Rotary One-touch Fittings Series KS/KX

17 14 12.8 1 8 1 4 1 8 17 23 23 29 37 55 63 81 75 92 14 4 13.4 10.4 8 1 4 17 17 18.5 15.2 6 26.1 18.0 3 8 1 4 10 3 8 1 2 3 8 1 2 22 18.5 21 7 22 36.3 29.5 24 12 24 20.9 8 22 46.1 46.1 Reference dimensions after R(PT) thread installation.

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

4 !4 Meter-in type Meter-out type Component Parts Meter-in type Meter-out type No.

CP95

4 4 6.5 26 146 190 46 32.5 15 4 40 24 35 16 G 1/4 14 M6 x 1.0 6.5 M12 x 1.25 13 27 16 105 4 4 4 9 30 163 213 52 38 17 4 50 32 40 20 G 1/4 15.5 M8 x 1.25 8 M16 x 1.5 16 31.5 16 106 6 4 5 10.5 37 179 244 65 46.5 24 5 63 32 45 20 G 3/8 16.5 M8 x 1.25 8 M16 x 1.5 16 31.5 16 121 6 4 9 12 37 194 259 75 56.5 24 5 80 40 45 25 G 3/8 19 M10 x 1.5 10 M20 x 1.5 21 38 16 128 8 4 11.5 14 46 218 300 95

Process Valve

VNB1 -6A, 8A, 10A VNB2 -10A, 15A VNB3 -20A VNB4 -25A VNB5 -32A, 32F VNB5 4 -32A, 32F VNB6 -40A, 40F VNB6 4 -40A, -40F VNB7 -50A, 50F VNB7 4 -50A, 50F No.

CP95

15 4 4 4 6.5 26 146 190 46 32.5 M12 x 1.25 40 6.5 16 105 24 13 35 16 27 G 1/4 14 M6 x 1 4 17 4 4 4 9 30 163 213 52 38 M16 x 1.5 50 8 16 106 32 16 40 20 31.5 G 1/4 15.5 M8 x 1.25 6 24 5 4 5 10.5 37 179 244 65 46.5 M16 x 1.5 63 8 16 121 32 45 16 20 31.5 G 3/8 16.5 M8 x 1.25 6 24 5 4 9 12 37 194 259 75 56.5 M20 x 1.5 80 10 16 128 40 45 21 38 25 G 3/8 19 M10 x 1.5 8 30 5 4 11.5 14 46 218 300

Clean Air Module

Note 2) Refer to the specifications of display unit for the flow rate value per pulse. 340 Clean Air Module LLB Series Dimensions LLB3-1-PRVSF V2 49.5 HAA HAW Mounting hole for 4 x M4 AT 45 37 35 IDF IDU 1.5 4 20.5 278.5 50 IDF FS A Valve open and locked position Rc 1/4 (NPT 1/4) Rc 1/4 (NPT 1/4) IDFA 90 (Lever operating direction) Max. 91 IDFB A Hand valve Valve closed position 5.5 39 IDH

JXCx-OMT0028CN

LEC-CGD LEC-CGD N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 LEC CN4 LEC CN4 No. No.

3

12 4 4 6 4 12 8 8 0 4.5 (2) 16 12 4 12 4 4 6 4 12 8 8 0 Note 1) ( ): D-A96, A9V Note 2) When setting an auto switch, confirm the operation and adjust its mounting position.

Miniature Fittings Stainless Steel 316 MS Series Applicable Tubes: ø 3.2, ø 4, ø 6 Connection Thread: M5, R 1/8

Gasket Body Low tightening torque Tight seal Stainless steel 316 Specifications Applicable tubing material FEP (3) Nylon Soft nylon (1) Polyurethane Super PFA (2) Modified PTFE (4) 3.18/2 4/2.5 6/4 4/2.5 6/4 3.18/2.18 4/2.5 6/4 4/2.5 6/4 4/2.5 6/4 6/4 Applicable tubing O.D.

Wedge Cam Operation Provides

4 !3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Wall mounting z y Features 4 Wb: MGGLB25-200 (4.35kg) x y x z Wa: Connection plate t =10 (880g) MY2H40G-500 3. Ceiling mounting Features 4 4.

MXH Series Compact Slide

depth 4.4 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l Guide rail width 9 4-M4 x 0.7 Depth 10 4-M4 x 0.7 Depth 6 2-M5 x 0.8 9 5.5 17 21.5 52.5 53.5 25 25 27 5.5 26 27 6.5 6.5 16 17 5 NS 10 12.5 25 14 42 + Stroke 56 + Stroke 4-M4 x 0.7 Depth 6 12 10 + Stroke Stroke (mm) LT NS LB J LA 5 58 20 4 10 10 58 20 10 4 15 68 30 20 4 20 68 30 4 20 25 78 40 4 30 30 78 40 30 4

5 Port Solenoid Valve Series SQ1000/2000

1.TURN B 74.5 28 5.5 35 13 Approx. 10 2-M4 clamping screw Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position EXH. outlet Approx. 9 D side U side Station 1 2 3 4 5 6 7 8 n 37 60 Approx. 9 Release for switching connector direction C8: R(EXH) port C8: P(SUP) port For top ports 4 4 4 4 4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3,

Series VC, Series VCB, Direct Operated 2 Port Solenoid Valve for Heated Water

(8A) 3.0 (435) 1/8: 0.21 (0.46) 1/4: 0.24 (0.53) 2 VCB2 0.5 (72) 9.2 (0.51) 4 0.3 (43) 11.7 (0.65) 5 2.0 (290) 6.3 (0.35) 3 0.8 (116) 9.7 (0.54) 4 1/4 (8A) 3/8 (10A) 1/2 (15A) 1/4: 0.42 (0.93) 3/8: 0.40 (0.88) 1/2: 0.49 (1.08) 3 VCB3 0.5 (72) 14.4 (0.80) 5 3.0 (435) 0.2 (29) 24.8 (1.38) 7 0.1 (14) 37.8 (2.10) 10 3.0 (435) 6.3 (0.35) 3 1/4 (8A) 3/8 (10A) 1/2 (15A) 3/4 (20A) 1.3 (188) 10.8

Suction cups with flange

4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C

I

10V DC 2 1/4 (2000, 3000 Type) 3 3/8 (2000, 3000 Type) 4 1/2 (3000 Type) T H R E A D T Y P E M O N I T O R O U T P U T Rc N NPT T NPTF F G 1 Analog Output 1 ~ 5V DC 2 Switch Output / NPN Output 3 Switch Output / PNP Output 4 Analog Output 4 ~ 20mA DC Courtesy of Steven Engineering, Inc. !

CG5-S

M14 x 1.5 44 93 16.5 6.5 150 1/8 50 to 1200 35 32 27 69 32 20 21 14 58 11 58 M8 x 1.25 7 18 10 40 74 4 66 90 5.5 M18 x 1.5 55 109 21.5 11.5 176.5 1/4 63 to 1200 35 32 27 81 38 20 21 14 58 11 72 M10 x 1.5 7 18 12 45 74 4 82 110 7 M18 x 1.5 69 109 21.5 11.5 178 1/4 80 to 1400 40 37 32 99.5 50 25 28 20 71 13 89 M10 x 1.5 10 22 12 55 82 4 100 130 7 M22 x 1.5 80 130 28 17 212 3/8 100 to 1500 40

CHKD/CHKG

Mounting bolt Example) CQ-M5x55L 4 pcs.

Pin Clamp Cylinders

4 5 5.5 11.6 6 7.5 16.4 9.5 095 9.6 096 9.7 097 9.8 098 9.9 099 10.0 100 135 13.6 136 13.7 137 13.8 138 13.9 139 14.0 140 13.5 195 19.6 196 19.7 197 19.8 198 19.9 199 20.0 200 19.5 10 7.5 20 14 10.5 25 20 13 27 4 4.5 9.2 6 5.5 12.6 6 8 17.2 145 14.6 146 14.7 147 14.8 148 14.9 149 15.0 150 10.5 105 10.6 106 10.7 107 10.8 108 10.9 109 11.0 110 14.5 D11 7.5 20 15 10.5 25 4 4.5 9.8 6 6 13.3

Nozzle Type Ionizer

mm, Length 500 mm O.D. 6 mm, I.D. 4 mm, Length 500 mm O.D. 6 mm, I.D. 4 mm tube (Length 10 mm) 0.15 0.10 O.D. 6 mm, I.D. 4 mm, Length 100 mm O.D. 6 mm, I.D. 4 mm, Length 100 mm 0.05 Ionizer 0.00 0 300 100 200 Flow rate [L/min (ANR)] * When a pressure above each line is used, the maintenance warning function may work and turn on the LED.