSCNET III optical cable LE-CSE: Encoder cable LE-CSSis MR-J3BUS M manufactured by Mitsubishi Electric Corporation. 18.8 (30) L 37.4 Regeneration

CQ2

l X 140 l M6 X 45 l X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 120 l X 145 l M8 X 50 l X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 125 l X 150 l M10 X 55 l X 60 l X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 95 l X 130 l X 155 l M10 X 65 l X 70 l X 75 l X 80 l X 85 l X 90 l X 95 l X 100 l X 105 l X 140 l X 165 l M3 X 25 l X 30 l X 35 l X 40 l X 45 l X 50 l M3

Made to Order

M L CXS series: 20, 25, 32 M L CXS series: 10, 15 Stroke Stroke CXS 10 M L CXS 15 M L CXS 20 M L CXS 25 M L CXS 32 M L 150 210 229 75 Model Stroke SS ZZ Z 80 135 152 50 120 175 192 70 150 205 222 80 90 145 162 60 80 100 100 155 172 110 165 182 175 257 287 125 180 197 200 282 312 120 180 199 65 125 207 237 150 232 262 110 170 189 125 185 204 110 192 222 110 180 204 120 202 232 120 190 214

MY1

The spacing (l) of the support must be no more than the values shown in the graph on the right. (kg) m 200 190 180 170 l 160 (4000) (4000) 150 140 130 (3200) (3200) m l 120 Weight (m) Caution 110 MY1B100 MY1B100 m 100 1. If the cylinder mounting surfaces are not measured accurately, using a side support may cause poor operation.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Lead wire length symbols: 0.5 m Nil (Example) A73C 3 m L (Example) A73CL 5 m Z (Example) A73CZ None N (Example) A73CN D-P5DWL type is available from 40 up to 100 only. There are other applicable auto switches other than the listed above. For details, refer to page 7-6-23.

ISO Cylinder

Please contact SMC regarding water resistant types with the above model numbers. 2 1 m lead wire is only applicable to the D-A93. None N (Example) H7CN Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed above, refer to page 111 for details.

LJ1H

: Transfer load (kg) a : Work piece acceleration (mm/s) Me: Dynamic moment L : Overhang to work piece center of gravity (mm) m a = 2000 1000 L1 a = 3000 0 2 4 6 8 10 Transfer load m (kg) 600 L2 400 Mer L2 (mm) Rolling Yawing m 200 L2 Mer 0 2 4 6 8 10 m Transfer load m (kg) 3000 a = 1000 L3 (mm) 2000 L3 1000 a = 2000 m a = 3000 Mey a 0 2 4 6 8 10 Transfer load m (kg) Refer to page 145 for

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

W H T U Pin no. n LEC-CSNA-1 39 37.2 12.7 14 14 773 LECY M U Series Options cable type M LEC Y C 1 Cable length (L) Motor type Y AC servo motor L* 0.2 m J 0.5 m 1 1 m 3 3 m Cable description M MECHATROLINK-2cable U MECHATROLINK-3cable * Not available for the MECHATROLINK2cable. * LEC-CYM-l is JEPMC-W6002-ll-E manufactured by YASKAWA CONTROLS CO., LTD. * LEC-CYU-l is JEPMC-W6012-ll-E manufactured

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 1.5 3 3 5 5 8 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) A 10 B 15 Actuator side Driver side C 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

CV/MVGQ

Electrical entry Grommet L plug connector M plug connector DIN terminal G L M D Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

CV/MVGQ

Electrical entry Grommet L plug connector M plug connector DIN terminal G L M D Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

15

end position. 863 Motorless Type Electric Actuator/Guide Rod Type LEYG Series Model Selection LEYG SeriessPage 868 Moment Load Graph Selection Conditions Vertical Horizontal L L L m m L Mounting orientation m m Max. speed [mm/s] SpeedVertical Work Load Graph 200 or less Over 200 Graph (Sliding bearing type) q, w t, y u, i Graph (Ball bushing bearing type) e, r o, !

MGP

Note 2) Model MGPL (ball bushing) cannot be used as a stopper. 1 5 20 30 40 50 10 Transfer speed: (m/min) Bore Sizes 32 to 100/MGPM32 to 100 (Slide bearing) MGPM32 to 100 (Slide bearing) m m 2000 l: Approx. 50mm l: Approx. 50mm 100 1000 80 Weight of transfered object: m (kg) 63 500 400 50 300 40 200 When selecting a model with a longer l dimension, be sure to choose a bore size which