Compact Cylinder with Lock Series CLQ

Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 16 21 +0.058 0 +0.4 +0.2 -0.2 -0.4 -0.2 -0.4 -0.3 -0.5 -0.3 -0.5 -0.3 -0.5 -0.3 -0.5 +0.058 0 20 10.5 12.8 14 M10 x 1.25 M10 x 1.25 20 25.6 +0.058 0 +0.4 +0.2 +0.058 0 22 16 12 14 M14 x 1.5 M14 x 1.5 36 41.6 +0.058 0 +0.5 +0.3 +0.058 0 28 20 16 20 M18 x 1.5 M18 x 1.5 44 50.6 +0.070 0 +0.5 +0.3 +0.070 0 38 23 21 27 M22 x 1.5 M22 x 1.5 56 64 +0.070 0 +0.5

MU

Spring return ZZ + Stroke Spring extend Z + 2 x Stroke 7-8-17 18 Plate Cylinder Series MU Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint Z + Stroke ZZ + Stroke Z + Stroke ZZ + Stroke (mm) (mm) ZZ 116 127 138 171 175 Z 107.5 117 127 155 159 Z 107.5 117 127 155 159 LX RR 8.5 10 11 16 16 LX RR 8 10 10 16 16 LD LU 11 14 15 20 20 LD LU 13 14 17 23 23 LC 16 18 20 28 28 LC

Fluoropolymer Tubing Variations

Straight 0.0 Note) Refer to the table Series above, as the tubing length differs depending on each size. 20 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Operating temperature C 504 Fluoropolymer Tubing (PFA) Inch Size TILM Series RoHS Series KQ2 Inch size Size Model Tubing size inch mm inch mm TILM01 1/8" x 0.086" 1/8" TILMB01 1/8" x 1/16" 1/8" TILM05 3/16" x 1/8" 3/16" 4.75 1/8" 3.15

HRX-OM-X071

8.5.1 HRR050-A/W*-20-* .8-16 8.5.2 HRR050-A*-40-* .8-18 8.5.3 HRR050-W*-40-* .8-19 Chapter 9 Documents . 9-1 9.1 Specifications . 9-1 9.1.1 HRR050-A-. 9-1 9.1.2 HRR050-W-. 9-3 9.1.3 Refrigerant with GWP reference . 9-5 9.1.4 Communication specification . 9-5 9.2 Outline dimensions . 9-6 9.2.1 HRR050-A-20. 9-6 9.2.2 HRR050-W-20. 9-7 9.2.3 HRR050-A-40. 9-8 9.2.4 HRR050-W-40. 9-9 9.3 Flow Chart

Valve Single Unit

20 00N 20 stations NPT SS5X3-20-05 (5 stations) NPTF 00T Stations3 2 1 Connector assembly for L and M types Refer to page 1-6-8.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

F 6.8 4 LC LZ X Y Z ZZ 1/8 8 8 8 42.5 34.5 30 24 46.5 37.5 33.5 28 7 5.5 5.5 5 88 64 62 62 22 17 17 13 41 32 32 26 6 6 5 50 45 45 41 40 32 25 20 24 22 22 18 14 12 10 8 171 137 135 131 21 19.5 19.5 15.5 M26 x 1.5 M26 x 1.5 M20 x 1.5 27 25 25 21 M10 x 1.25 M8 x 1.25 20 20 20 10 8 8 8 30 28 28 25 104 102 102 3.2 3.2 3.2 55 40 40 40 75 55 55 55 4 4 4 7 6.8 6.8 1/4 1/8 1/8 16 13 13 11 8 8 M10

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

16 16 16 21 26 39 19 HA 40 40 40 50 30 70 70 70 N 4 4 4 4 6 6 6 8 GA 16 16 16 16 51 61 109 159 Model F 35 35 35 40 30 55 65 70 13-/22-MXS16-10 13-/22-MXS16-20 13-/22-MXS16-30 13-/22-MXS16-40 13-/22-MXS16-50 13-/22-MXS16-75 13-/22-MXS16-100 13-/22-MXS16-125 789 MXS 1322Air Slide Table Dimensions: MXS16 1322Axial piping (16) MXS16-P 1322Air Preparation Equipment Pressure Control Equipment

VZ100/300/500

VV4Z1 05 20 1 VP VG Option Thread type 02 2 stations A port F: With foot bracket VP Nil Rc G NPT 00F 20 20 stations R port 00N S070 Rc NPTF 00T VQ P port Rc Bracket is not mounted.

7ND9071en

ND9206 13 13 16 19 120mm 15 14 40mm 3.5 5 40mm 9 11 140mm 17 16 50mm 4 6 50mm 10 12 VC_60 120mm ND9206 18 16 60mm 5 6.5 60mm 11 13 140mm 21 19 70mm 6 7.5 70mm 12 14 180mm 25 21 20mm 3 4 20mm ND9203 ND9206 VD_48 NDX VD_48 20mm 9 11 VC_70 140mm ND9206 20 19 40mm 4 7 40mm 12 15 180mm 24 22 50mm 5 8 50mm 14 17 240mm 28 27 60mm 6 9 60mm 16 19 VC_80 180mm ND9206 31 30 70mm 7 10 70mm 18 21 240mm

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

15 17 20 25 118 139 167 202 14 16 19 24 15 17 20 25 Single Shaft Type The dimensions below show pressurization to B port

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) Other dimensions are the same as the single shaft. l 25 30 40 45 N 15 17 20 25 U 89 105 130 156 L 14 16 19 24 Model G 11 13 15 19 H 27 29 38 44 UU 109 127 155 186 K 5 5 5 5 UU 134 158 192 232 Model H 27 29 38 44 G 11 13 15 19 M 20 22 25 30 N 15 17 20 25 L 14 16 19 24 Model H 36 41 50 60 CRA1BY50 CRA1BY63 CRA1BY80 CRA1BY100 CRA1BX50 CRA1BX63 CRA1BX80 CRA1BX100 CRA1BZ50 CRA1BZ63 CRA1BZ80

Vacuum System Peripherals:

Series ZM 13-14-20 4.

Thermo-chiller/Rack Mount Type

0 5 10 15 20 25 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] HRR050-A-20, HRR050-W-20 0.5 Circulating fluid pressure [MPa] Outlet: 60 Hz 0.4 0.3 Outlet: 50 Hz Return port Return port (Option Z) 0.2 Allowable operating range 0.1 0 0 10 20 30 40 Circulating fluid flow rate [L/min] Required Facility Water Flow Rate 012 018 024 030 HRR -W HRR010-W-20 30 20 Facility

Mechanically Jointed Rodless Cylinder with Protective Cover Series MY1W

Auto Switch Proper Mounting Position for Stroke End Detection MY1CW 16, 20 MY1MW 16, 20 B A Reed switch D-A90(V), D-A93(V), D-A96(V) Solid state switch D-F9N(V), D-F9P(V), D-F9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) Mounting position 20 16 20 16 20 Mounting position Mounting position 16 A 90 70 93 73 94 A A 74 B 110 90 107 87 106 B B 86 Operating range Note) 7.5 11 6.5 8.5 6.5 Operating range

CQM

Series Variations Series Bore size (mm) Standard stroke (mm) Cushion 5 10 15 20 25 30 35 40 45 50 75 100 12, 16 20, 25 Rubber bumper CQM 32, 40 50 7-5-1 2 Compact Cylinder: Guide Rod Type Double Acting, Single Rod Series CQM 12, 16, 20, 25, 32, 40, 50 How to Order Without auto switch B 20 10 CQM M9B S B 20 10 CDQM With auto switch With auto switch Courtesy of Steven Engineering, Inc.-230

Brake mechanism added

D-Y7WV n 75 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 80 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 90 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) (n = 2, 4, 6, 8) Note 1) 10 + 30 (n 2) 2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 95 2 (Different surfaces, Same surface) 1 20 100 105 110 D-Y7BA n 100 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 105 + 45 (n 4) 2 (n = 4, 8, 12, 16) Note 2) 110 + 45

AC Servo Motor Driver (CC-Link Type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Maximum stations are 16.

SFOD-OMT0010

[mm] 30 20 10 Stroke [mm] 1200 1000 1100 1200 1000 1100 1200 Max. speed [mm/s] 500 500 410 340 250 200 170 Min. speed [mm/s] 30 20 10 (Independent and interpolation) Min. speed [mm/s] 49 33 17 (Speed tuning control) Supplement 1.3 Initial setting of LES(H) series Model LES(H)8 LES(H)16 LES(H)25 Lead symbol J K J K J K Lead [mm] 8 4 10 5 16 8 Max. speed [mm/s] 400 200 400 200 400 200 Min.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

16 (20) 16 (20) 26 31 38 47 58 72 89 110 M4 x 0.7 depth 7 M8 x 1.25 M10 x 1.25 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 0 0 0 23 23 20 20 20 114 (122) 119 (127) 121 (129) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) Up to 200 201 to 1500 6 8 10 14 18 18 22 26 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 5 6 6 8 11 11 13 16 77 (85